Insulated nanogap devices and methods of use thereof

• US 8,304,273 B2
• Filed: 01/23/2009
• Issued: 11/06/2012
• Est. Priority Date: 01/24/2008
• Status: Expired due to Fees

• Current Assignee: Massachusetts Institute of Technology
• Original Assignee: Massachusetts Institute of Technology
• Inventors: Stellacci, Francesco, Thong, John, Barsotti, J Robert Jr., Huijuan, Zhang
• Primary Examiner(s): Sines, Brian J
• Application Number:
  US12/864,172
• Publication Number:
  US 20110056845A1
• Time in Patent Office: 1,383 Days
• Field of Search: 422/50, 422/83, 422/68.1, 438/22, 438/23, 438/24, 438/42, 438/48, 438/49, 438/142
• US Class Current: 438/49
• CPC Class Codes: B82Y 15/00 Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
• CPC Class Codes: G01N 27/3278 involving nanosized elements, e.g. nanogaps or nanoparticles nanopores G01N33/48721; magnetic beads G01N27/745

Abstract

The present invention provides a method to eliminate undesired parallel conductive paths of nanogap devices for aqueous sensing. The method involves the electrical insulation of an electrode pair, except for the nanogap region wherein electrical response is measured. The magnitude of undesired ionic current in a measurement is reduced by two orders of magnitude. The process to accomplish the present invention is self-aligned and avoids fabrication complexity. The invention has a great potential in nanogap device applications.

Claims

1. A process for preparing a nanogap device for measuring changes in electrical properties or electrical responses of a sub-micron sized material, said device comprising:

(a) a substrate; and

(b) at least one conducting electrode pair separated by a nanogap positioned on or within said substrate, wherein

i. a first portion of said conducting electrode pair comprises an insulator coating; and

ii. a second portion of said conducting electrode pair proximal to said nanogap does not comprise an insulator coating,

said process comprising;

a. positioning a conducting material on a substrate wherein said material has a longitudinal axis which exceeds that of its horizontal axis, wherein said conducting material comprises a second portion of said material along its longitudinal axis, which is thinner than a first portion of said material along its longitudinal axis;

b. applying an insulator coating to said conducting material; and

c. applying a voltage to said conducting material;

wherein application of said voltage results in forming a gap in said second portion and at least partial removal of said insulator coating of said second portion.

2. The process of claim 1, wherein application of voltage results in electromigration of atoms occurring after at least partial removal of said insulator coating.

3. The process of claim 1, wherein upon application of voltage the electromigration of atoms and the at least partial removal of said insulator coating are parallel processes.

4. The process of claim 1, wherein said gap formed has a width ranging from 0.5-100 nm.

5. The process of claim 4, wherein said removal of insulator coating results in an uncoated area ranging from 0.01% to 1% of the total area of the conducting material.

6. The process of claim 1, wherein said conducting material is made of gold.

7. The process of claim 1, wherein said conducting material is a conducting wire.

8. The process of claim 1, wherein said insulating coating is PolyMethylMethacrylate (PMMA).

9. The process of claim 1, wherein said substrate is silicon, silicon dioxide or a combination thereof.

10. The process of claim 1, wherein said positioning is of a series of conducting materials on said substrate.

11. The process of claim 1, wherein said device is compatible for use with a liquid or a gas.

12. The process of claim 1, wherein the size of said device, ranges from between 100 nm to 10 cm.

13. The process of claim 1, wherein at least said thin second portion of said conducting material is suspended over the substrate.

14. The process of claim 1, wherein said device is comprised of a biocompatible material.