Electromechanical device with optical function separated from mechanical and electrical function

• US 8,289,613 B2
• Filed: 04/13/2011
• Issued: 10/16/2012
• Est. Priority Date: 09/27/2004
• Status: Expired due to Fees

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Qualcomm MEMS Technologies Incorporated (Qualcomm, Inc.)
• Inventors: Chui, Clarence, Cummings, William, Gally, Brian, Kogut, Lior, Tung, Ming-Hau, Tung, Yeh-Jiun, Chiang, Chih-Wei, Endisch, Denis
• Primary Examiner(s): Lester, Evelyn A.
• Application Number:
  US13/086,113
• Publication Number:
  US 20110188109A1
• Time in Patent Office: 552 Days
• Field of Search: 359/223, 359/224, 359290-292, 359/295, 359/298, 359/318, 345/85, 345/108, 348/770, 348/771
• US Class Current: 359/290
• CPC Class Codes: B81B 2201/047 Optical MEMS not provided for in B81B2201/042 - B81B2201/045
• CPC Class Codes: B81B 3/0051 For defining the movement, i.e. structures that guide or limit the movement of an element mechanical arrangements for preventing or damping vibration or shock H01H3/60
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26
• CPC Class Codes: G02B 26/023 comprising movable attenuating elements, e.g. neutral density filters
• CPC Class Codes: G02B 26/08 for controlling the direction of light in light guides G02B6/35
• CPC Class Codes: G02F 1/0128 based on electro-mechanical, magneto-mechanical, elasto-optic effects
• CPC Class Codes: G02F 1/133621 providing coloured light G02F1/133617, G02F1/133533 take precedence
• CPC Class Codes: G02F 1/29 for the control of the position or the direction of light beams, i.e. deflection
• CPC Class Codes: G09G 3/3466 based on interferometric effect
• CPC Class Codes: G09G 3/3696 Generation of voltages supplied to electrode drivers
• CPC Class Codes: Y10T 29/42 Piezoelectric device making

Abstract

A microelectromechanical (MEMS) device includes a substrate, a movable element over the substrate, and an actuation electrode above the movable element. The movable element includes a deformable layer and a reflective element. The deformable layer is spaced from the reflective element.

Claims

1. An electromechanical device comprising:

a substrate;

an actuation electrode; and

a movable element between the substrate and the actuation electrode, the movable element including a deformable layer and a reflective element each being between the substrate and the actuation electrode, the deformable layer spaced from the reflective element along a direction generally perpendicular to the reflective element, wherein the substrate includes a second actuation electrode.

2. The device of claim 1, wherein a top surface of the substrate is spaced from the reflective element when no voltage is applied to the actuation electrode.

3. The device of claim 1, wherein the substrate includes an optical stack.

4. The device of claim 1, further comprising a support structure between the substrate and the deformable layer, the support structure configured to support the deformable layer.

5. The device of claim 1, wherein the movable element includes a connecting element mechanically coupling the deformable layer to the reflective element.

6. The device of claim 5, wherein the connecting element is electrically conductive.

7. The device of claim 5, wherein the connecting element is electrically insulating.

8. The device of claim 1, wherein the actuation electrode includes a non-transparent conductor.

9. The device of claim 8, wherein the non-transparent conductor includes at least one of aluminum, copper, silver, and gold.

10. The device of claim 1, further comprising a stationary element configured to be a stop for movement of the movable element, the stationary element including at least one of a roughened surface and an anti-stiction layer.

11. The device of claim 10, wherein the stationary element includes an insulating layer between the deforming layer and the actuation electrode

12. The device of claim 10, wherein the stationary element is between the deformable layer and the reflective layer.

13. The device of claim 1, further comprising:

a display;

a processor configured to communicate with the display, the processor configured to process image data; and

a memory device configured to communicate with the processor.

14. The device of claim 13, further comprising a driver circuit configured to send at least one signal to the display.

15. The device of claim 14, further comprising a controller configured to send at least a portion of the image data to the driver circuit.

16. The device of claim 13, further comprising an image source module configured to send the image data to the processor.

17. The device of claim 16, wherein the image source module includes at least one of a receiver, a transceiver, and a transmitter.

18. The device of claim 13, further comprising an input device configured to receive input data and to communicate the input data to the processor.

19. An electromechanical device comprising:

means for moving a portion of the device, the moving means including means for deforming and means for reflecting, the deforming means spaced from the reflecting means along a direction generally perpendicular to the reflecting means;

means for supporting the moving means; and

means for actuating the moving means, the moving means including both the deforming means and the reflecting means each being between the supporting means and the actuating means, wherein the supporting means includes second means for actuating the moving means.

20. The device of claim 19, wherein the supporting means includes a substrate, or wherein the moving means includes a movable element, or wherein the deforming means includes a deformable layer, or wherein the reflective means includes a reflective element, or wherein the actuating means includes an actuation electrode.

21. The device of claim 19, wherein the actuating means includes a non-transparent conductor.

22. The device of claim 19, wherein the second actuating means includes a second actuation electrode.

23. The device of claim 19, further comprising means for stopping movement of the moving means, the stopping means including at least one of a roughened surface and an anti-stiction layer.

24. The device of claim 23, wherein the stopping means includes an insulating layer between the deforming means and the actuating means.

25. The device of claim 23, wherein the stopping means includes a stationary element between the deforming means and the reflecting means.

26. A method for modulating light, comprising:

providing a display element including a substrate, a movable element, and an actuation electrode, the substrate including a second actuation electrode, the movable element including a deformable layer and a reflective element each being between the substrate and the actuation electrode, the deformable layer spaced from the reflective element along a direction generally perpendicular to the reflective element; and

applying a voltage to the actuation electrode, the voltage generating an attractive force on the movable element, thereby causing the movable element to move away from the substrate.

27. The method of claim 26, wherein the actuation electrode includes a non-transparent conductor.

28. The method of claim 26, wherein the method further comprises applying a second voltage to the second actuation electrode, the second voltage generating a second attractive force on the movable element, thereby causing the movable element to move towards the substrate.

29. The method of claim 28, wherein applying the second voltage is after applying the voltage.

30. The method of claim 26, wherein the display element includes a stationary element including at least one of a roughened surface and an anti-stiction layer, and wherein the method further comprises contacting the stationary element and stopping movement of the movable element.

31. The method of claim 30, wherein contacting the stationary element includes touching the deformable layer to the stationary element.

32. The method of claim 30, wherein contacting the stationary element includes touching the reflective element to the stationary element.