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Electrical device including a functional element in a cavity

  • US 8,309,858 B2
  • Filed: 01/23/2009
  • Issued: 11/13/2012
  • Est. Priority Date: 01/25/2008
  • Status: Active Grant
First Claim
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1. An electrical device comprising:

  • a substrate including a functional element;

    an insulating first film configured to form a cavity containing the functional element, together with the substrate, and to include a plurality of through-holes, the cavity including a space between the insulating first film and the functional element;

    an insulating second film configured to cover the plurality of the through-holes, the second film being formed on the first film and having a gas permeability higher than that of the first film;

    an insulating third film configured to form at least on the second film, the third film having a gas permeability lower than that of the second film, the insulating third film being in contact with the insulating second film; and

    an insulating fourth film configured to form on the third film, the fourth film having an elasticity higher than that of the third film.

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