Method for operating a sensor system, and sensor system
First Claim
1. A method for operating a sensor system including a substrate having a main plane of extension and an oscillating structure movable relative to the substrate, comprising:
- exciting, by drive elements, the oscillating structure to a torsional oscillation about an axis of oscillation extending substantially perpendicular to the main plane of extension; and
detecting, with the aid of first detection elements, a first tilting movement of the oscillating structure about a first tilting axis extending substantially parallel to the main plane of extension; and
detecting, with the aid of further detection elements, an angular acceleration of the substrate superposed to the torsional oscillation substantially about the axis of oscillation.
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Abstract
In a method for operating a sensor system including a substrate having a main plane of extension and an oscillating structure which is movable relative to the substrate, drive elements excite the oscillating structure to a torsional oscillation about an axis of oscillation running essentially perpendicular to the main plane of extension, first detection elements detect a first tilting movement of the oscillating structure about a first tilting axis essentially parallel to the main plane of extension, and further detection elements detect an angular acceleration of the substrate superposed to the torsional oscillation essentially about the axis of oscillation.
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Citations
10 Claims
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1. A method for operating a sensor system including a substrate having a main plane of extension and an oscillating structure movable relative to the substrate, comprising:
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exciting, by drive elements, the oscillating structure to a torsional oscillation about an axis of oscillation extending substantially perpendicular to the main plane of extension; and detecting, with the aid of first detection elements, a first tilting movement of the oscillating structure about a first tilting axis extending substantially parallel to the main plane of extension; and detecting, with the aid of further detection elements, an angular acceleration of the substrate superposed to the torsional oscillation substantially about the axis of oscillation. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A sensor system, comprising:
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a substrate having a main plane of extension; an oscillating structure configured to be movable relative to the substrate; drive elements for generating a torsional oscillation of the oscillating structure about an axis of oscillation extending substantially perpendicular to the main plane of extension; first detection elements for detecting a first tilting movement of the oscillating structure about a first tilting axis extending substantially parallel to the main plane of extension; and further detection elements for detecting an angular acceleration of the oscillating structure superposed to the torsional oscillation substantially about the axis of oscillation. - View Dependent Claims (8, 9, 10)
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Specification