Method for adjusting resonance frequencies of a vibrating microelectromechanical device

• US 8,327,684 B2
• Filed: 10/21/2008
• Issued: 12/11/2012
• Est. Priority Date: 10/21/2008
• Status: Active Grant

• Current Assignee: Teledyne Scientific & Imaging, LLC (Teledyne Technologies Incorporated)
• Original Assignee: Teledyne Scientific & Imaging, LLC (Teledyne Technologies Incorporated)
• Inventors: DeNatale, Jeffrey F., Stupar, Philip A.
• Primary Examiner(s): LARKIN, DANIEL SEAN
• Application Number:
  US12/255,576
• Publication Number:
  US 20100095739A1
• Time in Patent Office: 1,512 Days
• Field of Search: 73/13.7, 73/17.7, 735/041.2
• US Class Current: 73/1.37
• CPC Class Codes: G01C 19/56 Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
• CPC Class Codes: Y10T 29/42 Piezoelectric device making

Abstract

The present invention relates to a method for adjusting the resonant frequencies of a vibrating microelectromechanical (MEMS) device. In one embodiment, the present invention is a method for adjusting the resonant frequencies of a vibrating mass including the steps of patterning a surface of a device layer of the vibrating mass with a mask, etching the vibrating mass to define a structure of the vibrating mass, determining a first set of resonant frequencies of the vibrating mass, determining a mass removal amount of the vibrating mass and a mass removal location of the vibrating mass to obtain a second set of resonant frequencies of the vibrating mass, removing the mask at the mass removal location, and etching the vibrating mass to remove the mass removal amount of the vibrating mass at the mass removal location of the vibrating mass.

Claims

1. A method for adjusting the resonant frequencies of a vibrating mass comprising the steps of:

patterning a surface of a device layer of the vibrating mass with a mask;

etching the vibrating mass to define a structure of the vibrating mass;

determining a first set of resonant frequencies of the vibrating mass;

determining a mass removal amount of the vibrating mass and a mass removal location of the vibrating mass to obtain a second set of resonant frequencies of the vibrating mass;

removing a portion of the mask only at the mass removal location, wherein removing the portion of the mask only at the mass removal location is performed using laser ablation; and

etching the vibrating mass through the removed portion of the mask to remove the mass removal amount of the vibrating mass at the mass removal location of the vibrating mass.

2. The method of claim 1 further comprising the step of patterning the surface of the vibrating mass with the mask includes patterning the mask with open areas located where the vibrating mass should be etched.

3. The method of claim 1 wherein the mask is photoresist.

4. The method of claim 1 wherein the mask is selected from the group consisting of oxides, nitrides, and metals.

5. The method of claim 1 wherein etching the vibrating mass to define the structure is performed using deep reactive ion etching.

6. The method of claim 1 wherein etching the vibrating mass at the mass removal location is performed using deep reactive ion etching.

7. The method of claim 1 wherein determining the mass removal amount and the mass removal location of the vibrating mass is done with the mask on the vibrating mass.

8. The method of claim 1 wherein removing the portion of the mask only at the mass removal location is performed using laser ablation with an energy sufficient to remove the masking material without damaging the device layer of the vibrating mass below the mask.

9. The method of claim 1 wherein determining the mass removal amount and the mass removal location of the vibrating mass determines the mass removal amount at the mass removal location to alter the resonant frequencies of the vibrating mass from a first value of resonant frequencies to a second value of resonant frequencies.

10. The method of claim 1 wherein the vibrating mass is a MEMS resonator.

11. The method of claim 1 wherein the vibrating mass is a silicon MEMS resonator.

12. The method of claim 1 wherein the vibrating mass is a resonant gyroscope.

13. The method of claim 1 wherein the device layer is formed from Si.

14. The method of claim 1 wherein the device layer is formed from quartz.