Laser processing systems using through-the-lens alignment of a laser beam with a target feature

• US 8,288,679 B2
• Filed: 05/28/2010
• Issued: 10/16/2012
• Est. Priority Date: 05/28/2009
• Status: Active Grant

• Current Assignee: Electro Scientific Industries Incorporated (MKS Instruments Incorporated)
• Original Assignee: Electro Scientific Industries Incorporated (MKS Instruments Incorporated)
• Inventors: Unrath, Mark A.
• Primary Examiner(s): Coleman, William D
• Application Number:
  US12/790,093
• Publication Number:
  US 20100301024A1
• Time in Patent Office: 872 Days
• Field of Search: 219/121.6, 219/121.67
• US Class Current: 219/121.67
• CPC Class Codes: B23K 2101/40 Semiconductor devices
• CPC Class Codes: B23K 2103/50 Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
• CPC Class Codes: B23K 26/032 using optical means
• CPC Class Codes: B23K 26/046 Automatically focusing the laser beam
• CPC Class Codes: B23K 26/0648 comprising lenses
• CPC Class Codes: B23K 26/0665 by beam condensation on the workpiece, e.g. for focusing
• CPC Class Codes: B23K 26/08 Devices involving relative movement between laser beam and workpiece
• CPC Class Codes: B23K 26/082 Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
• CPC Class Codes: B23K 26/40 taking account of the properties of the material involved

Abstract

A laser processing system for micromachining a workpiece includes a laser source to generate laser pulses for processing a feature in a workpiece, a galvanometer-driven (galvo) subsystem to impart a first relative movement of a laser beam spot position along a processing trajectory with respect to the surface of the workpiece, and an acousto-optic deflector (AOD) subsystem. The AOD subsystem may include a combination of AODs and electro-optic deflectors. The AOD subsystem may vary an intensity profile of laser pulses as a function of deflection position along a dither direction. The AOD subsystem may be used for aligning a processing laser beam to workpiece features.

Claims

1. A method for aligning a processing laser beam to workpiece features, the processing laser beam comprising a predetermined wavelength for processing the workpiece features, the method comprising:

propagating the processing laser beam along a propagation path through a scan lens to a workpiece;

manipulating the processing laser beam so as to illuminate, through the scan lens, a selected region of the workpiece comprising an alignment target with the manipulated processing laser beam at the predetermined wavelength, wherein the selected region is larger than a reference laser beam spot of the processing laser beam provided through the scan lens;

directing at least a portion of a reflection of the manipulated processing laser beam back through the scan lens to a camera for imaging the selected region of the workpiece; and

based on an image of the selected region captured by the camera, determining a position of the reference laser beam spot relative to the alignment target.

2. The method of claim 1, further comprising:

calculating a positioning error based on the determined position of the reference laser beam spot relative to the alignment target;

based on the calculated positioning error, positioning a processing laser beam spot position relative to a selected workpiece feature; and

propagating the processing laser beam along the propagation path through the scan lens so as to focus the processing laser beam at the predetermined wavelength at the processing laser beam spot position to process the selected workpiece feature.

3. The method of claim 1, wherein manipulating the processing laser beam so as to illuminate the selected region of the workpiece comprises:

diffusing or defocusing the processing laser beam.

4. The method of claim 1, wherein manipulating the processing laser beam so as to illuminate the selected region of the workpiece comprises:

using an acousto-optic deflector (AOD) subsystem to generate a raster pattern of laser beam spots that fills the selected region of the workpiece with a uniform fluence.

5. The method of claim 1, further comprising:

propagating the processing laser beam along the propagation path through the scan lens so as to focus the processing laser beam at a plurality of laser beam spot positions at the workpiece;

imaging, through the scan lens using the camera, a respective laser beam spot at each of the plurality of laser beam spot positions at the workpiece; and

based on the imaging, measuring a size of each of the respective laser beam spots to correct a height of the scan lens with respect to the workpiece to maintain a desired spot focus.

6. The method of claim 1, wherein the steps of manipulating the process laser beam so as to illuminate a selected region of the workpiece and determining the laser beam spot position relative to the alignment target are performed during an alignment procedure before processing the workpiece features with the processing laser beam.

7. The method of claim 1, wherein the steps of manipulating the process laser beam so as to illuminate a selected region of the workpiece and determining the laser beam spot position relative to the alignment target are performed in real-time during processing of the workpiece features with the processing laser beam.

8. The method of claim 4, further comprising:

using the AOD subsystem to provide the reference laser beam spot at a higher intensity than that of the raster pattern of laser beam spots to use as a reference for the determination of the position of the reference laser beam spot relative to the alignment target.

9. A laser processing system for aligning a processing laser beam to workpiece features, the processing laser beam comprising a predetermined wavelength for processing the workpiece features, the system comprising:

a laser source for providing the processing laser beam;

a scan lens to focus the processing laser beam at a laser beam spot on or in the workpiece;

an acousto-optic deflector (AOD) subsystem to;

generate a raster pattern of laser beam spots that illuminates a selected region of the workpiece, through the scan lens, with a uniform fluence, wherein the selected region includes an alignment target; and

provide, through the scan lens, the reference laser beam spot within the selected region, wherein the reference laser beam spot is at a higher intensity than that of the raster pattern of laser beam spots;

optical elements to direct at least a portion of a reflection of the processing laser beam from the selected region back through the scan lens; and

a camera for imaging the selected region of the workpiece, wherein the image of the selected region is used to determine a position of the reference laser beam spot relative to the alignment target.

10. The system of claim 9, wherein the optical elements comprise:

a partial reflector for receiving the reflection of the processing laser beam from the selected region through the scan lens; and

an imaging lens for receiving at least a portion of the reflection of the processing laser beam from the partial reflector and focusing the at least a portion of the reflection onto an aperture of the camera.

11. The system of claim 9, further comprising:

a controller for;

calculating a positioning error based on the determined position of the reference laser beam spot relative to the alignment target; and

based on the calculated positioning error, commanding the AOD subsystem to position a processing laser beam spot position relative to a selected workpiece feature;

wherein the processing laser beam propagates along the propagation path through the scan lens so as to focus the processing laser beam at the predetermined wavelength at the processing laser beam spot position to process the selected workpiece feature.

12. A system for aligning a processing laser beam to workpiece features, the processing laser beam comprising a predetermined wavelength for processing the workpiece features, the method comprising:

means for propagating the processing laser beam along a propagation path through a scan lens to a workpiece;

means for manipulating the processing laser beam so as to illuminate, through the scan lens, a selected region of the workpiece comprising an alignment target with the manipulated processing laser beam at the predetermined wavelength, wherein the selected region is larger than a reference laser beam spot of the processing laser beam provided through the scan lens;

means for directing at least a portion of a reflection of the manipulated processing laser beam back through the scan lens to a camera for imaging the selected region of the workpiece; and

means for determining, based on an image of the selected region captured by the camera, a position of the reference laser beam spot relative to the alignment target.

13. The system of claim 12, wherein the means for manipulating the processing laser beam so as to illuminate the selected region of the workpiece comprises:

means for diffusing or defocusing the processing laser beam.

14. The system of claim 12, wherein the means for manipulating the processing laser beam so as to illuminate the selected region of the workpiece comprises:

means for generating a raster pattern of laser beam spots that fills the selected region of the workpiece with a uniform fluence.

15. The system of claim 14, wherein the means for generating the raster pattern is further for providing the reference laser beam spot at a higher intensity than that of the raster pattern of laser beam spots to use as a reference for the determination of the position of the reference laser beam spot relative to the alignment target.