Micromachined tuning fork gyroscopes with ultra-high sensitivity and shock rejection

• US 8,322,213 B2
• Filed: 06/08/2010
• Issued: 12/04/2012
• Est. Priority Date: 06/12/2009
• Status: Active Grant

• Current Assignee: Regents of the University of California (University of California)
• Original Assignee: Regents of the University of California (University of California)
• Inventors: Trusov, Alexander A., Schofield, Adam R., Shkel, Andrei M.
• Primary Examiner(s): Kwok, Helen C.
• Application Number:
  US12/796,452
• Publication Number:
  US 20100313657A1
• Time in Patent Office: 910 Days
• Field of Search: 735/041.2, 735/040.4, 735/041.4, 735/041.5, 735/041.6
• US Class Current: 73/504.12
• CPC Class Codes: G01C 19/5719 using planar vibrating masses driven in a translation vibration along an axis
• CPC Class Codes: G01C 19/5747 each sensing mass being connected to a driving mass, e.g. driving frames

Abstract

A vibratory rate z-axis gyroscope is characterized by drive-mode and sense-mode quality factors and rate sensitivity and is fabricated with at least two decoupled vibratory tines, a levered drive-mode mechanism coupled between the tines to structurally force anti-phase drive-mode motion of the tines at a predetermined drive frequency, to eliminate spurious frequency modes of the anti-phase drive-mode motion of the tines lower than the predetermined drive frequency and to provide synchronization of drive- and sense-mode motion of the tines, and a sense-mode mechanism coupled between the tines arranged and configured to provide a linearly coupled, dynamically balanced anti-phase sense-mode motion of the tines to minimize substrate energy dissipation and to enhance the sense-mode quality factor and rate sensitivity.

Claims

1. A vibratory rate z-axis gyroscope characterized by drive-mode and sense-mode quality factors and rate sensitivity comprising:

at least two decoupled vibratory tines;

a levered drive-mode mechanism coupled between the tines to structurally force anti-phase drive-mode motion of the tines at a predetermined drive frequency, to eliminate spurious frequency modes of the anti-phase drive-mode motion of the tines lower than the predetermined drive frequency and to provide synchronization of drive- and sense-mode motion of the tines; and

a sense-mode mechanism coupled between the tines arranged and configured to provide a linearly coupled, dynamically balanced anti-phase sense-mode motion of the tines to minimize substrate energy dissipation and to enhance the sense-mode quality factor and rate sensitivity.

2. The gyroscope of claim 1 where the sense-mode mechanism comprises a mechanism arranged and configured to have a dynamic operation of the tines which is balanced in both linear momentum and angular torque to reduce dissipation of energy due to linear and angular substrate vibrations.

3. The gyroscope of claim 1 where the levered drive-mode mechanism comprises a mechanism which is arranged and configured to have a dynamic operation of the tines which is characterized by balanced linear momentum between the two tines to reduce dissipation of energy due to substrate vibrations.

4. The gyroscope of claim 3 where the levered drive-mode mechanism is arranged and configured to have a degree of balanced linear momentum between the two tines sufficient to result in a drive-mode quality factor equal or greater than 0.3 million to reduce electrical power dissipation and electrical noise from a plurality of parasitic feed-through signals.

5. The gyroscope of claim 2 where the sense-mode mechanism is arranged and configured to have a degree of balanced anti-phase sense-mode motion of the tines sufficient to result in a sense-mode quality factor equal or greater than 0.6 million, mechanical sensitivity equal or greater than 2 nm/(deg/h) of sense-mode displacement, and rate sensitivity equal or better than 0.01 deg/h.

6. The gyroscope of claim 1 fabricated using conventional silicon MEMS technologies used for inertial navigation, guidance or non-magnetic gyrocompassing.

7. The gyroscope of claim 1 where the two decoupled vibratory tines are identical and symmetrically oriented relative to each other, each tine comprising an anchored outer frame, a proof mass and two drive-mode shuttles and two sense-mode shuttles resiliently coupled between the proof mass and the frame.

8. The gyroscope of claim 1 where the two decoupled vibratory tines each comprise an anchored outer frame, an isotropically suspended proof mass and two drive-mode shuttles and two sense-mode shuttles resiliently coupled between the proof mass and the frame.

9. The gyroscope of claim 1 where the levered drive-mode mechanism comprises two anchored pivots and two rigid coupling levers pivoted on corresponding ones of the two anchored pivots, the two rigid coupling levers coupled between the two tines to allow angular displacement of the coupling lever with respect to the anchored pivot, rigidity of the coupling levers reducing any in-phase motion of the tines at any lower-frequency modes of vibration below the predetermined drive frequency, and reducing any shifts in-phase drive-mode motion above the predetermined drive frequency.

10. The gyroscope of claim 1 where the sense-mode mechanism comprises sense-mode coupling flexures coupled between the tines to allow linear anti-phase sense-mode motion of the two tines moving in anti-phase to each other in response to anti-phase Coriolis force.

11. The gyroscope of claim 1 further comprising at least four decoupled vibratory tines, where the levered drive-mode mechanism is coupled between the at least four tines in a pairwise fashion to structurally force anti-phase drive-mode motion of the at least four tines at a predetermined drive frequency, to eliminate spurious frequency modes of the anti-phase drive-mode motion of the at least four tines lower than the predetermined drive frequency and to provide synchronization of drive- and sense-mode motion of the at least four tines;

and

where the sense-mode mechanism is coupled between the at least four tines in a pairwise fashion arranged and configured to provide a linearly coupled, dynamically balanced anti-phase sense-mode motion of the at least four tines to minimize substrate energy dissipation and to enhance the sense-mode quality factor and rate sensitivity.

