Microfluidic systems and methods for screening plating and etching bath compositions
First Claim
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1. A system for simultaneously screening impacts of a plurality of electrolyte bath compositions on a first electrode structure disposed on a substrate, the system comprising:
- a device having multiple microfluidic channels, each microfluidic channel having an inlet port for receiving a fluid corresponding to one of the plurality of bath compositions,wherein in operation, the device is detachably disposed on the substrate so that different fluids corresponding to the plurality of bath compositions received in the multiple microfluidic channels act on different portions of the first electrode structure, thereby enabling simultaneous screening of the impacts of the plurality of bath compositions on the first electrode structure disposed on the substrate;
wherein the impact is selected from the group consisting of etching and plating.
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Abstract
Methods and systems for screening for the effect of bath composition on the performance of electroplating, electroless-plating, electrochemical-etching, electropolishing, and chemical-etching processes are provided. The methods and systems use microfluidic channels that allow for etching or plating studies on an electrode exposed to a multitude of bath compositions at different positions on its surface. After deposition or etching, the electrode surface can be quickly and easily detached from the device for analysis of deposited or etched film properties.
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Citations
17 Claims
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1. A system for simultaneously screening impacts of a plurality of electrolyte bath compositions on a first electrode structure disposed on a substrate, the system comprising:
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a device having multiple microfluidic channels, each microfluidic channel having an inlet port for receiving a fluid corresponding to one of the plurality of bath compositions, wherein in operation, the device is detachably disposed on the substrate so that different fluids corresponding to the plurality of bath compositions received in the multiple microfluidic channels act on different portions of the first electrode structure, thereby enabling simultaneous screening of the impacts of the plurality of bath compositions on the first electrode structure disposed on the substrate; wherein the impact is selected from the group consisting of etching and plating. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method for simultaneously screening impacts of a plurality of electrolyte bath compositions on a first electrode structure disposed on a substrate, the method comprising:
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exposing different portions of the first electrode structure disposed on the substrate to the action of different fluids corresponding to a plurality of electrolyte bath compositions, comprising detachably disposing a device having multiple microfluidic channels on the substrate, each microfluidic channel having an inlet port for receiving a fluid corresponding to one of the plurality of bath compositions, so that different fluids corresponding to the plurality of bath compositions received in the multiple microfluidic channels act on the different portions of the first electrode structure, thereby enabling simultaneous screening of the impacts of the plurality of bath compositions on the first electrode structure disposed on the substrate; wherein the impact is selected from the group consisting of etching and plating. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17)
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Specification