Double exposure patterning with carbonaceous hardmask

• US 8,293,460 B2
• Filed: 12/19/2008
• Issued: 10/23/2012
• Est. Priority Date: 06/16/2008
• Status: Expired due to Fees

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Chang, Chorng-Ping, Chen, Yongmei, Dai, Huixiong, Xu, Xumou, Bencher, Christopher D., Duane, Michael P., Ngai, Christopher Siu Wing, Shu, Jen, MacWilliams, Kenneth, Chen, Hui W., Yu, Jiahua, Yang, Susie X., Hung, Raymond Hoiman
• Primary Examiner(s): RAYMOND, BRITTANY L
• Application Number:
  US12/339,836
• Publication Number:
  US 20090311635A1
• Time in Patent Office: 1,404 Days
• Field of Search: 430/394, 430/323
• US Class Current: 430/323
• CPC Class Codes: G03F 7/091 characterised by antireflection means or light filtering or absorbing means, e.g. anti-halation, contrast enhancement
• CPC Class Codes: G03F 7/11 having cover layers or intermediate layers, e.g. subbing layers G03F7/091 - G03F7/093, B41N3/03 take precedence
• CPC Class Codes: G03F 7/2022 Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure

Abstract

Methods to pattern features in a substrate layer by exposing a photoresist layer more than once. In one embodiment, a single reticle may be exposed more than once with an overlay offset implemented between successive exposures to reduce the half pitch of the reticle. In particular embodiments, these methods may be employed to reduce the half pitch of the features printed with 65 nm generation lithography equipment to achieve 45 nm lithography generation CD and pitch performance.

Claims

1. A double exposure patterning method comprising:

providing a substrate comprising a substrate layer under a photoresist layer;

aligning, in a photolithography tool, a reticle to a feature in the substrate or substrate layer;

exposing the photoresist layer to form a first pair of photoresist lines with a first critical dimension (CD) in a first dimension and with a first space there between, the first pair of photoresist lines having a first alignment relative to the substrate layer, and wherein the exposing further prints a third photoresist line having a third CD in the first dimension;

offsetting the first alignment to have a second alignment by providing to the photolithography tool a predetermined positional offset relative to a position during the exposing, wherein the offsetting is in the first dimension, but not in a second dimension;

re-exposing the photoresist layer with the reticle to bifurcate at least one of the first pair of photoresist lines with a second space to form a pitch-reduced, critical dimension (CD) reduced double pattern comprising at least two photoresist lines and two spaces, and wherein the re-exposing trims the third photoresist line to reduce the third CD without bifurcating the third photoresist line; and

etching the substrate layer to have the pitch-reduced, CD reduced, double pattern.

2. The method of claim 1, wherein the first space has a CD of X, each of the first pair of photoresist lines has a CD of approximately 3×

, wherein the second alignment is offset from the first alignment by approximately 2× and

wherein re-exposing the photoresist forms a double pattern of photoresist lines with a CD of X and spaces with a CD of X, and the third CD is reduced by 2×

.

3. The method of claim 2, wherein X is approximately 32 nm and wherein the exposing and re-exposing of the photoresist layer is performed with a 65 nm lithographic scanner.

4. The method of claim 3, further comprising:

blading off a portion of a reticle after the exposure of the photo-resist layer and before the re-exposure of the photoresist layer.

5. The method of claim 3, further comprising:

scanning a first portion of the reticle to expose the photoresist layer; and

scanning a second portion, less than the first portion, to re-expose the photoresist layer and form a CD-reduced, pitch-reduce pattern corresponding to only a portion of the reticle.

6. The method of claim 1, wherein a CVD carbon layer is between the substrate layer and the photoresist layer and wherein the CVD carbon layer is etched to have the pitch-reduced, CD-reduced double pattern.

7. The method of claim 6, wherein the pitch-reduced, CD-reduced double pattern in the photoresist layer has a first line edge roughness (LER) and wherein the pitch-reduced, CD-reduced double pattern in the CVD carbon layer has a second LER, less than the first LER.

8. The method of claim 1, wherein the exposing prints a first portion of the third line with the third CD in the first dimension, and prints a second portion of the third line with a fourth CD in the second dimension, orthogonal to the first dimension, the third CD printed to be greater than the fourth CD and wherein the re-exposing reduces the third CD to be approximately equal to the fourth CD.