Exposure apparatus and device manufacturing method

• US 8,305,553 B2
• Filed: 08/17/2005
• Issued: 11/06/2012
• Est. Priority Date: 08/18/2004
• Status: Expired due to Fees

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Nakano, Katsushi, Hagiwara, Tsuneyuki
• Primary Examiner(s): Kim, Peter B
• Application Number:
  US11/660,209
• Publication Number:
  US 20070263182A1
• Time in Patent Office: 2,638 Days
• Field of Search: 355/53, 355/72, 355/68
• US Class Current: 355/53
• CPC Class Codes: G03F 7/70341 Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply chemical composition of immersion liquids G03F7/2041
• CPC Class Codes: G03F 7/7085 Detection arrangement, e.g. detectors of apparatus alignment possibly mounted on wafers, exposure dose, photo-cleaning flux, stray light, thermal load

Abstract

Provided is an exposure apparatus that is able to prevent liquid from remaining on a measuring part. An exposure apparatus comprises a measuring system (60), which has a first pattern (61) formed on the upper surface of a substrate stage, and a second area (S2) specified on the upper surface in the vicinity of a first area (S1), which includes the first pattern (61), and a second pattern (80) is formed in the second area (S2) so that the liquid (LQ) that has remained so as to span the first area (S1) and the second area (S2) retreats from the first area (S1) and collects in the second area (S2).

Claims

1. An exposure apparatus that exposes a substrate via a liquid, comprising:

a measuring system, which has a first pattern formed on a prescribed surface; and

second area defined in a vicinity of a first area on the prescribed surface, the first area including the first pattern, and

wherein a second pattern is formed in the second area so that the liquid that has remained and extended over the first area and the second area retreats from the first area and collects in the second area.

2. An exposure apparatus according to claim 1, wherein a position of the center of the drawing formed by the first pattern and the second pattern on the prescribed surface is outside the first pattern.

3. An exposure apparatus according to claim 1, wherein the first pattern and the second pattern are connected.

4. An exposure apparatus according to claim 1, wherein

the first pattern includes a first line pattern that extends in a first direction, and

the second pattern includes a plurality of second line patterns that extend in a second direction that intersects the first direction and are arrayed in the first direction.

5. An exposure apparatus according to claim 4, wherein the second line pattern is longer than the first line pattern.

6. An exposure apparatus according to claim 4, wherein a distance between an end part of the second line pattern and a connection position, at which the end part of the first line pattern or the extended line thereof and the second line pattern are connected, is longer than the first line pattern.

7. An exposure apparatus according to claim 6, wherein the distance between the connection position and one end part of the second line pattern is longer than a distance between the connection position and an other end part of the second line pattern.

8. An exposure apparatus according to claim 4, wherein the second line pattern is bent in a middle thereof.

9. An exposure apparatus according to claim 1, wherein the second pattern includes a dot shape pattern.

10. An exposure apparatus according to claim 1, wherein the second pattern includes a lattice-shaped pattern.

11. An exposure apparatus according to claim 1, wherein a surface of the second area is more lyophilic with respect to the liquid than a surface of the first area.

12. An exposure apparatus according to claim 1, wherein a surface of the second area is rougher than a surface of the first area.

13. An exposure apparatus according to claim 1, wherein a lyophilic area and a lyophobic area arranged outside of the lyophilic area are provided on the prescribed surface, and the first area and the second area are provided in an area separated from a center of the lyophilic area.

14. An exposure apparatus according to claim 1, wherein the first pattern includes a line pattern.

15. An exposure apparatus according to claim 1, wherein the first pattern includes a hole pattern.

16. An exposure apparatus according to claim 1, wherein at least one of the first pattern or the second pattern has a concave part or a convex part or both.

17. An exposure apparatus according to claim 1, wherein the measuring system has a light receiving element that receives light via the first pattern.

18. A device manufacturing method comprising:

exposing a substrate with the exposure apparatus according to claim 1; and

developing the exposed substrate to produce the device.

19. An exposure apparatus that exposes a substrate via a liquid, comprising:

a measuring system, in which a measuring part is arranged on a prescribed surface;

a first area defined on the prescribed surface so as to include the measuring part; and

a second area defined in the vicinity of the first area on the prescribed surface, and

wherein a prescribed processing is performed on a surface of the first area or a surface of the second area or both so that the liquid that has remained and extended over the first area and the second area retreats from the first area and collects in the second area.

20. An exposure apparatus according to claim 19, wherein the surface of the second area is more lyophilic with respect to the liquid than the surface of the first area.

21. An exposure apparatus according to claim 19, wherein the surface of the second area is rougher than the surface of the first area.

22. An exposure apparatus according to claim 19, wherein a concave part or a convex part or both are formed on the surface of the second area.

23. An exposure apparatus according to claim 22, wherein a concave part is formed on the surface of the first area, and the concave part that is deeper than the concave part of the first area is formed on the surface of the second area.

24. An exposure apparatus according to claim 22, further comprising:

a projection optical system; and

a movable stage on an image plane side of the projection optical system, and

wherein an upper surface of the stage includes the prescribed surface.

25. An exposure apparatus according to claim 24, further comprising:

a liquid immersion mechanism that forms a liquid immersion area of the liquid between the projection optical system and the stage, and

wherein the measuring system receives light that has passed through the projection optical system and the liquid of the liquid immersion area.

