Probe for testing electrical properties of a test sample

• US 8,310,258 B2
• Filed: 10/31/2006
• Issued: 11/13/2012
• Est. Priority Date: 10/31/2005
• Status: Active Grant

• Current Assignee: CAPRES A/S (KLA Corporation)
• Original Assignee: CAPRES A/S (KLA Corporation)
• Inventors: Petersen, Dirch, Hansen, Torben Mikael, Petersen, Peter R. E.
• Primary Examiner(s): Rodas, Richard Isla
• Application Number:
  US12/091,927
• Publication Number:
  US 20090219047A1
• Time in Patent Office: 2,205 Days
• Field of Search: 324/754, 324/158.1, 324/762, 324/754.11, 324/755.07
• US Class Current: 324/755.07
• CPC Class Codes: G01R 1/06716 Elastic

Abstract

A probe for testing electrical properties of test samples includes a body having a probe arm defining proximal and distal ends, the probe arm extending from the body at the proximal end of the probe arm, whereby a first axis is defined by the proximal and the distal ends. The probe arm defines a geometry allowing flexible movement of the probe arm along the first axis and along a second axis perpendicular to the first axis, and along a third axis orthogonal to a plane defined by the first axis and the second axis.

Claims

1. A probe for testing electrical properties of a test sample having a surface facing the probe, said probe comprising:

a body defining a first planar surface oriented at an angle greater than 0 degrees and less than 90 degrees with respect to the surface of the test sample; and

a probe arm defining a first part having a proximal end and an opposite distal end, said probe arm extending from said body at said proximal end of said first part, a first axis being defined by said proximal end and said distal end of said first part, said probe arm extending parallel with said first planar surface;

said probe arm defining a geometry allowing flexible movement of said probe arm along said first axis and along a second axis perpendicular to said first axis and along a third axis orthogonal to a plane defined by said first axis and said second axis;

wherein the entire length of said probe arm defines a surface that extends distally from said body and that forms a continuous plane with said first planar surface.

2. The probe according to claim 1, wherein said body defines a second planar surface being substantially orthogonal to said first planar surface, said probe arm extending from said second planar surface.

3. The probe according to claim 1, wherein said probe arm defines an L-shaped geometry.

4. A probe for testing electrical properties of a test sample, said probe comprising:

a body; and

a cantilever probe arm having a first portion extending along a first axis from a proximal end fixed to the body to a distal end, and a second portion extending from the distal end of the first portion along a second axis perpendicular to the first axis;

wherein the probe arm is independently flexible along each of the first axis, the second axis, and a third axis orthogonal to a plane defined by the first axis and the second axis; and

wherein the probe arm, when in static contact with the test sample, defines first, second, and third spring constants in the directions of the first, second and third axes, respectively;

wherein the probe arm is configured to remain in static contact with the test sample while pressed toward the test sample after achieving contact with the test sample; and

wherein any two of the first, second, and third spring constants, when projected onto a plane of a surface of the test sample, have a ratio between approximately 1;

1 and 1;

20.

5. The probe according to claim 4, wherein the ratio between any two of the first, second, and third spring constants, when projected onto a plane of a surface of the test sample, is approximately 1:

1.

6. The probe according to claim 4, wherein said probe arm defines a geometry that is selected from a group consisting of semi-circular, square, rectangular, triangular, and any combinations thereof.

7. The probe according to claim 4, wherein said probe arm defines a geometry that includes two substantially linear parts connected so as to define an angle.

8. The probe according to claim 7, wherein said angle is 90 degrees.

9. The probe according to claim 4, wherein said body includes a plurality of probe arms.

10. The probe according to claim 9, wherein the probe arms of said plurality of probe arms define similar geometries.

11. The probe according to claim 9, wherein the probe arms of said plurality of probe arms define at least two different geometries.

12. The probe according to claim 9, wherein said plurality of probe arms each defines an L-shaped geometry.