Probe tip

• US 8,327,727 B2
• Filed: 08/25/2009
• Issued: 12/11/2012
• Est. Priority Date: 08/26/2008
• Status: Active Grant

• Current Assignee: Lake Shore Cryotronics, Inc., Toyo Corporation
• Original Assignee: Lake Shore Cryotronics, Inc.
• Inventors: Caudill, Jason C., Maloof, Edward C., Yamaguchi, Masaki, Mizuta, Shin
• Primary Examiner(s): NOLAND, THOMAS
• Application Number:
  US12/546,777
• Publication Number:
  US 20100064784A1
• Time in Patent Office: 1,204 Days
• Field of Search: 738/665, 7386424-86425, 324/750.03, 324/750.14, 324/750.16, 324/750.22, 324/750.25, 324/754.03, 32475411-75414, 324/755.01, 32475503-75505, 324/762.01, 324/762.05, 324/FOR.108, 324/FOR.115
• US Class Current: 73/866.5
• CPC Class Codes: G01R 1/06716 Elastic
• CPC Class Codes: G01R 1/06755 Material aspects
• CPC Class Codes: G01R 31/2863 Contacting devices, e.g. sockets, burn-in boards or mounting fixtures in general G01R1/04

Abstract

To eliminate or otherwise reduce unintended movement of a probe tip of a probe assembly being held by a probe arm, the probe assembly includes one or more resilient members that compensate for the contraction or expansion of the probe arm in accordance with the coefficient of thermal expansion of the material from which the probe arm is made. Thus, the probe tip can remain in contact with a sample being measured at the desired location on the sample, during an automated full or wide scale temperature range sweep.

Claims

1. A probe assembly for use in a probe station having a chamber for receiving a sample to be measured, the probe assembly comprising:

a probe body;

a probe tip; and

a resilient member connected to the probe body,

wherein the probe body is supported in the chamber by a probe arm having a longitudinal axis,

wherein the probe tip is connected to the resilient member,

wherein the probe tip is configured to contact a sample in the chamber at a location to be measured,

wherein the longitudinal axis of the probe arm is parallel to the sample; and

wherein the resilient member decouples the probe tip from the probe body such that the probe tip resists movement from said location on the sample during movement of the probe body in a direction substantially parallel to said longitudinal axis of the probe arm, said movement of the probe body resulting from contraction or expansion of the probe arm due to a temperature change in the chamber.

2. The probe assembly of claim 1, wherein the probe tip maintains continuous contact with the sample at said location across a range of temperatures of 1.5 K to 475 K.

3. The probe assembly of claim 1, wherein the probe tip maintains continuous contact with the sample at said location across a range of temperatures of between 1.5 K to 475 K.

4. The probe assembly of claim 1, wherein the probe tip maintains continuous contact with the sample at said location across a range of temperatures, a size of the range of temperatures being greater than 10 K.

5. The probe assembly of claim 1, wherein said movement of the probe body results from external vibrations.

6. The probe assembly of claim 1, wherein the resilient member limits movement of the probe tip from said location on the sample to less than 5 μ

m.

7. The probe assembly of claim 1, wherein the resilient member includes a vertical member substantially perpendicular to the probe arm.

8. The probe assembly of claim 7, wherein a length of the vertical member is between 5 and 50 mm.

9. The probe assembly of claim 7, wherein the vertical member is one of a vertical bar, a leaf spring, and a double leaf spring.

10. The probe assembly of claim 7, wherein the resilient member further includes a horizontal member substantially parallel to the probe arm, and

wherein the vertical member and the horizontal member are connected.

11. The probe assembly of claim 10, wherein the vertical member and the horizontal member are substantially perpendicular to one another.

12. The probe assembly of claim 10, wherein a length of the horizontal member is between 2 and 50 mm.

13. The probe assembly of claim 10, wherein a length of the vertical member is greater than a length of the horizontal member.

14. The probe assembly of claim 10, wherein the horizontal member is one of a horizontal bar and an angled horizontal bar.

15. The probe assembly of claim 10, wherein the probe tip is integrated with one of the vertical member and the horizontal member.

16. A probe station comprising:

a chamber for receiving a sample to be measured;

a probe arm; and

a probe assembly,

wherein the probe arm has a longitudinal axis and supports the probe assembly within the chamber,

wherein the probe assembly includes a probe body, a probe tip, and a resilient member,

wherein the resilient member is connected to the probe body,

wherein the probe tip is connected to the resilient member,

wherein the probe tip is configured to contact a sample in the chamber at a location to be measured,

wherein the longitudinal axis of the probe arm is parallel to the sample; and

wherein the resilient member decouples the probe tip from the probe body such that the probe tip resists movement from said location on the sample during movement of the probe body in a direction substantially parallel to said longitudinal axis of the probe arm, said movement of the probe body resulting from contraction or expansion of the probe arm due to a temperature change in the chamber.

17. The probe station of claim 16, wherein the probe tip maintains continuous contact with the sample at said location across a range of temperatures of 1.5 K to 475 K.

18. The probe station of claim 16, wherein said movement of the probe body results from external vibrations.

19. The probe station of claim 16, wherein the resilient member limits movement of the probe tip from said location on the sample to less than 5 μ

m.

20. The probe station of claim 16, wherein the resilient member includes a vertical member substantially perpendicular to the probe arm, and

wherein the vertical member is one of a vertical bar, a leaf spring, and a double leaf spring.

21. The probe station of claim 20, wherein a length of the vertical member is between 5 and 50 mm.

22. The probe station of claim 20, wherein the resilient member further includes a horizontal member substantially parallel to the probe arm,

wherein the horizontal member is one of a horizontal bar and an angled horizontal bar, and

wherein the vertical member and the horizontal member are connected.

23. The probe station of claim 22, wherein a length of the horizontal member is between 2 and 50 mm.

24. The probe station of claim 22, wherein a length of the vertical member is greater than a length of the horizontal member.

25. The probe station of claim 22, wherein the probe tip is integrated with one of the vertical member and the horizontal member.

26. The probe station of claim 16, wherein the probe assembly is detachably connected to the probe arm.

27. The probe station of claim 16, wherein the probe station includes a plurality of probe arms and a corresponding plurality of probe assemblies.

28. The probe station of claim 16, wherein the probe station is operable to form a vacuum in the chamber.

29. The probe station of claim 16, wherein the chamber includes a viewport configured to allow for external inspection of the sample within the chamber.