Single wafer apparatus for drying semiconductor substrates using an inert gas air-knife

• US 8,322,045 B2
• Filed: 10/12/2008
• Issued: 12/04/2012
• Est. Priority Date: 06/13/2002
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Stein, Nathan D., Achkire, Younes, Franklin, Timothy J., Svirchevski, Julia, Marohl, Dan A.
• Primary Examiner(s): GRAVINI, STEPHEN MICHAEL
• Application Number:
  US12/249,956
• Publication Number:
  US 20090044839A1
• Time in Patent Office: 1,514 Days
• Field of Search: 34/77, 34/78, 34/80, 34/82, 34/84, 341/07, 341/68, 342/01, 342/10, 427/377, 134/30, 134/95.2
• US Class Current: 34/77
• CPC Class Codes: H01L 21/67034 for drying

Abstract

In one aspect, a substrate processing apparatus is provided. The apparatus comprises a mechanism for forming a meniscus on a surface of a substrate by moving the substrate through a fluid; an air knife apparatus positioned to apply an air knife to shorten the meniscus formed on the surface of the substrate; and a drying vapor nozzle positioned to direct a drying vapor to the meniscus shortened by the air knife. Numerous other aspects are provided.

Claims

1. A substrate processing apparatus, comprising:

a mechanism for forming a meniscus on a surface of a substrate by moving the substrate through a fluid;

an air knife apparatus positioned to apply an air knife to shorten the meniscus formed on the surface of the substrate, wherein the air knife apparatus includes a plurality of perforations adapted to apply the air knife; and

a drying vapor nozzle positioned to direct a drying vapor to the meniscus shortened by the air knife.

2. The apparatus of claim 1 wherein the drying vapor comprises a Marangoni drying gas.

3. The apparatus of claim 1 wherein the mechanism for forming a meniscus comprises a mechanism for lifting a substrate from a fluid bath.

4. The apparatus of claim 1 wherein the mechanism for forming a meniscus comprises a mechanism for moving a substrate through a fluid spray.

5. The apparatus of claim 4 further comprising a fluid spray nozzle adapted to supply the fluid spray.

6. The apparatus of claim 1 wherein the air knife is positioned at an angle of about 13°

to 30°

from horizontal.

7. The apparatus of claim 1 wherein the air knife is positioned at an angle of about 10°

to 20°

from horizontal.

8. The apparatus of claim 1 wherein the air knife is positioned at an angle of about 15°

from horizontal.

9. The apparatus of claim 1 wherein the perforations are uniformly distributed along the length of the air knife.

10. The apparatus of claim 1 wherein the perforations are colinear.

11. The apparatus of claim 1 wherein the perforations have the same orientation as each other.

12. The apparatus of claim 1 wherein the air knife is adapted to shorten the meniscus such that the meniscus is in the same position for a substrate having at least one of a hydrophilic film and a hydrophobic film.

13. The apparatus of claim 12 wherein the drying vapor nozzle is adapted to maintain the same position for directing the drying vapor at the substrate having at least one of the hydrophilic film and the hydrophobic film.

14. The apparatus of claim 5 wherein the air knife nozzle is positioned above the fluid spray nozzle.

15. The apparatus of claim 1 wherein a first meniscus is formed at an interface between a first side of the substrate and the surface of the fluid.

16. The apparatus of claim 15 wherein a second meniscus is formed at an interface between a second side of the substrate and the surface of the fluid.

17. The apparatus of claim 16 wherein the first side of the substrate includes a hydrophilic film and the second side of the substrate includes a hydrophobic film.

18. The apparatus of claim 17 further comprising a first and a second air knife, wherein the first air knife is adapted to apply a first air knife to the first side of the substrate and the second air knife is adapted to apply a second air knife to the second side of the substrate.

19. The apparatus of claim 18 wherein the first and second air knives deform the first and second meniscuses such that drying via the drying vapor occurs at substantially the same point above a surface of the fluid.

20. A substrate processing apparatus, comprising:

a mechanism for forming a meniscus on a surface of a substrate by moving the substrate through a fluid, wherein the mechanism further comprises;

a mechanism for moving a substrate through a fluid spray;

a fluid spray nozzle adapted to supply the fluid spray;

an air knife apparatus positioned to apply an air knife to shorten the meniscus formed on the surface of the substrate; and

a drying vapor nozzle positioned to direct a drying vapor to the meniscus shortened by the air knife.