Translational mass in-plane MEMS accelerometer

• US 8,307,710 B2
• Filed: 07/09/2009
• Issued: 11/13/2012
• Est. Priority Date: 07/09/2009
• Status: Active Grant

• Current Assignee: Honeywell International Inc.
• Original Assignee: Honeywell International Inc.
• Inventors: Dwyer, Paul W., Strehlow, John
• Primary Examiner(s): Macciarolo, Peter
• Assistant Examiner(s): Shah, Samir M
• Application Number:
  US12/500,487
• Publication Number:
  US 20110005317A1
• Time in Patent Office: 1,223 Days
• Field of Search: 735/142.9, 735/140.1, 735/141.6, 735/141.7, 735/142.3, 735/143.1, 735/143.2, 735/143.9
• US Class Current: 73/514.39
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 15/132 with electromagnetic counterbalancing means
• CPC Class Codes: G01P 2015/0882 for providing damping of vibrations

Abstract

An in-plane Micro Electro-Mechanical Systems (MEMS) accelerometer device with improved performance. An example MEMS device includes one or more components for generating a magnetic flux field perpendicular to a major plane. The device also includes a substrate, a proof mass, a hinge element that flexibly connects the proof mass to the substrate, the major plane corresponds to a major surface of the proof mass, a plurality of conductive leads located at a position on the proof mass proximate the magnetic flux field, a plurality of conductive springs, each of the springs are electrically connected to a corresponding one of the conductive leads, and a plurality of anchor pads connected to the substrate and one of the conductive springs. Isolation trenches directly connect to outer edges of the leads that are adjacent to other leads or proof mass material. The leads and springs include a plurality of slots.

Claims

1. An in-plane Micro Electro-Mechanical Systems (MEMS) accelerometer device having one or more components for generating a magnetic flux field, the magnetic flux field being perpendicular to a major plane, the device comprising:

a substrate;

a proof mass;

a hinge element configured to flexibly connect the proof mass to the substrate for allowing motion of the proof mass in the major plane, the major plane corresponding to a major surface of the proof mass;

a plurality of conductive leads located at a position on the proof mass proximate the magnetic flux field, thereby producing a servo force to the proof mass;

a plurality of conductive springs, each of the springs being electrically connected to a corresponding one of the conductive leads; and

a plurality of anchor pads connected to the substrate and one of the conductive springs.

2. The device of claim 1, further comprising one or more sense combs comprising first tines located on the proof mass and opposing second tines attached to the substrate.

3. The device of claim 2, further comprising damping combs comprising first tines located on the proof mass and opposing second tines attached to the substrate, the first damping comb tines being electrically isolated from the first sense comb tines.

4. The device of claim 1, wherein each of the conductive springs comprises:

two first legs having a first cross-sectional dimension;

an elbow; and

two second legs having a second cross-sectional dimension,

wherein the two second legs are connected between the elbow and one of the first legs and

wherein the second cross-sectional dimension is smaller than the first cross-sectional dimension.

5. The device of claim 1, further comprising isolation trenches being directly connected to outer edges of the leads that are adjacent to other leads or proof mass material.

6. The device of claim 1, wherein the leads comprise a plurality of slots.

7. The device of claim 6, wherein the springs comprise a plurality of slots.