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Nano electromechanical integrated-circuit filter

  • US 8,314,665 B2
  • Filed: 09/20/2007
  • Issued: 11/20/2012
  • Est. Priority Date: 09/20/2006
  • Status: Expired due to Fees
First Claim
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1. An integrated circuit filter, the filter comprising:

  • a silicon substrate;

    a sacrificial layer on the silicon substrate;

    a device layer on the sacrificial layer and including at least one resonator, wherein the at least one resonator includes sub-micron excitable elements and wherein the at least one resonator possesses a fundamental mode frequency as well as a collective mode frequency and wherein the collective mode frequency of the at least one resonator is determined by the fundamental frequency of the submicron excitable elements.

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