26. An exposure apparatus that exposes a substrate via a liquid, comprising:

a measuring system, in which a measuring part is arranged on a prescribed surface;

a first area defined on the prescribed surface so as to include the measuring part; and

a second area defined on the prescribed surface that is larger than the first area so as to surround the first area, and

wherein the first area is defined at a position separated from a center of the second area so that the liquid that has remained and extended over the first area and the second area retreats from the first area and collects in the second area.

27. An exposure apparatus according to claim 26, wherein the surface of the second area is more lyophilic with respect to the liquid than the surface of the first area.

28. An exposure apparatus that exposes a substrate via a liquid comprising:

a measuring system, in which a measuring part is arranged on a prescribed surface; and

a first area defined on the prescribed surface so as to include the measuring part, and

wherein a flow of gas is produced onto the first area so that the liquid that has remained in the first area retreats from the first area, and

a gas supply port that produces the gas flow that is substantially parallel to a surface of the first area is provided in a vicinity of the first area.

29. An exposure apparatus according to claim 28, further comprising an air conditioning system that air-conditions a space in which the prescribed surface is provided, and

wherein the liquid that has remained in the first area retreats from the first area due to the flow of gas produced by the air conditioning system.

30. An exposure apparatus according to claim 29, further comprising a control apparatus that controls a position or an attitude of the first area so that the surface of the first area becomes substantially parallel to the gas flow produced by the air conditioning system.

31. An exposure apparatus according to claim 30, further comprising a stage that holds the measuring part and is movable, and

wherein an upper surface of the stage includes the prescribed surface, and the control apparatus controls the position or the attitude of the first surface by controlling the position or the attitude of the stage.

32. An exposure apparatus according to claim 28, further comprising a second area that is defined on the downstream side of the gas flow with respect to the first area on the prescribed surface, and for which a prescribed processing has been performed.

33. An exposure apparatus according to claim 32, wherein a surface of the second area is more lyophilic with respect to the liquid than the surface of the first area.

34. An exposure apparatus according to claim 32, wherein a surface of the second area is rougher than the surface of the first area.

35. An exposure apparatus according to claim 32, wherein concave parts or convex parts or both are formed on a surface of the second area.

36. An exposure apparatus according to claim 32, wherein concave parts are formed on the surface of the first area, and concave parts that are deeper than the concave parts of the first area are formed on a surface of the second area.

37. An exposure apparatus that exposes a substrate via a liquid, comprising:

a measuring system, in which a measuring part is arranged on a prescribed surface;

a first area defined on the prescribed surface so as to include the measuring part; and

a second area in a vicinity of the first area, and

wherein a liquid repellent film is formed on the surface of the second area, and a liquid repellent film is not formed on the surface of the first area.

38. An exposure apparatus according to claim 37, wherein the liquid repellent film is removed in the first area.

39. An exposure apparatus according to claim 37, wherein the first area is surrounded by the second area.

40. An exposure apparatus according to claim 37, wherein ultraviolet light is irradiated onto at least a part of the first area, but not onto the second area.

41. An exposure apparatus according to claim 40, wherein the substrate is exposed with exposure light from a projection optical system, and the ultraviolet light comprises the exposure light from the projection optical system.

42. An exposure apparatus according to claim 41, further comprising:

a moving element that is capable of moving relative to the projection optical system, wherein

the prescribed surface comprises an upper surface of the moving element.

43. An exposure apparatus according to claim 42, wherein the moving element is capable of moving below the projection optical system while supporting the substrate.

44. An exposure apparatus according to claim 37, wherein the liquid repellent film comprises a fluorine resin film.

45. An exposure apparatus according to claim 37, wherein exposure light is irradiated onto the first area via the liquid.

46. An exposure apparatus according to claim 45, wherein the liquid is in contact with a surface of the first area and a surface of the second area.

47. An exposure apparatus according to claim 37, further comprising:

a receiving element that receives exposure light via the measuring part at the first area.

48. An exposure apparatus according to claim 47, wherein an optical characteristic of a projection optical system is obtained based on a light receiving result of a light receiving element.

49. An exposure apparatus according to claim 48, wherein the optical characteristic comprises an image formation characteristic of the projection optical system.

50. An exposure apparatus according to claim 37, wherein at least a part of a surface of the first area comprises a surface of a transparent member.

51. An exposure apparatus according to claim 50, wherein the transparent member comprises a glass member.

52. An exposure apparatus according to claim 50, wherein at least a part of the surface of the first area comprises a surface of a light shielding film that is provided on the transparent member.

53. An exposure apparatus according to claim 37, wherein at least a part of a surface of the first area comprises a surface of a light shielding member.

54. An exposure apparatus according to claim 52, wherein the light shielding film comprises a chrome film.

55. An exposure apparatus according to claim 54, wherein the measuring part comprises an aperture pattern that is formed in a light shielding film.

56. An exposure apparatus according to claim 55, wherein the aperture pattern comprises a line pattern.

57. An exposure apparatus according to claim 37, wherein at least a part of a surface of the first area comprises a surface of a reflecting film.

58. An exposure apparatus according to claim 57, wherein the reflecting film comprises an aluminum film.