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Plasma enhanced polymer ultra-thin multi-layer packaging

  • US 8,313,811 B2
  • Filed: 08/11/2010
  • Issued: 11/20/2012
  • Est. Priority Date: 08/12/2009
  • Status: Active Grant
First Claim
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1. A method of making an implantable medical device comprising:

  • placing a plurality of components on a substrate; and

    coating a biocompatible multi-layer polymeric applied by vapour deposition to conform to and sealingly cover at least a first portion of the components and the substrate, the coating being applied in at least two pairs of layers, wherein each pair has one layer formed by dissociation of a precursor and then simple deposition of that precursor, and the other layer is formed by at least one of plasma dissociation and excitation of the precursor to form a plasma-enhanced precursor, and then deposition of the plasma-enhanced precursor.

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