Pellicle frame apparatus, mask, exposing method, exposure apparatus, and device fabricating method

• US 8,323,855 B2
• Filed: 02/29/2008
• Issued: 12/04/2012
• Est. Priority Date: 03/01/2007
• Status: Active Grant

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Yoshimoto, Hiromitsu, Miyakawa, Tomoki
• Primary Examiner(s): Rosasco, Stephen
• Assistant Examiner(s): ALAM, RASHID A
• Application Number:
  US12/073,120
• Publication Number:
  US 20080213679A1
• Time in Patent Office: 1,740 Days
• Field of Search: 430/5, 355/32, 355/50
• US Class Current: 430/5
• CPC Class Codes: G03F 1/64 characterised by the frames, e.g. structure or material, including bonding means therefor

Abstract

A pellicle is provided to one end surface of end surfaces of a frame. Another end surface of the end surfaces of the frame has an area that opposes a substrate. A configuration is adopted that prevents the deformation of the one end surface of the frame and the shape of the opposing area on the other end surface from affecting one another.

Claims

1. A pellicle frame apparatus wherein a pellicle is provided to one end surface of end surfaces of a frame, and an other end surface of the end surfaces of the frame has an opposing area that opposes a substrate, the pellicle frame apparatus comprising:

a configuration that is capable of preventing a deformation of the one end surface of the frame and a shape of the opposing area on the other end surface from affecting one another;

the opposing area comprises;

a first area that is provided with a prescribed value of flexural rigidity with respect to the substrate; and

a second area that is provided with a flexural rigidity with respect to the substrate, the value of which is smaller than that of the first area;

the frame has a plurality of sides on three of which the first area is disposed;

the first area and the second area are provided so as to be in contact with the substrate;

the first area is disposed on a first side, a second side, and a third side, wherein the second side and third side are connected to the first side; and

a slit is formed in the frame at the second area and between the end surface on the one side and the contact part of the substrate.

2. A pellicle frame apparatus according to claim 1, wherein

a second filter member is provided that is permeable and that captures foreign matters, which are about to pass towards an interior of the frame via the slit.

3. A pellicle frame apparatus according to claim 2, wherein

the second filter member is a porous member that is disposed in the slit.

4. A pellicle frame apparatus according to claim 2, wherein

the second filter member is a sheet shaped cover member that covers the slit.

5. A pellicle frame apparatus according to claim 4, wherein

the second filter member is provided in a second recess, which is provided on the frame along the slit.

6. A pellicle frame apparatus wherein a pellicle is provided to one end surface of end surfaces of a frame, and another end surface of the end surfaces of the frame has an opposing area that opposes a substrate, the pellicle frame apparatus comprising:

a configuration that is capable of preventing a deformation of the one end surface of the frame and the shape of the opposing area on the other end surface from affecting one another;

the frame is formed substantially as a rectangle;

the frame has a plurality of sides on three of which a first area with a prescribed value of flexural rigidity with respect to the substrate is disposed;

the frame has a second area with a prescribed value of flexural rigidity with respect to the substrate smaller than the prescribed value of flexural rigidity of the first area with respect to the substrate; and

the first area is disposed on a first side, a second side, and a third side, wherein the second side and the third side are connected to the first side.

7. A pellicle frame apparatus according to claim 6, wherein

a filter member is provided that is permeable and that captures foreign matters, which are about to pass towards an interior of the frame via a gap between the second area and the substrate.

8. A pellicle frame apparatus according to claim 7, wherein

the filter member is a porous member that is disposed in the gap.

9. A pellicle frame apparatus according to claim 7, wherein

the filter member is a sheet shaped cover member that covers the gap.

10. A pellicle frame apparatus according to claim 9, wherein

the filter member is provided in a recess, which is provided on the frame along the gap.

11. A mask wherein a pattern is formed on a substrate, comprising:

a pellicle frame apparatus according to claim 6 provided to the substrate.

12. An exposing method, comprising:

holding a mask according to claim 11 to a mask stage; and

exposing a photosensitive substrate with the pattern of the mask.

13. An exposing method according to claim 12, wherein

the exposure of the photosensitive substrate comprising synchronously moving the mask and the photosensitive substrate, and

the first area has a plurality of areas that are disposed so that the areas have line symmetry with respect to an axis that is parallel to the synchronous movement direction.