12. The gyroscope of claim 11 where the sense-mode mechanism comprises a mechanism arranged and configured to have a dynamic operation of the at least four tines which is balanced in both linear momentum and angular torque to reduce dissipation of energy due to linear and angular substrate vibrations.

13. The gyroscope of claim 11 where the levered drive-mode mechanism comprises a mechanism which is arranged and configured to have a dynamic operation of the at least four tines which is characterized by balanced linear momentum between the at least four tines to reduce dissipation of energy due to substrate vibrations.

14. The gyroscope of claim 13 where the levered drive-mode mechanism is arranged and configured to have a degree of balanced linear momentum between the at least four tines sufficient to result in a drive-mode quality factor equal or greater than 0.5 million in vacuum to reduce electrical power dissipation and electrical noise from a plurality of parasitic feed-through signals.

15. The gyroscope of claim 12 where the sense-mode mechanism is arranged and configured to have a degree of balanced anti-phase sense-mode motion of the at least four tines sufficient to result in a sense-mode quality factor equal or greater than 0.5 million in vacuum and rate sensitivity equal or greater than 0.01 deg/h.

16. The gyroscope of claim 11 where the at least four decoupled vibratory tines are identical and symmetrically oriented relative to each other, each tine comprising an anchored outer frame, a proof mass and two drive-mode shuttles and two sense-mode shuttles resiliently coupled between the proof mass and the frame.

17. The gyroscope of claim 11 where the at least four decoupled vibratory tines each comprise an anchored outer frame, an isotropically suspended proof mass and two drive-mode shuttles and two sense-mode shuttles resiliently coupled between the proof mass and the frame.

18. The gyroscope of claim 11 where the levered drive-mode mechanism comprises at least four anchored pivots and at least four rigid coupling levers pivoted on corresponding ones of the at least four anchored pivots, each of the at least four rigid coupling levers coupled between a different pair of two corresponding adjacent tines of the at least four tines to allow angular displacement of the at least four coupling levers with respect to the corresponding one of the at least four anchored pivots, rigidity of the at least four coupling levers reducing any in-phase motion of the corresponding tines to which they are coupled at any lower-frequency modes of vibration below the predetermined drive frequency, and reducing any shifts in-phase drive-mode motion above the predetermined drive frequency.

19. The gyroscope of claim 11 where the sense-mode mechanism comprises at least four sense-mode coupling flexures coupled between corresponding ones of the at least four tines to allow linear anti-phase sense-mode motion of the at least four tines moving in anti-phase to each other in response to anti-phase Coriolis force.

20. The gyroscope of claim 11 where the gyroscope is operable in a free vibrations regime without a continuous excitation to reduce energy dissipation and simplify a gyroscope control algorithm and to achieve unconstrained rate measurement bandwidth as compared to conventional gyroscopes with forced drive-mode motion or operable as an angle integrating gyroscope to produce a direct measurement of rotation angle in a rate integrating or whole angle mode of operation.

21. A method of operating the gyroscope of claim 1 comprising:

using electrostatic actuation of motion or capacitive detection motion of the tines,

wherein the gyroscope further comprises a frame and a plurality of shuttles, each shuttle having a plurality of capacitive shuttle electrodes forming capacitors together with a plurality of frame electrodes disposed within the frame.

22. A method of operating a vibratory rate z-axis gyroscope characterized by drive-mode and sense-mode quality factors and rate sensitivity comprising:

driving at least two decoupled vibratory tines in anti-phase motion at a predetermined drive frequency;

structurally forcing the at least two decoupled vibratory tines in anti-phase motion by a levered drive-mode mechanism coupled between the tines to eliminate spurious frequency modes and to provide synchronization of drive- and sense-mode motion of the tines; and

sensing dynamically balanced linearly coupled anti-phase sense-mode motion of the tines to minimize substrate energy dissipation and to enhance the sense-mode quality factor and rate sensitivity.

23. The method of claim 22 where the sensing dynamically balanced linearly coupled anti-phase sense-mode motion of the tines comprises balancing both linear momentum and angular torque of the tines against each other to reduce dissipation of energy due to linear and angular substrate vibrations.

24. The method of claim 22 where the driving at least two decoupled vibratory tines in anti-phase motion comprises balancing linear momentum between the two tines against each other to reduce dissipation of energy due to substrate vibrations.

25. The method of claim 22 where the structurally forcing the at least two decoupled vibratory tines in anti-phase motion by a levered drive-mode mechanism comprises reducing any in-phase motion of the tines at any lower-frequency modes of vibration below the predetermined drive frequency, and reducing any shifts in-phase drive-mode motion above the predetermined drive frequency by rigidly coupling together the two tines by a rigid coupling lever, but allowing angular displacement of the rigid coupling lever coupled between the two tines with respect to an anchored pivot.

26. The method of claim 22 where the sensing dynamically balanced linearly coupled anti-phase sense-mode motion of the tines comprises allowing linear anti-phase sense-mode motion of the two tines moving in anti-phase to each other in response to anti-phase Coriolis force by means of sense-mode coupling flexures coupled between the tines.