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Multi-channel radio frequency generator

  • US 8,314,561 B2
  • Filed: 04/15/2010
  • Issued: 11/20/2012
  • Est. Priority Date: 04/02/2010
  • Status: Active Grant
First Claim
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1. A multi-channel radio frequency (RF) generator module comprising:

  • N power amplifiers that generate N RF outputs, respectively;

    M drivers that drive the N power amplifiers based on M driver control signals, respectively;

    a power supply module that receives alternating current (AC) input power and that applies L rail voltages to the N power amplifiers based on L rail voltage setpoints, respectively;

    a control module that sets the L rail voltage setpoints and the M driver control signals,wherein the N RF outputs are provided to N respective plasma electrodes of a plasma chamber, andwherein N is an integer greater than one, L and M are integers greater than zero, and M and L are less than or equal to N;

    a parameter determination module that determines N actual forward powers for the N RF outputs, respectively; and

    a feedback module that determines a total forward power of the multi-channel RF generator module based on the N actual forward powers,wherein the control module sets the L rail voltage setpoints based on the total forward power.

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