14. A device fabricating method that has an exposure process, wherein

an exposing method according to claim 12 is used when performing the exposure process.

15. An exposure apparatus that exposes a substrate with a pattern that is formed on a mask, comprising:

a holding apparatus that holds a mask according to claim 11, the holding apparatus having a holding member that is capable of being transformed so as to conform with the shape of a held surface of the mask.

16. A pellicle frame apparatus for use with a pellicle, the pellicle frame apparatus comprising:

a plurality of sides;

a substrate on one side of the plurality of sides;

a first area with a prescribed value of flexural rigidity with respect to the substrate;

a second area with a prescribed value of flexural rigidity that is smaller than the prescribed value of flexural rigidity of first area with respect to the substrate;

three of the plurality of sides having a first area, respectively;

the first area of the three of the plurality of sides makes contact with and is fixed to the substrate;

the first area is disposed on a first side, a second side, and a third side, wherein the second side and the third side are connected to the first side; and

the first area of three of the plurality of sides forms vertices of a substantially isosceles triangle.

17. A pellicle frame that is fixed to a mask and is used in an exposure apparatus to protect a pattern formed on the mask, the pellicle frame comprising:

a pellicle that faces the pattern; and

a frame member that is formed in a rectangular shape having four sides, the four sides supporting the pellicle, wherein

the frame member has a continuous surface with a first end that is furthest from the mask when the pellicle frame is fixed to the mask and a second end that is closest to the mask when the pellicle frame is fixed to the mask,

the frame member has three fixed portions that are fixed to the mask and has non-fixed portions that are between the fixed portions,

the three fixed portions are respectively provided at three different sides among the four sides, and

a distance between the first end and the second end of the surface is greater at the fixed portions than at the non-fixed portions so that the fixed portions extend toward the mask beyond the non-fixed portions.

18. The pellicle frame according to Claim 17, wherein the frame member further has an opposing surface that opposes the mask via a gap in a state where the fixed portions and the mask are fixed.

19. A mask comprising:

a substrate on which the pattern is formed; and

the pellicle frame according to claim 18, the pellicle frame being fixed to the substrate.

20. The mask according to claim 19, further comprising:

a filter member that captures foreign matter which is about to pass towards an interior of the frame via the gap.

21. An exposure method comprising:

transferring the mask according to claim 19 to a mask stage; and

exposing a photosensitive substrate with the pattern.

22. A device fabricating method comprising an exposure process that includes the exposure method according to claim 21.

23. A pellicle frame that is fixed to a mask and is used in an exposure apparatus to protect a pattern formed on the mask, the pellicle frame comprising:

a pellicle that faces the pattern; and

a frame member that comprises;

a first part having a frame shape and having a first surface that is fixed to the mask; and

a second part having a frame shape and having a second surface to which the pellicle is fixed, the first part and the second part being connected to each other at three different points, wherein

each of the first and second parts has a side surface that extends from a first end that is closest to the first surface to a second end that is closest to the second surface, and

the side surfaces of the first and second parts jointly form a groove that extends continuously around the frame member.

24. The pellicle frame according to claim 23, wherein the first part and the second part are each formed in a rectangular shape having four sides, and the first part and the second part are connected to each other at the three different points, the three different points being provided respectively at three different sides among the four sides.

25. The pellicle frame according to claim 23, wherein the frame member further comprises slits disposed between the first part and the second part, each slit extending along a circumferential direction of the frame member.

26. The pellicle frame according to claim 25, further comprising:

a filter member that captures foreign matter which is about to pass towards an interior of the frame member via the slit.

27. The pellicle frame according to claim 26, wherein the filter member comprises a porous member that is disposed at the slit.

28. The pellicle frame according to claim 26, wherein the filter member comprises a cover member that covers the slit.

29. A mask comprising:

a substrate on which the pattern is formed; and

the pellicle frame according to claim 23, the pellicle frame being fixed to the substrate.

30. An exposure method comprising:

transferring the mask according to claim 29 to a mask stage; and

exposing a photosensitive substrate with the pattern.

31. A device fabricating method comprising an exposure process that includes the exposure method according to claim 30.