Substrate processing system and data retrieval method
First Claim
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1. A data processing method for a substrate processing apparatus comprising:
- a group administration apparatus for administering a plurality of substrate processing apparatuses for processing substrates; and
a plurality of operation terminals each for, when connected to said group administration apparatus, generating a data acquisition request format that sets forth retrieval conditions and types of display items classified in individual tables for said substrate processing apparatuses, and then transmitting the data acquisition request format to said group administration apparatus,the method comprising;
accumulating data from a substrate processing apparatus in a data accumulation area;
at a time of data acquisition request from said plurality of operation terminals, expanding the data acquisition request format for said plurality of substrate processing apparatuses;
merging display items to be retrieved with a same retrieval condition which is included in retrieval conditions set forth in the expanded data acquisition request formats to generate a merge table for substrate processing apparatuses; and
retrieving the data accumulation area by the retrieval condition using merge tables to transmit retrieved results to the operation terminal.
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Abstract
An operation terminal, which includes an operation terminal, when connected to a group administration apparatus for administering a plurality of substrate processing apparatuses for processing substrates, generates a data acquisition request format that sets forth retrieval conditions and types of display items classified in individual tables for the substrate processing apparatuses, and then transmits it to the group administration apparatus.
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Citations
15 Claims
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1. A data processing method for a substrate processing apparatus comprising:
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a group administration apparatus for administering a plurality of substrate processing apparatuses for processing substrates; and a plurality of operation terminals each for, when connected to said group administration apparatus, generating a data acquisition request format that sets forth retrieval conditions and types of display items classified in individual tables for said substrate processing apparatuses, and then transmitting the data acquisition request format to said group administration apparatus, the method comprising; accumulating data from a substrate processing apparatus in a data accumulation area; at a time of data acquisition request from said plurality of operation terminals, expanding the data acquisition request format for said plurality of substrate processing apparatuses; merging display items to be retrieved with a same retrieval condition which is included in retrieval conditions set forth in the expanded data acquisition request formats to generate a merge table for substrate processing apparatuses; and retrieving the data accumulation area by the retrieval condition using merge tables to transmit retrieved results to the operation terminal. - View Dependent Claims (2, 3, 4)
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5. A data processing method for a substrate processing system comprising a group administration apparatus for administering a plurality of substrate processing apparatuses for processing substrates and a plurality of operation terminals to generate data acquisition request formats for said substrate processing apparatuses,
the method comprising: -
accumulating data from a substrate processing apparatus in a data accumulation area; expanding the data acquisition request format for each of said substrate processing apparatuses for each of said operation terminals which is included in said data acquisition request formats acquired by each of said operation terminals; merging display items to be retrieved with a same retrieval condition which is included in retrieval conditions set forth in the expanded data acquisition request formats to generate a merge table for substrate processing apparatuses; and retrieving the target data accumulation area by the retrieval condition using merge tables to transmit retrieved results to the operation terminal. - View Dependent Claims (6, 7, 8)
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9. A data processing method for a substrate processing apparatus, the method comprising:
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accumulating data from a substrate processing apparatus in a data accumulation area; at a time of data acquisition request from an operation terminal, acquiring data acquisition request formats in which a retrieval condition to retrieve display items to be displayed on an operation terminal of a displaying target and data types of the display items are formatted; merging the display items to be retrieved with a same retrieval condition which is included in retrieval conditions set forth in a data acquisition request format acquired from the operation terminal to generate merge tables; and retrieving the data accumulation area by the retrieval condition using the merge tables to transmit the retrieved results to the operation terminal. - View Dependent Claims (10, 11, 12, 13, 14, 15)
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Specification