Methods for performing data management for a recipe-and-component control module

• US 8,295,963 B2
• Filed: 01/25/2010
• Issued: 10/23/2012
• Est. Priority Date: 03/29/2007
• Status: Active Grant

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Huang, Chung-Ho, Lui, Andrew
• Primary Examiner(s): KASENGE, CHARLES R
• Application Number:
  US12/693,267
• Publication Number:
  US 20100125360A1
• Time in Patent Office: 1,002 Days
• Field of Search: 700/97, 700/99, 700/100, 700/104, 700/108, 700/109, 700/110, 700/121, 700/175, 700/176, 702/35, 702/81, 702/82, 702/83, 702/84, 702/182, 702/183, 702/184, 702/185, 709/201, 709/202, 709/203, 705/8
• US Class Current: 700/100
• CPC Class Codes: G05B 19/4183 characterised by data acquisition, e.g. workpiece identification
• CPC Class Codes: G05B 2219/32097 Recipe programming for flexible batch
• CPC Class Codes: G05B 2219/33063 Generic coordination, master agent to data manager agent to tasks to active agent
• CPC Class Codes: G05B 2219/33068 CCP coordination cooperation protocol, make optimal decisions with other agents
• CPC Class Codes: G05B 2219/45031 Manufacturing semiconductor wafers
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

A computer-implemented method for performing data management in a plasma processing system is provided. The method includes providing a recipe-and component control module (RACCM). The RACCM is a server that includes a plurality of intelligent agents, which are configured to interact with the plurality of components. The RACCM also includes a coordinating agent, which is configured to receive processed data from the plurality of intelligent agents. The RACCM further includes a set of provisional agents, which is configured to perform recipe management by distributing at least part of a recipe to at least one of the plurality of intelligent agents and the coordinating agent.

Claims

1. A computer-implemented method for performing data management in a plasma processing system, said method comprising:

communicably coupling a computing device with said plasma processing system, said plasma processing system having or being coupled with a plurality of components;

providing said computing device with a recipe-and-component control module (RACCM), said RACCM including

a plurality of intelligent agents, each of said intelligent agents configured to interact with at least one component of said plurality of components,

a coordinating agent, said coordinating agent configured to receive processed data from said plurality of intelligent agents, and

a set of provisional agents, said set of provisional agents configured to perform recipe management, said recipe management including distributing at least part of a recipe to at least one of said plurality of intelligent agents and said coordinating agent,

said each of said intelligent agents of said plurality of intelligent agents further includes intelligence for defining configuration requirements for said at least one component of said plurality of components, said configuration requirements including criteria for sending a data file to at least one associated intelligent agent of said plurality of intelligent agents, said criteria being based on said part of said recipe being stored locally at said each intelligent agent of said plurality of agents,

said each of said intelligent agents of said plurality of intelligent agents include a cache, said cache being configured to include code for saving at least most recent data in order to enable latching,

said each intelligent agent of said plurality of intelligent agents includes code for performing data analysis of said data file to generate a signature data, said signature data being summarized data for said data file;

sending said data file to said at least one of said intelligent agents of said plurality of intelligent agents by said at least one component of said plurality of components;

analyzing said data file of processed data for a predefined interval by said at least one of said intelligent agent of said plurality of intelligent agents to define a signature data;

generating a composite signature from said signature data, wherein said composite signature is created by said coordinating agent; and

,

if said composite signature indicates an action is required, sending a message to said at least one component of said plurality of components to perform said action.

2. The computer-implemented method of claim 1 wherein said coordinating agent is configured to include code for receiving a signature data from said each intelligent agent of said plurality of intelligent agents, said signature data being summarized data for said data file.

3. The computer-implemented method of claim 2 wherein said coordinating agent includes intelligence for performing data analysis to generate said composite signature, said coordinating agent including code for employing said signature data to provide instruction to said plurality of components.

4. The computer-implemented method of claim 3 wherein said RACCM includes intelligence for performing self-discovery to identify changes to said plasma processing system, said self-discovery including code for identifying when said component of said plurality of components is being connected to said plasma processing system.

5. The computer-implemented method of claim 1 wherein said RACCM includes intelligence for performing self-discovery to identify changes to said plasma processing system, said self-discovery including identifying when said component of said plurality of components is being connected to said plasma processing system.

