Multichip semiconductor device, chip therefor and method of formation thereof
First Claim
1. A multichip semiconductor device including a plurality of chips stacked on each other, each of the chips having a semiconductor substrate on which circuit components are formed, whereintwo adjacent chips included in the plurality of chips are electrically connected to each other via a connecting substrate provided between the two adjacent chips, wherein each of the two adjacent chips comprises:
- a first interlayer insulating film formed above a surface of the semiconductor substrate;
a through hole passing through the semiconductor substrate and the first interlayer insulating film;
a conductive plug formed entirely within the through hole;
a second interlayer insulating film formed on the first interlayer insulating film; and
a metal interconnection which passes through the second interlayer insulating film and which connects to a portion of the conductive plug, an area of the portion being smaller than a cross-sectional area of the conductive plug; and
the conductive plugs of the two adjacent chips are electrically connected to each other via the connecting substrate.
0 Assignments
0 Petitions
Accused Products
Abstract
A multichip semiconductor device is disclosed in which chips are stacked each of which comprises a semiconductor substrate formed on top with circuit components and an interlayer insulating film formed on the top of the semiconductor substrate. At least one of the chips has a connect plug of a metal formed in a through hole that passes through the semiconductor substrate and the interlayer insulating film. The chip with the connect plug is electrically connected with another chip by that connect plug.
80 Citations
8 Claims
-
1. A multichip semiconductor device including a plurality of chips stacked on each other, each of the chips having a semiconductor substrate on which circuit components are formed, wherein
two adjacent chips included in the plurality of chips are electrically connected to each other via a connecting substrate provided between the two adjacent chips, wherein each of the two adjacent chips comprises: -
a first interlayer insulating film formed above a surface of the semiconductor substrate; a through hole passing through the semiconductor substrate and the first interlayer insulating film; a conductive plug formed entirely within the through hole; a second interlayer insulating film formed on the first interlayer insulating film; and a metal interconnection which passes through the second interlayer insulating film and which connects to a portion of the conductive plug, an area of the portion being smaller than a cross-sectional area of the conductive plug; and the conductive plugs of the two adjacent chips are electrically connected to each other via the connecting substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
-
Specification