MEMS switch with latch mechanism

• US 8,324,519 B2
• Filed: 06/07/2010
• Issued: 12/04/2012
• Est. Priority Date: 06/05/2009
• Status: Expired due to Fees

• Current Assignee: Microstar Technologies, LLC, Oakland University
• Original Assignee: Microstar Technologies, LLC, Oakland University
• Inventors: Slicker, James Melvin, Qu, Hongwei
• Primary Examiner(s): Leon, Edwin A.
• Application Number:
  US13/375,406
• Publication Number:
  US 20120067709A1
• Time in Patent Office: 911 Days
• Field of Search: 200/318, 200/181, 200 6145 R- 6153, 335/78
• US Class Current: 200/318
• CPC Class Codes: G02B 26/0866 the reflecting means being moved or deformed by thermal means
• CPC Class Codes: H01H 1/0036 Switches making use of microelectromechanical systems [MEMS] for electromagnetic relays H01H50/005; for electrostatic relays H01H59/0009
• CPC Class Codes: H01H 1/50 Means for increasing contact pressure, preventing vibration of contacts, holding contacts together after engagement, or biasing contacts to the open position
• CPC Class Codes: H01H 2001/0047 operable only by mechanical latching
• CPC Class Codes: H01H 2001/0078 with parallel movement of the movable contact relative to the substrate
• CPC Class Codes: H01H 2061/006 Micromechanical thermal relay

Abstract

A MEMS switch includes a latch mechanism, first and second electrical conductors, a first latch actuator, a second latch actuator, and an axial actuator. The latch mechanism may include a transfer rod and a contact member, the contact member extending radially outwardly from a position along the axial length of the transfer rod. The first and second electrical conductors may extend along, and may be radially offset from, a portion of the transfer rod. The first latch actuator may include a first latch pin, and the second latch actuator may include a second latch pin, the first and second latch actuators being configured to move toward and away from the transfer rod, and the first and second latch pins configured to engage the contact member. The at least one axial actuator may be configured to move the contact member towards and away from the first and second electrical conductors.

Claims

1. A MEMS switch comprising:

a latch mechanism including a transfer rod and a contact member, the contact member extending radially outwardly from a position along the axial length of the transfer rod;

first and second electrical conductors, the first and second electrical conductors extending along, and radially offset from, a portion of the transfer rod;

a first latch actuator including a first latch pin, and a second latch actuator including a second latch pin, the first and second latch actuators configured to move toward and away from the transfer rod, and the first and second latch pins configured to engage the contact member;

at least one axial actuator, the at least one axial actuator configured to move the contact member towards and away from the first and second electrical conductors.

2. The switch of claim 1, including at least one spring configured to move the transfer rod.

3. The switch of claim 1, including a first spring configured to move the transfer rod in a first direction, and a second spring configured to move the transfer rod in a second direction that substantially opposes the first direction.

4. The switch of claim 1, including an amplification link connected to the at least one axial actuator.

5. The switch of claim 4, wherein the amplification link is connected to a pair of axial actuators, the axial actuators configured to move in opposite directions.

6. The switch of claim 4, wherein the amplification link is in operative connection with two pairs of axial actuators, and wherein the relative spacing of each of the axial actuators of each pair of axial actuators along the length of the amplification link is configured to provide a leveraged amplification of the displacement of a distal end of the amplification link.

7. The switch of claim 1, wherein the at least one axial actuator includes two hot beams.

8. The switch of claim 7, wherein the two hot beams are attached or connected at or about their respective centers, and the two hot beams are attached to a joint link pin that is connected to a central base that is attached to a cold beam.

9. The switch of claim 4, including a plane spring, the plane spring configured to hold the transfer rod and the amplification link in-plane relative to each other.

10. The switch of claim 1, wherein, in a latched and open position, the contact member is connected to or interconnected with the first latch pin and the second latch pin, and the contact member is separated from the first and second electrical conductors.

11. The switch of claim 1, wherein, when an electrical current is applied to the first and second latch actuators, the first and second latch pins move away from the contact member, permitting the contact member to move towards the first and second electrical conductors.

12. The switch of claim 1, wherein, in a closed and unlatched position, the contact member is in contact with the first and second electrical conductors, and the contact member is separated from the first latch pin and the second latch pin.

13. The switch of claim 1, wherein, in a closed and latched position, the contact member is in contact with the first and second electrical conductors, and the contact member is connected to or interconnected with the first latch pin and the second latch pin.

14. The switch of claim 1, including one or more contactors attached or connected to the contact member.

15. The switch of claim 1, wherein the at least one axial actuator comprises a V-shaped actuator defined by two actuators that function as a pair.

16. The switch of claim 15, wherein one of the pair of actuators defining the V-shaped actuator includes a narrow beam and the other actuator includes a comparatively thicker beam.