Stripping device and stripping method

• US 8,302,651 B2
• Filed: 04/25/2011
• Issued: 11/06/2012
• Est. Priority Date: 04/27/2010
• Status: Active Grant

• Current Assignee: AIMECHATEC Ltd. (Hitachi, Ltd.)
• Original Assignee: Tokyo OHKA Kogyo Company Limited
• Inventors: Iwata, Yasumasa, Nakamura, Akihiko, Inao, Yoshihiro, Kobari, Satoshi, Nakada, Kimihiro
• Primary Examiner(s): Osele, Mark A
• Assistant Examiner(s): HARM, NICKOLAS R
• Application Number:
  US13/093,412
• Publication Number:
  US 20110259527A1
• Time in Patent Office: 561 Days
• Field of Search: 156/703, 156/705, 156/754
• US Class Current: 156/754
• CPC Class Codes: B32B 2457/14 Semiconductor wafers
• CPC Class Codes: B32B 43/006 Delaminating
• CPC Class Codes: H01L 21/67132 Apparatus for placing on an insulating substrate, e.g. tape
• CPC Class Codes: H01L 21/6715 Apparatus for applying a liquid, a resin, an ink or the like H01L21/67126 takes precedence
• CPC Class Codes: Y10T 156/1111 Using solvent during delaminating [e.g., water dissolving adhesive at bonding face during delamination, etc.]
• CPC Class Codes: Y10T 156/1121 Using vibration during delaminating
• CPC Class Codes: Y10T 156/19 Delaminating means
• CPC Class Codes: Y10T 156/1922 Vibrating delaminating means

Abstract

A stripping method for stripping a support plate from a laminate including a substrate and the support plate adhered to the wafer via an adhesive layer, in which the adhesive layer is formed from an adhesive compound soluble in a non-polar solvent or a highly polar solvent; and the stripping method includes the step of supplying the non-polar solvent or the highly polar solvent, so that the non-polar solvent or the highly polar solvent is retained at least on an edge portion of that surface of the laminate which faces the support plate, and on a lateral surface of the laminate.

Claims

1. A stripping device for stripping a support plate from a laminate including a substrate and the support plate adhered to the substrate via an adhesive layer, the stripping device comprising:

retaining means for retaining on the laminate a solvent for dissolving the adhesive layer;

at least one vibrating section for generating vibration to vibrate at least the solvent; and

a vibration transmitting section provided between the retaining means and the at least one vibrating section, for transmitting the vibration from the at least one vibrating section to the solvent retained on the laminate,

wherein the vibration transmitting section has a supplying opening for supplying the solvent to the retaining means, and a collecting opening for collecting the solvent from the retaining means.

2. The stripping device as set forth in claim 1, further comprising:

moving means for moving the at least one vibrating section relative to the laminate,

the moving means also moving the vibration transmitting section relative to the laminate,

wherein the at least one vibrating section is moved in association with the movement of the vibration transmitting section, and wherein

the supplying opening and the collecting opening are opened on a lateral side surface of the vibration transmitting section.

3. The stripping device as set forth in claim 2, wherein:

the adhesive layer is formed from an adhesive compound soluble in a non-polar solvent or a highly polar solvent;

the retaining means is configured to contain the laminate therein in which the non-polar solvent or the highly polar solvent is retained in the retaining means;

the moving means rotates the at least one vibrating section relative to the laminate; and

the highly polar solvent has a solubility parameter of 10 or more.

4. The stripping device as set forth in claim 3, wherein:

a dicing tape is adhered on a substrate-side surface of the laminate, the dicing tape having a diameter greater than a largest outer diameter of the laminate;

the retaining means contains the laminate in a space surrounded by the retaining means and the dicing tape, the space being formed when the retaining means touches the dicing tape; and

the retaining means has a first surface facing a support-plate side surface of the laminate when the retaining means contains the laminate, the first surface having a shape different from that of the support-plate side surface of the laminate.

5. The stripping device as set forth in claim 4, wherein the moving means rotates the dicing tape.

6. The stripping device as set forth in claim 1, further comprising:

moving means for moving the at least one vibrating section relative to the laminate;

the moving means also rotating the vibration transmitting section along a periphery of the laminate; and

wherein the at least one vibrating section is rotated in association with the rotation of the vibration transmitting section.

7. The stripping device as set forth in claim 1, wherein the supplying opening and the collecting opening are opened on a lateral side surface of the vibration transmitting section.