Slit valve control

• US 8,297,591 B2
• Filed: 08/10/2009
• Issued: 10/30/2012
• Est. Priority Date: 08/29/2008
• Status: Expired due to Fees

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Matsumoto, Takayuki, Kurita, Shinichi
• Primary Examiner(s): Keasel, Eric
• Assistant Examiner(s): Do, Hailey K
• Application Number:
  US12/538,237
• Publication Number:
  US 20100051111A1
• Time in Patent Office: 1,177 Days
• Field of Search: 251/172, 251/175, 251/195, 251/197, 251/198, 251/199, 414/217
• US Class Current: 251/175
• CPC Class Codes: F16K 3/188 by means of hydraulic forces
• CPC Class Codes: F16K 51/02 specially adapted for high-vacuum installations
• CPC Class Codes: H01L 21/67772 involving removal of lid, door, cover
• CPC Class Codes: Y10T 137/0391 Affecting flow by the addition of material or energy

Abstract

Embodiments disclosed herein generally relate to methods for sealing a processing chamber with a slit valve door. The door initially raises from a position below the opening for the processing chamber to a raised position. The door then expands until an O-ring that is on the door just touches the sealing surface. Then, the door expands again to compress the O-ring against the sealing surface. The door expands by flowing a gas into the interior volume of the door. By controlling the pressure buildup within the door, the speed with which the door expands is controlled to ensure that the door gently contacts the sealing surface and then compresses against the sealing surface. Thus, the door may be prevented from contacting the sealing surface with too great a force that may jolt or shake the processing chamber and produce undesired particles that may contaminate the process.

Claims

1. A method of sealing a chamber coupled to a slit valve assembly, the chamber having an opening sized to permit a substrate to pass therethrough, the method comprising:

actuating a slit valve door within a slit valve assembly body in a first direction from a first position to a second position, the slit valve door having one or more o-rings coupled thereto, the slit valve assembly body having an interior volume defined by walls, the slit valve assembly body having an opening extending through the slit valve assembly body that is aligned with the opening of the chamber;

actuating at least a first portion of the slit valve door in a second direction substantially perpendicular to the first direction for a first period of time, a first distance, and a first speed of between about 12 mm/sec to about 18 mm/sec;

detecting when the one or more o-rings contact an inside surface of the walls; and

actuating the first portion of the slit valve door in the second direction in response to the detecting for a second period of time, a second distance, and a second speed such that the second distance is less than the first distance, the second speed is between about 0.5 mm/sec and about 0.7 mm/sec, and the second period of time is less than the first period of time.

2. The method of claim 1, further comprising increasing the interior volume of the slit valve door during the actuating in the second direction.

3. The method of claim 1, wherein the one or more O-rings compress against an interior surface of the wall during the second period of time.

4. The method of claim 1, further comprising detecting when the one or more o-rings initially contacts an interior surface of the wall.

5. The method of claim 1, wherein the actuating in the second direction further comprises flowing a gas into an interior of the slit valve door and expanding the slit valve door.

6. The method of claim 1, the actuating in the second direction further comprising extending the first portion of the slit valve door in the second direction and simultaneously moving a second portion of the slit valve door in a third direction opposite to the second direction for a distance substantially equal to the first distance.

7. The method of claim 6, wherein the slit valve door is coupled to a support shaft and a control panel, wherein the support shaft and the control panel move in the third direction as the second portion moves in the third direction.

8. The method of claim 6, further comprising contacting an interior surface of the wall with the second portion.

9. The method of claim 8, wherein the second portion is coupled to one or more second O-rings, and further comprising detecting when the one or more second O-rings contact the interior surface.

10. The method of claim 9, further comprising compressing the one or more second O-rings against the interior surface during the actuating in the second direction.

11. The method of claim 1, further comprising compressing one or more springs within the slit valve door simultaneously with the actuating in the second direction.

12. The method of claim 1, further comprising flowing a gas into the interior volume of the slit valve door.

13. A method of sealing a chamber having an opening sized to permit a substrate to pass therethrough, comprising:

flowing a gas into an interior of a slit valve door to pressurize the interior of the slit valve door to a first pressure, the slit valve door disposed in a slit valve assembly body that is coupled with the chamber, the slit valve assembly body having an opening therethrough that is aligned with the opening of the chamber, the slit valve door having walls that enclose an interior volume;

expanding the slit valve door until one or more O-rings coupled to the slit valve door contacts an interior surface of the walls and the slit valve door is spaced a first distance from the interior surface of the walls, the expanding occurring at a first speed of between about 12 mm/sec to about 18 mm/sec;

flowing the gas into the interior of the slit valve door to pressurize the interior of the slit valve door to a second pressure; and

compressing the one or more O-rings between the slit valve door and the interior surface of the walls such that the slit valve door is spaced a second distance from the interior surface of the walls that is less than the first distance, the compressing occurring at a second speed of between about 0.5 mm/sec and about 0.7 mm/sec.

14. The method of claim 13, further comprising detecting when the one or more O-rings contact the interior surface of the wall.

15. The method of claim 14, further comprising controlling the flow of gas into the interior of the slit valve door in response to the detecting.

16. The method of claim 13, further comprising raising the slit valve door from a position below the opening.

17. The method of claim 13, further comprising compressing one or more springs within the slit valve door while flowing the gas into the interior of the slit valve door.

18. The method of claim 13, further comprising compressing one or more springs while flowing the gas into the interior of the slit valve door, the one or more springs disposed within the slit valve door.