Thin film transistors and circuits with metal oxynitride active channel layers
First Claim
1. A manufacture method of a metal oxynitride thin film transistor with improved charge carrier mobility comprising the steps of:
- providing a first substrate;
forming a first gate electrode over said first substrate;
forming a first gate insulating layer, said first gate insulating layer overlaps at least a portion of said first gate electrode;
forming a source electrode, said source electrode overlaps a first portion of said first gate insulating layer;
forming a drain electrode, said drain electrode overlaps a second portion of said first gate insulating layer; and
forming at least a first metal oxynitride active channel layer, said first metal oxynitride active channel layer overlaps at least a portion of said first gate insulating layer, at least a portion of said source electrode and at least a portion of said drain electrode, wherein said charge carry mobility of said first metal oxynitride active channel layer is controlled by controlling metal content and nitrogen to oxygen ratio in said first metal oxynitride active channel layer during said active channel layer deposition.
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Abstract
Thin film transistors and circuits having improved mobility and stability are disclosed in this invention to have metal oxynitrides as the active channel layers. In one embodiment, the charge carrier mobility in the thin film transistors is increased by using the metal oxynitrides as the active channel layers. In another embodiment, a thin film transistor having a p-type metal oxynitride active channel layer and a thin film transistor having an n-type metal oxynitride active channel layer are fabricated to forming a CMOS circuit. In yet another embodiment, thin film transistor circuits having metal oxynitrides as the active channel layers are provided.
6 Citations
19 Claims
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1. A manufacture method of a metal oxynitride thin film transistor with improved charge carrier mobility comprising the steps of:
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providing a first substrate; forming a first gate electrode over said first substrate; forming a first gate insulating layer, said first gate insulating layer overlaps at least a portion of said first gate electrode; forming a source electrode, said source electrode overlaps a first portion of said first gate insulating layer; forming a drain electrode, said drain electrode overlaps a second portion of said first gate insulating layer; and forming at least a first metal oxynitride active channel layer, said first metal oxynitride active channel layer overlaps at least a portion of said first gate insulating layer, at least a portion of said source electrode and at least a portion of said drain electrode, wherein said charge carry mobility of said first metal oxynitride active channel layer is controlled by controlling metal content and nitrogen to oxygen ratio in said first metal oxynitride active channel layer during said active channel layer deposition. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A manufacture method of a CMOS circuit with improved charge carrier mobility comprising the steps of:
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forming a first p-channel metal oxynitride thin film transistor having at least a p-type metal oxynitride active channel layer, a first gate electrode, a first gate insulator, a first source electrode, and a first drain electrode, said charge carrier mobility of said p-type metal oxynitride active channel layer is controlled by controlling metal content and nitrogen to oxygen ratio in said p-type metal oxynitride active channel layer during said p-type active channel layer deposition, and forming a second n-channel metal oxynitride thin film transistor having at least a n-type metal oxynitride active channel layer, a second gate electrode, a second gate insulator, a second source electrode, and a second drain electrode, said charge carrier mobility of said n-type metal oxynitride active channel layer is controlled by controlling metal content and nitrogen to oxygen ratio in said n-type metal oxynitride active channel layer during said n-type active channel layer deposition, wherein said first gate electrode is connected to said second gate electrode and first drain electrode is connected to said second drain electrode. - View Dependent Claims (10, 11, 12)
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- 13. A manufacture method of a circuit of metal oxynitride thin film transistors with improved charge carrier mobility comprising the steps of forming a plurality of thin film transistors, each with at least a metal oxynitride active channel layer, wherein said charge carrier mobility of said plurality of thin film transistors is controlled by controlling metal content and oxygen to nitrogen ratio in each said metal oxynitride active channel layer during said active channel layer deposition.
Specification