Self-aligned dual depth isolation and method of fabrication
First Claim
1. A method for fabricating a device, the method comprising the steps of:
- providing a wafer having a substrate, a buried oxide (BOX) over the substrate and a semiconductor-on-insulator (SOI) layer over the BOX;
depositing a hardmask layer over the SOI layer;
depositing a photoresist layer over the hardmask layer;
patterning the photoresist layer into groups of segments, wherein the segments in each of the groups are spaced apart from one another in a first direction and wherein the groups are spaced apart from one another in a second direction, and wherein the first direction and the second direction are perpendicular to one another;
performing a tilted implant along the first direction to damage all but those portions of the hardmask layer covered or shadowed by the photoresist layer segments;
patterning the hardmask layer along the first direction by removing portions of the hardmask layer damaged by the implant;
performing a first etch through the hardmask layer to form a deep trench in the SOI layer, the BOX and at least a portion of the substrate along the first direction, wherein the deep trench comprises a deep isolation region of the device;
patterning the hardmask layer along the second direction using the patterned photoresist layer; and
performing a second etch through the hardmask layer to form shallow trenches in the SOI layer along the second direction, wherein the shallow trenches comprise shallow isolation regions of the device, and wherein the deep isolation region and the shallow isolation regions formed in this manner are self-aligned to one another.
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Accused Products
Abstract
FDSOI devices and methods for the fabrication thereof are provided. In one aspect, a method for fabricating a device includes the following steps. A wafer is provided having a substrate, a BOX and a SOI layer. A hardmask layer is deposited over the SOI layer. A photoresist layer is deposited over the hardmask layer and patterned into groups of segments. A tilted implant is performed to damage all but those portions of the hardmask layer covered or shadowed by the segments. Portions of the hardmask layer damaged by the implant are removed. A first etch is performed through the hardmask layer to form a deep trench in the SOI layer, the BOX and at least a portion of the substrate. The hardmask layer is patterned using the patterned photoresist layer. A second etch is performed through the hardmask layer to form shallow trenches in the SOI layer.
15 Citations
15 Claims
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1. A method for fabricating a device, the method comprising the steps of:
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providing a wafer having a substrate, a buried oxide (BOX) over the substrate and a semiconductor-on-insulator (SOI) layer over the BOX; depositing a hardmask layer over the SOI layer; depositing a photoresist layer over the hardmask layer; patterning the photoresist layer into groups of segments, wherein the segments in each of the groups are spaced apart from one another in a first direction and wherein the groups are spaced apart from one another in a second direction, and wherein the first direction and the second direction are perpendicular to one another; performing a tilted implant along the first direction to damage all but those portions of the hardmask layer covered or shadowed by the photoresist layer segments; patterning the hardmask layer along the first direction by removing portions of the hardmask layer damaged by the implant; performing a first etch through the hardmask layer to form a deep trench in the SOI layer, the BOX and at least a portion of the substrate along the first direction, wherein the deep trench comprises a deep isolation region of the device; patterning the hardmask layer along the second direction using the patterned photoresist layer; and performing a second etch through the hardmask layer to form shallow trenches in the SOI layer along the second direction, wherein the shallow trenches comprise shallow isolation regions of the device, and wherein the deep isolation region and the shallow isolation regions formed in this manner are self-aligned to one another. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A method for fabricating a device, the method comprising the steps of:
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providing a wafer having a first semiconductor layer, a first BOX under the first semiconductor layer, a second semiconductor layer under the first BOX, a second BOX under the second semiconductor layer and a substrate under the second BOX; depositing a hardmask layer over the first semiconductor layer; depositing a photoresist layer over the hardmask layer; patterning the photoresist layer into groups of segments, wherein the segments in each of the groups are spaced apart from one another in a first direction and wherein the groups are spaced apart from one another in a second direction, and wherein the first direction and the second direction are perpendicular to one another; performing a tilted implant along the first direction to damage all but those portions of the hardmask layer covered or shadowed by the photoresist layer segments; patterning the hardmask layer along the first direction by removing portions of the hardmask layer damaged by the implant; performing a first etch through the hardmask layer to form a deep trench in the first semiconductor layer, the first BOX and the second semiconductor layer along the first direction, wherein the deep trench comprises a deep isolation region of the device; patterning the hardmask layer along the second direction using the patterned photoresist layer; and performing a second etch through the hardmask layer to form shallow trenches in the first semiconductor layer along the second direction, wherein the shallow trenches comprise shallow isolation regions of the device, and wherein the deep isolation region and the shallow isolation regions formed in this manner are self-aligned to one another. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15)
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Specification