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Low pass filter semiconductor structures for use in transducers for measuring low dynamic pressures in the presence of high static pressures

  • US 8,307,713 B2
  • Filed: 11/02/2010
  • Issued: 11/13/2012
  • Est. Priority Date: 04/23/2004
  • Status: Active Grant
First Claim
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1. A differential pressure transducer, comprising:

  • a filter adapted to receive a first pressure comprising a static pressure component and a dynamic pressure component at an input, attenuate at least the dynamic pressure component, and output a filtered second pressure at an output;

    a diaphragm comprising a first surface and a second surface, wherein the first surface is adapted to receive the first pressure and the second surface is in communication with the output of the filter and adapted to receive the filtered second pressure; and

    a sensor in communication with the diaphragm and adapted to measure a difference between the first pressure and the filtered second pressure.

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