Biaxial scanning mirror for image forming apparatus and method for operating the same
First Claim
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1. A biaxial scanning mirror for an image forming apparatus, comprising:
- a first wafer having a plurality of cavities forming a first row and a second row;
a plurality of permanent magnets each installed in one of the plurality of cavities, two adjacent permanent magnets of the same row having an air gap formed therebetween;
a second wafer, comprising;
a mirror unit, rotatable around a first axis, for reflecting light beams; and
a rotating unit, formed around the mirror unit, for rotating the mirror unit around a second axis which is perpendicular to the first axis;
at least one coil substrate having a planar coil, assembled in the rotating unit, wherein the planner coil is partially inserted into the air gap formed between the two adjacent permanent magnets; and
a spacer, formed between the first wafer and the second wafer, for separating the first wafer and the second wafer.
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Abstract
A biaxial scanning mirror is disclosed in the present invention. The mirror includes: a first wafer having several cavities forming a first row and a second row, several permanent magnets each installed in one of the cavities, a spacer and a second wafer. The second wafer includes: a mirror unit, rotating around a first axis, for reflecting light beams; and a rotating unit, formed around the mirror unit, for rotating the mirror unit around a second axis which is perpendicular to the first axis. At least one coil substrate having a planar coil is assembled in the rotating unit.
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19 Claims
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1. A biaxial scanning mirror for an image forming apparatus, comprising:
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a first wafer having a plurality of cavities forming a first row and a second row; a plurality of permanent magnets each installed in one of the plurality of cavities, two adjacent permanent magnets of the same row having an air gap formed therebetween; a second wafer, comprising; a mirror unit, rotatable around a first axis, for reflecting light beams; and a rotating unit, formed around the mirror unit, for rotating the mirror unit around a second axis which is perpendicular to the first axis; at least one coil substrate having a planar coil, assembled in the rotating unit, wherein the planner coil is partially inserted into the air gap formed between the two adjacent permanent magnets; and a spacer, formed between the first wafer and the second wafer, for separating the first wafer and the second wafer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A biaxial scanning mirror for an image forming apparatus, comprising:
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a first wafer having a plurality of cavities forming one or more rows; a plurality of permanent magnets each installed in one of the plurality of cavities, two adjacent permanent magnets of a same row having an air gap formed therebetween; a second wafer, comprising; a mirror unit, rotatable around a first axis, for reflecting light beams; and a rotating unit, formed around the mirror unit, for rotating the mirror unit around a second axis which is perpendicular to the first axis; and at least one coil substrate having a planar coil, connected to the rotating unit, wherein the planner coil is partially inserted into the air gap formed between the two adjacent permanent magnets.
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17. A method for forming a biaxial scanning mirror for an image forming apparatus, comprising:
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providing a first wafer having a plurality of cavities forming a first row and a second row; installing a plurality of permanent magnets, each in one of the plurality of cavities, wherein two adjacent permanent magnets of the same row form an air gap therebetween; providing a second wafer, comprising; a mirror unit, rotatable around a first axis, for reflecting light beams; and a rotating unit, formed around the mirror unit, for rotating the mirror unit around a second axis which is perpendicular to the first axis; assembling at least one coil substrate having a planar coil in the rotating unit; and placing the second wafer over the first wafer and partially inserting the planner coil into the air gap formed between the two adjacent permanent magnets. - View Dependent Claims (18, 19)
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Specification