Method of forming organic thin film pattern and method of manufacturing organic light-emitting display device by using the method of forming organic thin film pattern

• US 8,298,844 B2
• Filed: 12/09/2010
• Issued: 10/30/2012
• Est. Priority Date: 01/13/2010
• Status: Active Grant

• Current Assignee: Samsung Display Company Limited (Samsung Electronics Co. Ltd.)
• Original Assignee: Samsung Display Company Limited (Samsung Electronics Co. Ltd.)
• Inventors: Choi, Yong-Sup, Lee, Kang-Il, Roh, Chool-Lae
• Primary Examiner(s): Richards, N Drew
• Assistant Examiner(s): Withers, Grant
• Application Number:
  US12/963,928
• Publication Number:
  US 20110171763A1
• Time in Patent Office: 691 Days
• Field of Search: 438/39
• US Class Current: 438/39
• CPC Class Codes: H10K 50/00 Organic light-emitting devices integrated devices or assemblies of multiple devices H10K59/00, H10K65/00; organic semiconductor lasers H01S5/36
• CPC Class Codes: H10K 71/221 by lift-off techniques

Abstract

A method of manufacturing an organic thin film pattern, the method including: forming a dummy organic thin film on a substrate; radiating light on the dummy organic thin film pattern the dummy organic thin film; forming a main organic thin film, having a sublimation temperature is higher than that of the dummy organic thin film, on the substrate and the patterned dummy organic thin film; and heating patterned the dummy organic thin film and the main organic thin film, to sublimate the dummy organic thin film and thereby pattern the main organic thin film.

Claims

1. A method of manufacturing an organic thin film pattern, comprising:

forming a dummy organic thin film on a substrate;

radiating light on the dummy organic thin film, to pattern the dummy organic thin film;

forming a main organic thin film on the patterned dummy organic thin film and exposed portions of the substrate; and

heating the patterned dummy organic thin film and the main organic thin film, to sublimate the dummy organic thin film and pattern the main organic thin film,

wherein the sublimation temperature of the main organic thin film is higher than the sublimation temperature of the dummy organic thin film.

2. The method of claim 1, wherein the dummy organic thin film is formed via a vacuum deposition method.

3. The method of claim 1, wherein the dummy organic thin film is formed via a coating method.

4. The method of claim 1, wherein the dummy organic thin film comprises at least one material selected from the group consisting of naphthalene, acenaphthalene, pyrene, and fluorene.

5. The method of claim 1, wherein, during the forming of the dummy organic thin film, the substrate is maintained at a temperature that is lower than the sublimation temperature of the dummy organic thin film.

6. The method of claim 1, wherein the radiating of the light on the dummy organic thin film comprises using laser light to sublimate portions of the dummy organic thin film.

7. The method of claim 1, wherein the radiating of the light on the dummy organic thin film comprises using ultraviolet (UV) light to sublimate portions of the dummy organic thin film.

8. The method of claim 1, wherein the main organic thin film is formed via a vacuum deposition method.

9. The method of claim 1, wherein the main organic thin film is formed via a coating method.

10. The method of claim 1, wherein the forming of the main organic thin film comprises forming a plurality of stacked light-emitting layers, each having a different color, such that the main organic thin film emits white light.

11. The method of claim 1, wherein the heating of the dummy organic thin film and the main organic thin film comprises heating the dummy and main organic thin films at a temperature that is higher than the sublimation temperature of the dummy organic thin film and lower than the sublimation temperature of the main organic thin film.

12. The method of claim 1, wherein the substrate is maintained at a temperature that is higher than the sublimation temperature of the dummy organic thin film and lower than the sublimation temperature of the main organic thin film, during the heating of the patterned dummy organic thin film and the main organic thin film.

13. The method of claim 1, wherein the heating of the patterned dummy organic thin film and the main organic thin film comprises sublimating the dummy organic thin film, to peel off portions of the main organic thin film disposed thereon.

14. The method of claim 1, further comprising repeating the forming of the dummy organic thin film, the forming of the main organic thin film, and the heating, so as to form a plurality of the main organic thin films on the substrate.

15. The method of claim 14, wherein the main organic thin films comprise light-emitting layers having different colors.

16. A method of manufacturing an organic light-emitting display device comprising a substrate, a first electrode disposed on the substrate, and an opposing second electrode, the method comprising:

forming a dummy layer on the substrate on which the first electrode is formed;

radiating light on the dummy layer to pattern the dummy layer;

forming an organic layer on the first electrode and on the patterned dummy layer;

heating the patterned dummy layer and the organic layer at a temperature that is higher than the sublimation temperature of the dummy layer and lower than the sublimation temperature of the organic layer, to sublimate the dummy layer and pattern the organic layer; and

forming the second electrode on the patterned organic layer.

17. The method of claim 16, wherein the dummy layer is formed via a vacuum deposition or coating method.

18. The method of claim 16, wherein the dummy layer comprises at least one material selected from the group consisting of naphthalene, acenaphthalene, pyrene, and fluorene.

19. The method of claim 16, wherein the radiating of the light on the dummy layer comprises radiating laser light on the dummy layer.

20. The method of claim 16, wherein the organic layer comprises stacked light-emitting layers having different colors, so as to emit white light.

21. The method of claim 16, further comprising, repeating the forming of a dummy layer, the forming of the organic layer, and the heating, so as to form a plurality of the organic layers on the substrate, in various patterns.

22. The method of claim 21, wherein the organic layers comprise light-emitting layers having different colors.

23. The method of claim 22, wherein the light-emitting layers comprise red R, green G, and blue B light-emitting layers.

24. The method of claim 16, wherein heating of the patterned dummy layer and the organic layer comprises sublimating the dummy layer, to peel off portions of the organic layer disposed thereon.