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MOS device with low injection diode

  • US 8,283,723 B2
  • Filed: 12/21/2007
  • Issued: 10/09/2012
  • Est. Priority Date: 02/11/2005
  • Status: Active Grant
First Claim
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1. A semiconductor device formed on a semiconductor substrate, comprising:

  • a drain;

    an epitaxial layer overlaying the drain; and

    an active region comprising;

    a body disposed in the epitaxial layer, having a body top surface;

    a source embedded in the body, extending from the body top surface into the body;

    a gate trench extending into the epitaxial layer;

    a gate disposed in the gate trench;

    an active region contact trench extending through the source and into the body;

    an active region contact electrode disposed within the active region contacttrench;

    wherein;

    the body includes a thin body layer that separates the active region contact electrode from the drain and that has a dopant concentration that is substantially the same as the rest of the body;

    thickness and dopant concentration of the body layer are such that in a reverse bias mode the layer of body region is substantially depleted, and in a forward bias mode the layer of body region is not depleted;

    wherein a low injection diode is formed below a body/drain junction.

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