Display device, method of manufacturing the same and mask for manufacturing the same

• US 8,284,338 B2
• Filed: 09/22/2011
• Issued: 10/09/2012
• Est. Priority Date: 06/03/2005
• Status: Active Grant

• Current Assignee: Samsung Display Company Limited (Samsung Electronics Co. Ltd.)
• Original Assignee: Samsung Electronics Co. Ltd.
• Inventors: Chai, Chong-Chul, Kim, Shi-Yul, Kim, Sang-Gab, Souk, Jun-Hyung, Whangbo, Sang-Woo, Chang, Won-Kie, Lee, Hi-Kuk, Yoon, Soo-Wan, Kim, Soo-Jin
• Primary Examiner(s): Nguyen, Dung T.
• Application Number:
  US13/239,759
• Publication Number:
  US 20120009842A1
• Time in Patent Office: 383 Days
• Field of Search: 349 42- 43, 349149-152, 349/38, 349/187, 257/59, 257/72
• US Class Current: 349/38
• CPC Class Codes: G02F 1/13458 Terminal pads
• CPC Class Codes: G02F 1/136213 Storage capacitors associated with the pixel electrode
• CPC Class Codes: G02F 1/136236 using a grey or half tone lithographic process
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

A mask is provided. The mask includes a mask body, a first exposing part and a second exposing part. The first exposing part is on the mask body. The first exposing part includes a first light transmitting portion and second light transmitting portions. The first light transmitting portion exposes a portion of the photoresist film corresponding to the output terminal to a light of a first light amount. The second light transmitting portions exposes an adjacent portion of the photoresist film adjacent to the output terminal to a light of a second light amount smaller than the first light amount. The second exposing part is on the mask body. The second exposing part includes third light transmitting portions for partially exposing the photoresist film corresponding to the storage electrode to a light of a third light amount that is between the first and second light amounts.

Claims

1. A method of manufacturing a display device comprising:

forming a storage electrode pattern on a substrate;

forming an output terminal to which an image signal is applied on a first dielectric layer that covers the storage electrode pattern;

forming a second dielectric layer and an insulating layer on the first dielectric layer having the output terminal;

patterning the insulating layer and the second dielectric layer so that a portion of the second dielectric layer corresponding to the output terminal is exposed, and a remaining portion of the insulating layer corresponding to the storage electrode pattern remains on a portion of the second dielectric layer corresponding to the storage electrode pattern;

partially removing the exposed second dielectric layer and the remaining portion of the insulating layer to form a first contact hole through which the output terminal is partially exposed and a second contact hole in the second dielectric layer corresponding to the storage electrode pattern; and

forming a pixel electrode on the insulating layer, the pixel electrode being electrically connected to the output terminal through the first contact hole, and corresponding to the storage electrode pattern in the second contact hole.

2. The method of claim 1, wherein the forming of the storage electrode pattern further comprises forming a plurality of gate lines adjacent to the storage electrode pattern.

3. The method of claim 2, after the forming of the first dielectric layer, further comprising:

forming a channel layer on the first dielectric layer, the channel layer corresponding to a gate electrode that is electrically connected to the gate line; and

forming an output terminal, the output terminal being electrically connected to the channel layer.

4. The method of claim 3, wherein the channel layer comprises an amorphous silicon pattern and an impurity doped amorphous silicon pattern on the amorphous silicon pattern.

5. The method of claim 1, wherein a portion of the insulating layer corresponding to the output terminal is exposed to a light of a first light amount and a portion of the insulating layer corresponding to the storage electrode pattern is exposed to a light of a second light amount.

6. The method of claim 1, wherein a thickness of the insulating layer corresponding to the storage electrode pattern is substantially the same as a thickness of the second dielectric layer.

7. The method of claim 1, wherein the remaining portion of the insulating layer corresponding to the storage electrode pattern is removed through an ashing process.

8. The method of claim 1, wherein the insulating layer corresponding to the output terminal has a first opening having a first width and a second opening having a second width that is smaller than the first width.

9. The method of claim 1, wherein the insulating layer has a first opening having a first width and a second opening having a second width that is smaller than the first width.

