Method of making a sensing unit
First Claim
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1. A method of making a sensing unit having:
- a substrate formed with a recessed portion;
a spring portion having a support portion provided on said substrate and a flat coil-shaped movable portion supported by said support portion so as to be capable of floating relative to said substrate; and
a sensor portion provided on said movable portion of said spring portion, for detecting displacement in said movable portion and transmitting a signal relating to said displacement via said spring portion,said method comprising the steps of;
preparing the substrate on which a first region for forming said movable portion of said spring portion is lower than a second region for forming said support portion;
burying said first region in a resist layer such that said substrate is made flat;
forming a plating layer that is to become said spring portion such that a part that is to become said movable portion has a flat coil-shape and is positioned on said resist layer in said first region and a part that is to become said support portion is positioned in said second region;
forming said sensor portion in said part of said plating layer that is to become said movable portion; and
removing said resist layer.
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Abstract
In a sensing unit according to the present invention, a spring portion having a support portion and a movable portion is conductive. A signal of a sensor portion provided on the movable portion of the spring portion is transmitted via the spring portion. Hence, the sensing unit according to the present invention has a simple constitution with a small number of components, and a wire does not necessarily have to be provided for each sensor portion. As a result, a reduction in manufacturing cost, simplification of the manufacturing process, and so on are achieved.
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Citations
5 Claims
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1. A method of making a sensing unit having:
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a substrate formed with a recessed portion; a spring portion having a support portion provided on said substrate and a flat coil-shaped movable portion supported by said support portion so as to be capable of floating relative to said substrate; and a sensor portion provided on said movable portion of said spring portion, for detecting displacement in said movable portion and transmitting a signal relating to said displacement via said spring portion, said method comprising the steps of; preparing the substrate on which a first region for forming said movable portion of said spring portion is lower than a second region for forming said support portion; burying said first region in a resist layer such that said substrate is made flat; forming a plating layer that is to become said spring portion such that a part that is to become said movable portion has a flat coil-shape and is positioned on said resist layer in said first region and a part that is to become said support portion is positioned in said second region; forming said sensor portion in said part of said plating layer that is to become said movable portion; and removing said resist layer. - View Dependent Claims (2, 3, 4, 5)
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Specification