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Method of making a semiconductor chip assembly with a ceramic/metal substrate

  • US 8,304,292 B1
  • Filed: 08/03/2010
  • Issued: 11/06/2012
  • Est. Priority Date: 08/06/2009
  • Status: Expired due to Fees
First Claim
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1. A method of making a semiconductor chip assembly, comprising:

  • providing a metal plate, wherein the metal plate includes a top surface that faces in an upward direction and a bottom surface that faces in a downward direction opposite the upward direction;

    forming a cavity in the metal plate, wherein the cavity extends to the top surface of the metal plate, is spaced from the bottom surface of the metal plate and faces in the upward direction;

    providing a ceramic block in the cavity;

    forming a slot in the metal plate, wherein the slot extends to the bottom surface of the metal plate;

    providing an insulative material in the slot;

    wherein the metal plate includes a base and a terminal, the slot provides edges of the base and the terminal that face towards one another, the cavity extends into the base, the ceramic block contacts and is embedded in the base in the cavity and the insulative material contacts and is sandwiched between the base and the terminal in the slot;

    thendepositing a conductive layer on the base, the terminal and the ceramic block;

    thenproviding a conductive trace that includes a pad and the terminal, wherein the conductive trace includes a selected portion of the conductive layer;

    removing selected portions of the metal plate, thereby providing additional edges of the base and the terminal;

    thenmounting a semiconductor device on the ceramic block, wherein a heat spreader includes the base and the ceramic block and the semiconductor device overlaps the ceramic block;

    electrically connecting the semiconductor device to the pad, thereby electrically connecting the semiconductor device to the terminal; and

    thermally connecting the semiconductor device to the ceramic block, thereby thermally connecting the semiconductor device to the base.

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