Sensor bridge with thermally isolating apertures

• US 8,286,478 B2
• Filed: 12/15/2010
• Issued: 10/16/2012
• Est. Priority Date: 12/15/2010
• Status: Expired due to Fees

• Current Assignee: Honeywell International Inc.
• Original Assignee: Honeywell International Inc.
• Inventors: Speldrich, Brian
• Primary Examiner(s): Patel, Harshad R
• Application Number:
  US12/969,403
• Publication Number:
  US 20120152014A1
• Time in Patent Office: 671 Days
• Field of Search: None
• US Class Current: 73/204.23
• CPC Class Codes: G01F 1/6845 Micromachined devices
• CPC Class Codes: G01F 1/692 Thin-film arrangements

Abstract

A sensor having a sensor bridge supported above a substrate is disclosed. A number of thermally isolating apertures are provided in the sensor bridge to help increase the thermal isolation of the sensor bridge from the substrate. In one illustrative embodiment, a heater element, an upstream sensor element, and/or a downstream sensor element are provided on the sensor bridge. A plurality of apertures may extend through the sensor bridge to thermally isolate the heater element, the upstream and/or downstream sensor element from the substrate and/or from each other. In one illustrative embodiment, the plurality of apertures may be provided at spaced locations adjacent a first lateral side of the sensor bridge, adjacent the second lateral side of the sensor bridge, between the heater element and the upstream sensor element, and/or between the heater element and the downstream sensor element. In some cases, the plurality of apertures may be substantially round, oval, rectangular and/or any other suitable shape.

Claims

1. A flow sensor for sensing a flow of a fluid stream, the flow sensor comprising:

a substrate having a top surface;

a depression extending into the substrate from the top surface, the depression having an upstream side, a downstream side, a first lateral side and a second lateral side, wherein during use of the flow sensor, the fluid stream flows from the upstream side towards the downstream side;

a bridge extending across the depression from the first lateral side of the depression to the second lateral side, the bridge being supported by the substrate adjacent the first lateral side and the second lateral side of the depression, wherein the bridge includes first and second lateral sides extending substantially parallel to a direction of fluid flow, and a leading edge and a spaced trailing edge each extending from the first lateral side to the second lateral side of the depression, the leading edge of the bridge being spaced apart from the upstream side of the depression defining a fluid inlet and the trailing edge of the bridge being spaced apart from the downstream side of the depression defining a fluid outlet;

a heater element provided on the bridge;

a first sensor element provided on the bridge adjacent an upstream side of the heater element;

a second sensor element provided on the bridge adjacent a downstream side of the heater element; and

a plurality of apertures extending through the bridge, the plurality of apertures disposed at spaced locations adjacent the first lateral side of the depression along a direction that is substantially parallel to the direction of fluid flow.

2. The flow sensor of claim 1, further comprising a plurality of apertures extending through the bridge at spaced locations adjacent the second lateral side of the depression.

3. The flow sensor of claim 1, further comprising a plurality of apertures extending through the bridge and disposed at spaced locations between the first lateral side and the second lateral side of the depression, and disposed between the heater element and the first sensor element.

4. The flow sensor of claim 1, further comprising a plurality of apertures extending through the bridge and disposed at spaced locations between the first lateral side and the second lateral side of the depression, and disposed between the heater element and the second sensor element.

5. The flow sensor of claim 1, wherein the plurality of apertures are disposed at spaced locations in a linear array.

6. The flow sensor of claim 1, further including a first conductive trace supported by the bridge extending from the heater element toward the first lateral side of the depression, the first conductive trace passing between two of the plurality of apertures.

7. The flow sensor of claim 6, further including a second conductive trace supported by the bridge extending from the first sensor element toward the first lateral side of the depression, the second conductive trace passing between two of the plurality of apertures.

8. The flow sensor of claim 6, further including a third conductive trace supported by the bridge extending from the second sensor element toward the first lateral side of the depression, the third conductive trace passing between two of the plurality of apertures.

9. The flow sensor of claim 1, wherein each of the plurality of apertures are substantially round in shape.

10. The flow sensor of claim 1, wherein each of the plurality of apertures are substantially oval in shape.

11. The flow sensor of claim 1, wherein each of the plurality of apertures are substantially rectangle in shape.

12. A flow sensor for sensing a flow of a fluid stream, the flow sensor comprising:

a substrate;

a bridge having an upstream side, a downstream side, a first lateral side and a second lateral side, wherein during use of the flow sensor, the fluid stream flows in a direction from the upstream side towards the downstream side of the bridge, and wherein the first and second lateral sides of the bridge extend substantially parallel to a direction of fluid flow;

the bridge is spaced from the substrate between the upstream side and the downstream side of the bridge, and is also spaced from the substrate between the first lateral side and the second lateral side of the bridge, the bridge being supported by the substrate adjacent the first lateral side and the second lateral side of the bridge;

a heater element supported by the bridge;

a first sensor element supported by the bridge adjacent the heater element; and

a plurality of spaced apertures extending through the bridge, the plurality of spaced apertures spaced from one another in a direction that is substantially parallel to the direction of fluid flow of the fluid stream.

13. The flow sensor of claim 12, wherein the plurality of spaced apertures are disposed along and adjacent to the first lateral side of the bridge.

14. The flow sensor of claim 12, wherein the first sensor element is positioned upstream of the heater element.

15. The flow sensor of claim 14, further comprising a second sensor element supported by the bridge downstream of the heater element.

16. The flow sensor of claim 12, further including a conductive trace supported by the bridge extending from the heater element toward the first lateral side of the bridge, the conductive trace passing between two of the plurality of spaced apertures.

17. The flow sensor of claim 12, further including a conductive trace supported by the bridge extending from the first sensor element toward the first lateral side of the bridge, the conductive trace passing between two of the plurality of spaced apertures.

18. The flow sensor of claim 12, wherein at least some of the plurality of spaced apertures are round in shape.

19. A flow sensor for sensing a flow of a fluid stream, the flow sensor comprising:

a substrate having a top surface;

a depression extending into the substrate from the top surface, the depression having an upstream side, a downstream side, a first lateral side and a second lateral side, wherein during use of the flow sensor, the fluid stream flows from the upstream side towards the downstream side, and wherein the first and second lateral sides of the depression extend parallel to a direction of fluid flow;

a bridge extending across the depression from the first lateral side of the depression to the second lateral side, the bridge being supported by the substrate adjacent the first lateral side and the second lateral side of the depression and having a leading edge and a trailing edge extending from the first lateral side to the second lateral side of the depression, the leading edge of the bridge being spaced apart from the upstream side of the depression defining a fluid inlet and the trailing edge of the bridge being spaced apart from the downstream side of the depression defining a fluid outlet;

a heater element supported by the bridge;

a sensor element supported by the bridge adjacent the heater element; and

an array of apertures extending through the bridge, the array of apertures having an array length that extends in a direction generally from the first lateral side toward the second lateral side of the depression, the array of apertures is further situated between the heater element and the sensor element.

20. The flow sensor of claim 19, wherein the array of apertures is a regular array of apertures.

21. The flow sensor of claim 20, wherein the array of apertures is an irregular array of apertures.