Display device, method of manufacturing the same and mask for manufacturing the same
First Claim
1. A method of manufacturing a display device comprising:
- forming a storage electrode pattern on a substrate;
forming an output terminal to which an image signal is applied on a first dielectric layer that covers the storage electrode pattern;
forming a second dielectric layer and an insulating layer on the first dielectric layer having the output terminal;
patterning the insulating layer and the second dielectric layer so that a portion of the second dielectric layer corresponding to the output terminal is exposed, and a remaining portion of the insulating layer corresponding to the storage electrode pattern remains on a portion of the second dielectric layer corresponding to the storage electrode pattern;
partially removing the exposed second dielectric layer and the remaining portion of the insulating layer to form a first contact hole through which the output terminal is partially exposed and a second contact hole in the second dielectric layer corresponding to the storage electrode pattern; and
forming a pixel electrode on the insulating layer, the pixel electrode being electrically connected to the output terminal through the first contact hole, and corresponding to the storage electrode pattern in the second contact hole.
1 Assignment
0 Petitions
Accused Products
Abstract
A mask is provided. The mask includes a mask body, a first exposing part and a second exposing part. The first exposing part is on the mask body. The first exposing part includes a first light transmitting portion and second light transmitting portions. The first light transmitting portion exposes a portion of the photoresist film corresponding to the output terminal to a light of a first light amount. The second light transmitting portions exposes an adjacent portion of the photoresist film adjacent to the output terminal to a light of a second light amount smaller than the first light amount. The second exposing part is on the mask body. The second exposing part includes third light transmitting portions for partially exposing the photoresist film corresponding to the storage electrode to a light of a third light amount that is between the first and second light amounts.
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Citations
24 Claims
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1. A method of manufacturing a display device comprising:
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forming a storage electrode pattern on a substrate; forming an output terminal to which an image signal is applied on a first dielectric layer that covers the storage electrode pattern; forming a second dielectric layer and an insulating layer on the first dielectric layer having the output terminal; patterning the insulating layer and the second dielectric layer so that a portion of the second dielectric layer corresponding to the output terminal is exposed, and a remaining portion of the insulating layer corresponding to the storage electrode pattern remains on a portion of the second dielectric layer corresponding to the storage electrode pattern; partially removing the exposed second dielectric layer and the remaining portion of the insulating layer to form a first contact hole through which the output terminal is partially exposed and a second contact hole in the second dielectric layer corresponding to the storage electrode pattern; and forming a pixel electrode on the insulating layer, the pixel electrode being electrically connected to the output terminal through the first contact hole, and corresponding to the storage electrode pattern in the second contact hole. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method of manufacturing a display device comprising:
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foaming a storage electrode pattern between a substrate and a first dielectric layer on the substrate; forming an output terminal on the first dielectric layer; forming a second dielectric layer and an insulating layer on the first dielectric layer and the output terminal; patterning the insulating layer to form a first contact hole through which a portion of the second dielectric layer corresponding to the output terminal is partially exposed and a stepped pattern corresponding to the storage electrode pattern; patterning the second dielectric layer to form a second contact hole through which the output terminal is partially exposed and an embossed pattern corresponding to the stepped pattern; and forming a pixel electrode electrically connected to the output terminal, the pixel electrode comprising a storage electrode portion that covers the embossed pattern. - View Dependent Claims (12, 13, 14, 15, 16, 17)
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18. A method of manufacturing a display device comprising:
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forming a storage electrode pattern between a substrate and a first dielectric layer on the substrate and an output terminal on the first dielectric layer; forming a second dielectric layer and an insulating layer on the first dielectric layer and the output terminal; patterning the insulating layer to form a first contact hole through which a portion of the second dielectric layer corresponding to the output terminal is partially exposed and a plurality of insulating patterns corresponding to the storage electrode pattern, the insulating patterns having different heights; patterning the second dielectric layer to form a second contact hole through which the output terminal is partially exposed; patterning the second and first dielectric layers to form an embossed pattern corresponding to the insulating patterns; and forming a pixel electrode electrically connected to the output terminal, the pixel electrode comprising a storage electrode portion that covers the embossed pattern. - View Dependent Claims (19, 20, 21)
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22. A method of manufacturing a display device comprising:
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forming a storage electrode pattern, a first dielectric layer covering the storage electrode pattern, an output terminal outputting a data signal, a second dielectric layer covering the output terminal and an insulating layer on the second dielectric layer on a substrate; aligning a mask including a slit exposing part having a plurality of slits and a translucent part corresponding to the storage electrode pattern on the insulating layer; patterning the insulating layer and the second dielectric layer using the slit exposing part and the translucent part so that a portion of the second dielectric layer corresponding to the output terminal is exposed, and a remaining portion of the insulating layer corresponding to the storage electrode pattern remains on a portion of the second dielectric layer corresponding to the storage electrode pattern; partially removing the exposed second dielectric layer and the remaining portion of the insulating layer to form a contact hole through which the output terminal is partially exposed and to expose a portion of the second dielectric layer corresponding to the storage electrode pattern; and forming a pixel electrode on the insulating layer, the pixel electrode being electrically connected to the output terminal through the contact hole, and corresponding to the storage electrode pattern in the second contact hole. - View Dependent Claims (23, 24)
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Specification