Angular velocity measuring device
First Claim
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1. An angular velocity measuring device comprising:
- first and second oscillators elastically supported on a substrate;
an elastic connecting beam elastically connecting the first and the second oscillators;
an oscillating means for oscillating the first and second oscillators for differential oscillation by pulling the first and second oscillators in opposite driving directions;
wherein a viscous force generating means for producing viscous force against motions in said opposite driving directions to suppress in-phase oscillation of the first and second oscillators in said driving directions is incorporated into the elastic connecting beam.
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Abstract
Disclosed herein is an angular velocity measuring device including: first and second oscillators elastically supported on a substrate; an elastic connecting beam elastically connecting the first and the second oscillator; and an oscillating means for oscillating the first and the second oscillator for differential oscillation, wherein a viscous force generating means for suppressing in-phase oscillation of the first and the second oscillator is incorporated into the elastic connecting beam.
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Citations
11 Claims
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1. An angular velocity measuring device comprising:
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first and second oscillators elastically supported on a substrate; an elastic connecting beam elastically connecting the first and the second oscillators; an oscillating means for oscillating the first and second oscillators for differential oscillation by pulling the first and second oscillators in opposite driving directions; wherein a viscous force generating means for producing viscous force against motions in said opposite driving directions to suppress in-phase oscillation of the first and second oscillators in said driving directions is incorporated into the elastic connecting beam. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. An angular velocity measuring device comprising:
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first and second oscillators elastically supported on a substrate; an elastic connecting beam elastically connecting the first and the second oscillator; and an oscillating means for oscillating the first and the second oscillator for differential oscillation; and a cover disposed opposite to the substrate so as to cover the first and the second oscillators; wherein a viscous force generating means for suppressing in-phase oscillation of the first and the second oscillator is incorporated into the elastic connecting beam; and wherein a gap between the cover and the viscous force generating means is narrower than a gap between the cover, and the first and the second oscillator. - View Dependent Claims (11)
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Specification