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Dual scanning stage

  • US 8,285,418 B2
  • Filed: 07/12/2010
  • Issued: 10/09/2012
  • Est. Priority Date: 07/23/2009
  • Status: Expired due to Fees
First Claim
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1. A profilometer, comprising:

  • a guide beam for providing translational movement of substrates in a Y axis relative to a stylus,a first stage for receiving a first substrate, the first stage slidably mounted to the guide beam, the first stage associated with a first motor for providing independent translational movement for the first stage in an X axis relative to the stylus,a second stage for receiving a second substrate, the second stage slidably mounted to the guide beam, the second stage associated with a second motor for providing independent translational movement for the second stage in the X axis relative to the stylus,where the first stage and the second stage can only move together in the Y axis, as the guide beam moves in the Y axis, and move independently of one another in the X axis,a robot for loading the substrates onto and unloading the substrates off of the first stage and the second stage, anda controller for directing the robot to load the second substrate onto the second stage, while simultaneously directing the first stage and the guide beam to scan the first substrate on the first stage in the X and Y axes under the stylus, thereby generating profile readings of the first substrate on the first stage.

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