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MEMS devices with multi-component sacrificial layers

  • US 8,300,299 B2
  • Filed: 04/29/2011
  • Issued: 10/30/2012
  • Est. Priority Date: 03/02/2006
  • Status: Expired due to Fees
First Claim
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1. A method of manufacturing an electromechanical device, the method comprising:

  • forming a composite layer on a surface of an electromechanical device, the composite layer comprising a mixture of a sacrificial material and a second material; and

    selectively removing the sacrificial material, relative to the second material, from the composite layer, thereby forming a coating on one or more surfaces of the electromechanical device, the coating comprising the second material.

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