Multi-layer micro structure for sensing substance
First Claim
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1. A micro structure for sensing a substance using light scattering, comprising:
- a substrate;
a first layer on the substrate, wherein the first layer comprises a metallic material;
a second layer over the first layer;
a mask layer over the second layer, wherein the mask layer comprises a top surface, wherein a plurality of holes are formed through the mask layer and the second layer, wherein the plurality of holes are defined in part by internal surfaces of the second layer and the mask layer, wherein widths of the plurality of holes are in the range of about 1 nm and about 1,000 nm; and
two or more structure layers formed on the top surface of the mask layer and on the internal surfaces of the second layer and the mask layer, wherein the two or more structure layers comprise different material compositions.
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Abstract
A micro structure for sensing a substance using light scattering includes a substrate, a first layer on the substrate, wherein the first layer comprises a metallic material, a second layer over the first layer, and a mask layer over the second layer. A plurality of nano holes are formed through the mask layer and the second layer, wherein the plurality of holes are defined in part by internal surfaces on the second layer and the mask layer. Two or more structure layers are formed on the mask layer and the internal surfaces in the plurality of holes. The two or more structure layers comprise different material compositions.
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Citations
20 Claims
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1. A micro structure for sensing a substance using light scattering, comprising:
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a substrate; a first layer on the substrate, wherein the first layer comprises a metallic material; a second layer over the first layer; a mask layer over the second layer, wherein the mask layer comprises a top surface, wherein a plurality of holes are formed through the mask layer and the second layer, wherein the plurality of holes are defined in part by internal surfaces of the second layer and the mask layer, wherein widths of the plurality of holes are in the range of about 1 nm and about 1,000 nm; and two or more structure layers formed on the top surface of the mask layer and on the internal surfaces of the second layer and the mask layer, wherein the two or more structure layers comprise different material compositions. - View Dependent Claims (2, 3)
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4. A micro structure for sensing a substance using light scattering, comprising:
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a substrate; a first layer on the substrate; a second layer over the first layer; a mask layer over the second layer, wherein the mask layer comprises a top surface, wherein a plurality of holes are formed through the mask layer and the second layer, wherein the plurality of holes are defined in part by internal surfaces of the second layer and the mask layer, wherein widths of the plurality of holes are in the range of about 1 nm and about 1,000 nm; and one or more structure layers formed on the top surface of the mask layer and on the internal surfaces of the second layer and the mask layer, wherein the one or more structure layers comprises at least one of a polymeric material, a metallic material, or an oxide material. - View Dependent Claims (5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A method for making a micro structure for sensing a substance using light scattering, comprising:
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forming a first layer on a substrate; forming a second layer over the first layer; forming a mask layer over the first layer, wherein the mask layer comprises a top surface; forming a plurality of holes in the mask layer and the second layer, wherein the plurality of holes are defined in part by internal surfaces of the second layer and the mask layer, wherein widths of the plurality of holes are in the range of about 1 nm and about 1,000 nm; and after the holes are formed, forming one or more structure layers on the top surface of the mask layer and on the internal surfaces of the second layer and the mask layer. - View Dependent Claims (19, 20)
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Specification