Photomask and pattern formation method using the same
First Claim
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1. A photomask comprising:
- a transparent substrate having a transparent property against exposing light,a semi-light-shielding portion formed on the transparent substrate;
an opening formed in the semi-light-shielding portion; and
a light-shielding portion formed on the transparent substrate and surrounding the opening, wherein;
the semi-light-shielding portion transmits the exposing light in an identical phase with respect to the opening, andthe light-shielding portion has a width not more than a maximum width with which an unexposed region is not formed by the exposing light having passed through the opening and diffracting at an edge of the opening to round to a back of the light-shielding portion.
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Abstract
A photomask includes a transparent substrate having a transparent property against exposing light, a semi-light-shielding portion formed on the transparent substrate, a first opening formed in the semi-light-shielding portion and having a first dimension and a second opening formed in the semi-light-shielding portion and having a second dimension lager than the first dimension. A phase-shifting portion which transmits the exposing light in an opposite phase with respect to the first opening is formed on the transparent substrate around the first opening. A light-shielding portion is formed on the transparent substrate around the second opening.
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Citations
13 Claims
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1. A photomask comprising:
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a transparent substrate having a transparent property against exposing light, a semi-light-shielding portion formed on the transparent substrate; an opening formed in the semi-light-shielding portion; and a light-shielding portion formed on the transparent substrate and surrounding the opening, wherein; the semi-light-shielding portion transmits the exposing light in an identical phase with respect to the opening, and the light-shielding portion has a width not more than a maximum width with which an unexposed region is not formed by the exposing light having passed through the opening and diffracting at an edge of the opening to round to a back of the light-shielding portion. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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Specification