6. A method for performing data management in a plasma processing system, wherein said plasma processing system including a plurality of components, wherein said plurality of components including at least one of a sensor and a processing module, said method comprising:

communicably coupling a computing device with said plasma processing system, said plasma processing system having or being coupled with a plurality of components;

providing said computing device with a plurality of intelligent agents;

receiving processed data by said plurality of intelligent agents, said processed data being sent by said plurality of components, wherein each intelligent agent of said plurality of intelligent agents is associated with a component of said plurality of components, said each intelligent agent being configured to receive a set of data files of said processed data from said component of said plurality of components according to a set of criteria, wherein said each intelligent agent includes intelligence for defining a set of configuration requirements, said set of configuration requirements including at least a set of criteria for sending said set of data files to an associated intelligent agent, wherein said set of criteria of said set of configuration requirements being based on a portion of a recipe being stored locally at said each intelligent agent;

analyzing said processed data to create a set of signature data, wherein each signature data of said set of signature data being a summary of processed data for a predefined interval being by said each intelligent agent;

generating a composite signature from said set of signature data, wherein said composite signature is created by a coordinating agent; and

,

if said composite signature indicating an action is required, sending a message to at least a component of said plurality of components to perform said action.

7. The method of claim 6 further including performing recipe management, wherein said recipe management is performed by a provisional agent, said performing recipe management including at least distributing at least a portion of said recipe to at least one of said coordinating agent and an intelligent agent of said plurality of intelligent agents.

8. The method of claim 6 wherein said set of criteria for sending including at least one of a time domain for sending a data file of said set of data files, a number of said set of data files to be sent for a predefined period of time, and a conditional range for sending said data file of said set of data files.

9. The method of claim 8 further including performing pre-processing on said set of data files by said component of said plurality of components, said performing pre-processing is based on said set of criteria.

10. The method of claim 6 further including saving said set of data files on a cache, said cache configured to save at least one of said data files of said set of data files in order to enable data latching.

11. The method of claim 6 wherein said analyzing said processed data includes at least one of performing data summary, performing endpoint detection, and performing fault detection.

12. The method of claim 6 wherein said sending of said message includes sending a warning message to said processing module.

13. The method of claim 6 further including sharing of data between a first intelligent agent of said plurality of intelligent agents and a second intelligent agent of said plurality of intelligent agents, wherein said sharing of data being coordinated by said coordinating agent.

14. The method of claim 6 further including sharing of data between a first intelligent agent and said computing device, wherein said data being coordinated by said coordinating agent.

15. The method of claim 6 further including performing self-discovery including identifying when said component of said plurality of components is being connected to said plasma processing system.

16. The method of claim 15 wherein said performing self-discovery further including

profiling said component of said plurality of said components,

associating an intelligent agent with said component of said plurality of said components,

distributing said portion of said recipe to said intelligent agent, wherein said portion of said recipe includes a set of parameters that said component of said plurality of said components is monitoring, and

sending configuration requirements to said component of said plurality of said components.

17. A method for managing data in operating a plasma processing system, said plasma processing system coupled with a plurality of components, said plurality of components including at least a first component and a second component, said method comprising:

communicably coupling a server with said plasma processing system, said server including at least a plurality of intelligent agents, said plurality of intelligent agents including a first intelligent agent and a second intelligent agent;

associating said first intelligent agent with said first component and provisioning said first intelligent agent with a first portion of a recipe, wherein said first portion is related to parameters being handled by said first component;

associating said second intelligent agent with said second component and provisioning said second intelligent agent with a second portion of said recipe, wherein said second portion is related to parameters being handled by said second component;

using said first intelligent agent to receive first data from said first component according to a first set of criteria;

using said second intelligent agent to receive second data from said second component according to a second set of criteria, said first set of criteria being different from said second set of criteria;

analyzing said first data to create a first signature data, said first signature data including summarized data;

analyzing said second data to create a second signature data, said second signature data to create a composite signature;

combining at least said first signature data and said second signature data including summarized data; and

sending a set of instructions to at least one of said plurality of components if said composite signature indicates an action is required by said at least one of said plurality of components.