10. The method of claim 1, wherein the forming of the pixel electrode comprises:

forming a transparent conductive layer on the insulating layer; and

patterning the transparent conductive layer so that the pixel electrode is electrically connected to the output terminal and corresponds to the storage electrode pattern.

11. A method of manufacturing a display device comprising:

foaming a storage electrode pattern between a substrate and a first dielectric layer on the substrate;

forming an output terminal on the first dielectric layer;

forming a second dielectric layer and an insulating layer on the first dielectric layer and the output terminal;

patterning the insulating layer to form a first contact hole through which a portion of the second dielectric layer corresponding to the output terminal is partially exposed and a stepped pattern corresponding to the storage electrode pattern;

patterning the second dielectric layer to form a second contact hole through which the output terminal is partially exposed and an embossed pattern corresponding to the stepped pattern; and

forming a pixel electrode electrically connected to the output terminal, the pixel electrode comprising a storage electrode portion that covers the embossed pattern.

12. The method of claim 11, wherein the display device further comprises a gate line between the substrate and the first dielectric layer adjacent to the source electrode pattern.

13. The method of claim 11, wherein the display device further comprises:

a data line on the first dielectric layer; and

a channel layer electrically connected to the output terminal.

14. The method of claim 13, wherein the channel layer comprises an amorphous silicon pattern and an impurity doped amorphous silicon pattern on the amorphous silicon pattern.

15. The method of claim 11, wherein the patterning of the insulating layer further comprises aligning a mask on the insulating layer, and the mask has a plurality of slits corresponding to the stepped pattern.

16. The method of claim 11, wherein the second dielectric layer is patterned using the stepped pattern as an etching mask.

17. The method of claim 16, wherein the stepped pattern is removed from the second dielectric layer having the embossed pattern through an ashing process.

18. A method of manufacturing a display device comprising:

forming a storage electrode pattern between a substrate and a first dielectric layer on the substrate and an output terminal on the first dielectric layer;

forming a second dielectric layer and an insulating layer on the first dielectric layer and the output terminal;

patterning the insulating layer to form a first contact hole through which a portion of the second dielectric layer corresponding to the output terminal is partially exposed and a plurality of insulating patterns corresponding to the storage electrode pattern, the insulating patterns having different heights;

patterning the second dielectric layer to form a second contact hole through which the output terminal is partially exposed;

patterning the second and first dielectric layers to form an embossed pattern corresponding to the insulating patterns; and

forming a pixel electrode electrically connected to the output terminal, the pixel electrode comprising a storage electrode portion that covers the embossed pattern.

19. The method of claim 18, wherein the patterning of the insulating layer further comprises aligning a mask on the insulating layer, and the mask has a plurality of slits of various widths corresponding to the insulating patterns.

20. The method of claim 18, wherein the second and first dielectric layers are etched using the insulating patterns as an etching mask.

21. The method of claim 18, wherein the insulating patterns are removed from the second dielectric layer having the embossed pattern through an ashing process.

22. A method of manufacturing a display device comprising:

forming a storage electrode pattern, a first dielectric layer covering the storage electrode pattern, an output terminal outputting a data signal, a second dielectric layer covering the output terminal and an insulating layer on the second dielectric layer on a substrate;

aligning a mask including a slit exposing part having a plurality of slits and a translucent part corresponding to the storage electrode pattern on the insulating layer;

patterning the insulating layer and the second dielectric layer using the slit exposing part and the translucent part so that a portion of the second dielectric layer corresponding to the output terminal is exposed, and a remaining portion of the insulating layer corresponding to the storage electrode pattern remains on a portion of the second dielectric layer corresponding to the storage electrode pattern;

partially removing the exposed second dielectric layer and the remaining portion of the insulating layer to form a contact hole through which the output terminal is partially exposed and to expose a portion of the second dielectric layer corresponding to the storage electrode pattern; and

forming a pixel electrode on the insulating layer, the pixel electrode being electrically connected to the output terminal through the contact hole, and corresponding to the storage electrode pattern in the second contact hole.

23. The method of claim 22, wherein a wavelength of a light that is irradiated onto the mask is about 436 nm to about 193 nm, and a light transmittance of the translucent part is about 20% to about 70%.

24. The method of claim 22, wherein the translucent part comprises a chromium oxide layer or a chromium nitride layer.