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Method and system for optical MEMS with flexible landing structures

  • US 8,314,984 B2
  • Filed: 02/14/2008
  • Issued: 11/20/2012
  • Est. Priority Date: 02/14/2008
  • Status: Active Grant
First Claim
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1. An optical deflection device for a display application, the optical deflection device comprising:

  • a semiconductor substrate comprising an upper surface region defining an upper surface plane;

    one or more electrode devices provided overlying the upper surface region;

    a hinge device comprising a silicon material and having an axis of rotation substantially parallel to the upper surface plane, wherein the axis of rotation is located at a predetermined height above the upper surface plane;

    a plurality of landing pads comprising a silicon material and coupled to the upper surface region, wherein the plurality of landing pads are located at the predetermined height above the upper surface plane; and

    a mirror structure comprising;

    a post portion coupled to the hinge device, anda mirror plate portion coupled to the post portion.

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