Plasma enhanced polymer ultra-thin multi-layer packaging
First Claim
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1. A method of making an implantable medical device comprising:
- placing a plurality of components on a substrate; and
coating a biocompatible multi-layer polymeric applied by vapour deposition to conform to and sealingly cover at least a first portion of the components and the substrate, the coating being applied in at least two pairs of layers, wherein each pair has one layer formed by dissociation of a precursor and then simple deposition of that precursor, and the other layer is formed by at least one of plasma dissociation and excitation of the precursor to form a plasma-enhanced precursor, and then deposition of the plasma-enhanced precursor.
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Abstract
An implantable medical device including a plurality of components on a substrate, and a biocompatible multi-layer polymeric coating applied by vapor deposition to conform to and sealingly cover at least a portion of the components and/or the substrate. The coating is applied in at least two pairs of layers, wherein each pair has one layer formed by dissociation of a precursor and then simple deposition of that precursor, and the other layer is formed by at least one of plasma dissociation and excitation of the precursor to form a plasma-enhanced precursor, and then deposition of the plasma-enhanced precursor.
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Citations
11 Claims
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1. A method of making an implantable medical device comprising:
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placing a plurality of components on a substrate; and coating a biocompatible multi-layer polymeric applied by vapour deposition to conform to and sealingly cover at least a first portion of the components and the substrate, the coating being applied in at least two pairs of layers, wherein each pair has one layer formed by dissociation of a precursor and then simple deposition of that precursor, and the other layer is formed by at least one of plasma dissociation and excitation of the precursor to form a plasma-enhanced precursor, and then deposition of the plasma-enhanced precursor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method of making an implantable medical device comprising:
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placing a plurality of components on a substrate having at least a first three-dimensional portion; and coating a biocompatible multi-layer polymeric applied by vapour deposition to conform to and sealingly cover at least a first portion of the components and the substrate, the coating being applied in at least two pairs of layers, wherein each pair has one layer formed by dissociation of a precursor and then simple deposition of that precursor, and the other layer is formed by at least one of plasma dissociation and excitation of the precursor to form a plasma-enhanced precursor, and then deposition of the plasma-enhanced precursor, wherein diffusion through each layer differs from that of the other layer in the pair, and the precursor for at least one pair is selected from di-p-xylylene and halogenated derivatives thereof. - View Dependent Claims (10, 11)
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Specification