Angular velocity sensor
First Claim
1. An angular velocity sensor comprising:
- a base plate;
four driven mass portions arranged to face the base plate with gaps provided therebetween and arranged at different locations in a circumferential direction about a central portion and which are point-symmetrical with respect to the central portion;
a coupling beam interconnecting the four driven mass portions and flexurally deforming when the four driven mass portions are displaced in a horizontal direction parallel or substantially parallel to the base plate;
four connecting portions extending radially about the central portion, each arranged between two adjacent ones of the driven mass portions in the circumferential direction, and connected to the coupling beam;
driven beams disposed respectively in the four connecting portions and supporting the connecting portions to be displaceable in a lengthwise direction thereof when the coupling beam is flexurally deformed;
driving elements arranged to vibrate the four driven mass portions in the circumferential direction about the central portion in a state in which two adjacent ones of the driven mass portions in the circumferential direction are vibrated in opposite phases;
detecting mass portions disposed respectively in the four driven mass portions;
detecting beams disposed between the detecting mass portions and the driven mass portions and supporting the detecting mass portions to be displaceable in a direction of thickness of the base plate; and
displacement detecting elements arranged to detect displacements of the detecting mass portions in the direction of thickness of the base plate.
1 Assignment
0 Petitions
Accused Products
Abstract
In an angular velocity sensor, driven mass portions are disposed on a surface of a base plate at point-symmetrical locations with respect to a central point O. The driven mass portions are connected to a coupling beam to be interconnected. The coupling beam is flexibly supported through connecting portions and driven beam. Detecting mass portions are disposed inside the driven mass portions, and the detecting mass portions are supported by detecting beams to be displaceable in the Z-axis direction. Two adjacent ones of the driven mass portions in the circumferential direction are vibrated by vibration generation portions in opposite phases to each other. When angular velocities are exerted in such a state, the detecting mass portions are caused to displace and vibrate in the direction of thickness of the base plate. Displacement detecting portions detect displacements of the detecting mass portions in the direction of the thickness.
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Citations
8 Claims
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1. An angular velocity sensor comprising:
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a base plate; four driven mass portions arranged to face the base plate with gaps provided therebetween and arranged at different locations in a circumferential direction about a central portion and which are point-symmetrical with respect to the central portion; a coupling beam interconnecting the four driven mass portions and flexurally deforming when the four driven mass portions are displaced in a horizontal direction parallel or substantially parallel to the base plate; four connecting portions extending radially about the central portion, each arranged between two adjacent ones of the driven mass portions in the circumferential direction, and connected to the coupling beam; driven beams disposed respectively in the four connecting portions and supporting the connecting portions to be displaceable in a lengthwise direction thereof when the coupling beam is flexurally deformed; driving elements arranged to vibrate the four driven mass portions in the circumferential direction about the central portion in a state in which two adjacent ones of the driven mass portions in the circumferential direction are vibrated in opposite phases; detecting mass portions disposed respectively in the four driven mass portions; detecting beams disposed between the detecting mass portions and the driven mass portions and supporting the detecting mass portions to be displaceable in a direction of thickness of the base plate; and displacement detecting elements arranged to detect displacements of the detecting mass portions in the direction of thickness of the base plate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification