Determining calibration parameters for a lithographic process

• US 8,285,030 B2
• Filed: 03/15/2010
• Issued: 10/09/2012
• Est. Priority Date: 03/15/2010
• Status: Active Grant

• Current Assignee: Synopsys Incorporated
• Original Assignee: Synopsys Incorporated
• Inventors: Zhou, Xin, Lian, Yaogang, Gleason, Robert E.
• Primary Examiner(s): Rahmjoo, Mike
• Application Number:
  US12/724,362
• Publication Number:
  US 20110222739A1
• Time in Patent Office: 939 Days
• Field of Search: 382/144, 382/141, 382/145, 382/147, 382/151, 382/181, 355/55, 355/77, 355/53, 355/72, 355/75
• US Class Current: 382/144
• CPC Class Codes: G03F 7/705 Modelling or simulating from physical phenomena up to complete wafer processes or whole workflow in wafer productions
• CPC Class Codes: G03F 7/70516 Calibration of components of the microlithographic apparatus, e.g. light sources, addressable masks or detectors
• CPC Class Codes: G03F 7/70641 Focus

Abstract

A technique for determining a set of calibration parameters for use in a model of a photo-lithographic process is described. In this calibration technique, images of a test pattern that was produced using the photo-lithographic process are used to determine corresponding sets of calibration parameters. These images are associated with at least three different focal planes in an optical system, such as a photo-lithographic system that implements the photo-lithographic process. Moreover, an interpolation function is determined using the sets of calibration parameters. This interpolation function can be used to determine calibration parameters at an arbitrary focal plane in the photo-lithographic system for use in simulations of the photo-lithographic process, where the set of calibration parameters are used in a set of transmission cross coefficients in the model of the photo-lithographic process.

Claims

1. A computer-implemented method for determining a set of calibration parameters for use in a model of a photo-lithographic process, comprising:

receiving images of a test pattern, wherein the test pattern was produced using the photo-lithographic process, wherein the images include a first image at a first focal plane in an optical system, a second image at a second focal plane in the optical system, and a third image at a third focal plane in the optical system, and wherein the first focal plane, the second focal plane and the third focal plane are different;

calculating, by a computer, a first set of calibration parameters associated with the first image, a second set of calibration parameters associated with the second image, and a third set of calibration parameters associated with the third image; and

determining an interpolation function based on the first set of calibration parameters, the second set of calibration parameters, and the third set of calibration parameters, wherein the interpolation function provides the set of calibration parameters corresponding to an arbitrary focal plane in a photo-lithographic system that implements the photo-lithographic process; and

wherein the set of calibration parameters are used in a set of transmission cross coefficients in the model of the photo-lithographic process.

2. The method of claim 1, wherein the interpolation function includes a quadratic function of a difference between the arbitrary focus plane and a reference focal plane of the photo-lithographic system.

3. The method of claim 2, wherein the difference is normalized by a characteristic wavelength used in the photo-lithographic process.

4. The method of claim 2, wherein the difference is normalized by a characteristic wavelength used when capturing the images.

5. The method of claim 2, wherein the quadratic function includes a constant term which corresponds to an average of the first set of calibration parameters, the second set of calibration parameters, and the third set of calibration parameters.

6. The method of claim 2, wherein the quadratic function includes a linear dependence on the difference.

7. The method of claim 1, wherein one of the first focal plane, the second focal plane and the third focal plane is a focal plane of the photo-lithographic system.

8. The method of claim 1, wherein calculating a given set of calibration parameters, which can be the first set of calibration parameters, the second set of calibration parameters or the third set of calibration parameters, associated with a given focal plane, which can be the first focal plane, the second focal plane or the third focal plane, involves comparing a given image, which can be the first image, the second image or the third image, with a target image corresponding to the test pattern.

9. The method of claim 1, further comprising determining a mask pattern at an object plane in the photo-lithographic system using an inverse optical calculation based on one or more target wafer patterns at one or more focal planes in the photo-lithographic system and the model of a photo-lithographic process, wherein the determining may involve one or more sets of calibration parameters determined using the interpolation function.

10. The method of claim 1, wherein the images include critical-dimension scanning-electron-microscope images of the test pattern.

11. A computer-program product for use in conjunction with a computer system, the computer-program product comprising a non-transitory computer-readable storage medium and a computer-program mechanism embedded therein for determining a set of calibration parameters for use in a model of a photo-lithographic process, the computer-program mechanism including:

instructions for receiving images of a test pattern, wherein the test pattern was produced using the photo-lithographic process, wherein the images include a first image at a first focal plane in an optical system, a second image at a second focal plane in the optical system, and a third image at a third focal plane in the optical system, and wherein the first focal plane, the second focal plane and the third focal plane are different;

instructions for calculating a first set of calibration parameters associated with the first image, a second set of calibration parameters associated with the second image, and a third set of calibration parameters associated with the third image; and

instructions for determining an interpolation function based on the first set of calibration parameters, the second set of calibration parameters, and the third set of calibration parameters, wherein the interpolation function provides the set of calibration parameters corresponding to an arbitrary focal plane in a photo-lithographic system that implements the photo-lithographic process; and

wherein the set of calibration parameters are used in a set of transmission cross coefficients in the model of the photo-lithographic process.

12. The computer-program product of claim 11, wherein the interpolation function includes a quadratic function of a difference between the arbitrary focus plane and a reference focal plane of the photo-lithographic system.

13. The computer-program product of claim 12, wherein the difference is normalized by a characteristic wavelength used in the photo-lithographic process.

14. The computer-program product of claim 12, wherein the quadratic function includes a constant term which corresponds to an average of the first set of calibration parameters, the second set of calibration parameters, and the third set of calibration parameters.

15. The computer-program product of claim 12, wherein the quadratic function includes a linear dependence on the difference.

16. The computer-program product of claim 11, wherein one of the first focal plane, the second focal plane and the third focal plane is a focal plane of the photo-lithographic system.

17. The computer-program product of claim 11, wherein calculating a given set of calibration parameters, which can be the first set of calibration parameters, the second set of calibration parameters or the third set of calibration parameters, associated with a given focal plane, which can be the first focal plane, the second focal plane or the third focal plane, involves comparing a given image, which can be the first image, the second image or the third image, with a target image corresponding to the test pattern.

18. The computer-program product of claim 11, wherein the computer-program mechanism further includes instructions for determining a mask pattern at an object plane in the photo-lithographic system using an inverse optical calculation based on one or more target wafer patterns at one or more focal planes in the photo-lithographic system and the model of a photo-lithographic process, wherein the determining may involve one or more sets of calibration parameters determined using the interpolation function.

19. The computer-program product of claim 11, wherein the images include critical-dimension scanning-electron-microscope images of the test pattern.

20. A computer system, comprising:

a processor;

a memory; and

a program module for determining a source pattern to illuminate a photo-mask during a photo-lithographic process, the program module stored in the memory and configured to be executed by the processor to determine a set of calibration parameters for use in a model of a photo-lithographic process, the program module including;

instructions for receiving images of a test pattern, wherein the test pattern was produced using the photo-lithographic process, wherein the images include a first image at a first focal plane in an optical system, a second image at a second focal plane in the optical system, and a third image at a third focal plane in the optical system, and wherein the first focal plane, the second focal plane and the third focal plane are different;

instructions for calculating a first set of calibration parameters associated with the first image, a second set of calibration parameters associated with the second image, and a third set of calibration parameters associated with the third image; and

instructions for determining an interpolation function based on the first set of calibration parameters, the second set of calibration parameters, and the third set of calibration parameters, wherein the interpolation function provides the set of calibration parameters corresponding to an arbitrary focal plane in a photo-lithographic system that implements the photo-lithographic process; and

wherein the set of calibration parameters are used in a set of transmission cross coefficients in the model of the photo-lithographic process.