Method of making a semiconductor chip assembly with a post/base heat spreader with an ESD protection layer
First Claim
1. A method of making a semiconductor chip assembly, comprising:
- providing a post, a base, an ESD protection layer, a metal layer, an adhesive and a conductive layer, whereinthe post is adjacent to the base, extends above the base in an upward direction, extends into an opening in the adhesive and is aligned with an aperture in the conductive layer,the base extends below the post in a downward direction opposite the upward direction and extends laterally from the post in lateral directions orthogonal to the upward and downward directions,the ESD protection layer is a thermally conductive, electrically insulative material that contacts and is sandwiched between the base and the metal layer, extends below the base and extends laterally beyond the post,the metal layer extends below the ESD protection layer and extends laterally beyond the post,the adhesive is mounted on and extends above the base, is sandwichedbetween the base and the conductive layer and is non-solidified, and the conductive layer is mounted on and extends above the adhesive;
thenflowing the adhesive into and upward in a gap located in the aperture between the post and the conductive layer;
solidifying the adhesive;
thenproviding a conductive trace that includes a pad, a terminal and a selected portion of the conductive layer,wherein providing the pad includes;
grinding the post, the adhesive and the conductive layer such that the post, the adhesive and the conductive layer are laterally aligned with one another at a top lateral surface that faces in the upward direction; and
thenremoving selected portions of the conductive layer using an etch mask that defines the pad;
providing a heat spreader that includes the post, the base, the ESD protection layer and an underlayer that includes at least a portion of the metal layer;
thenmounting a semiconductor device on the post, wherein the semiconductor device overlaps the post, the base, the ESD protection layer and the underlayer, the semiconductor device, the post and the base are electrically isolated from the underlayer and the underlayer covers the post in the downward direction;
electrically connecting the semiconductor device to the pad, thereby electrically connecting the semiconductor device to the terminal; and
thermally connecting the semiconductor device to the post, thereby thermally connecting the semiconductor device to the underlayer.
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Accused Products
Abstract
A method of making a semiconductor chip assembly includes providing a post, a base, an ESD protection layer and a metal layer, wherein the post extends above the base and the ESD protection layer is sandwiched between the base and the metal layer, mounting an adhesive on the base including inserting the post into an opening in the adhesive, mounting a conductive layer on the adhesive including aligning the post with an aperture in the conductive layer, then flowing the adhesive upward between the post and the conductive layer, solidifying the adhesive, then providing a conductive trace that includes a pad, a terminal and a selected portion of the conductive layer, providing a heat spreader that includes the post, the base, the ESD protection layer and an underlayer that includes at least a portion of the metal layer, then mounting a semiconductor device on the post, electrically connecting the semiconductor device to the conductive trace and thermally connecting the semiconductor device to the heat spreader.
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Citations
51 Claims
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1. A method of making a semiconductor chip assembly, comprising:
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providing a post, a base, an ESD protection layer, a metal layer, an adhesive and a conductive layer, wherein the post is adjacent to the base, extends above the base in an upward direction, extends into an opening in the adhesive and is aligned with an aperture in the conductive layer, the base extends below the post in a downward direction opposite the upward direction and extends laterally from the post in lateral directions orthogonal to the upward and downward directions, the ESD protection layer is a thermally conductive, electrically insulative material that contacts and is sandwiched between the base and the metal layer, extends below the base and extends laterally beyond the post, the metal layer extends below the ESD protection layer and extends laterally beyond the post, the adhesive is mounted on and extends above the base, is sandwiched between the base and the conductive layer and is non-solidified, and the conductive layer is mounted on and extends above the adhesive;
thenflowing the adhesive into and upward in a gap located in the aperture between the post and the conductive layer; solidifying the adhesive;
thenproviding a conductive trace that includes a pad, a terminal and a selected portion of the conductive layer, wherein providing the pad includes; grinding the post, the adhesive and the conductive layer such that the post, the adhesive and the conductive layer are laterally aligned with one another at a top lateral surface that faces in the upward direction; and
thenremoving selected portions of the conductive layer using an etch mask that defines the pad; providing a heat spreader that includes the post, the base, the ESD protection layer and an underlayer that includes at least a portion of the metal layer;
thenmounting a semiconductor device on the post, wherein the semiconductor device overlaps the post, the base, the ESD protection layer and the underlayer, the semiconductor device, the post and the base are electrically isolated from the underlayer and the underlayer covers the post in the downward direction; electrically connecting the semiconductor device to the pad, thereby electrically connecting the semiconductor device to the terminal; and thermally connecting the semiconductor device to the post, thereby thermally connecting the semiconductor device to the underlayer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A method of making a semiconductor chip assembly, comprising:
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providing a post, a base, an ESD protection layer and a metal layer, wherein the post is adjacent to and integral with the base and extends above the base in an upward direction, the base extends below the post in a downward direction opposite the upward direction and extends laterally from the post in lateral directions orthogonal to the upward and downward directions, the ESD protection layer is a thermally conductive, electrically insulative material that contacts and is sandwiched between the base and the metal layer, extends below the base and extends laterally beyond the post and the metal layer extends below the ESD protection layer and extends laterally beyond the post; providing an adhesive, wherein an opening extends through the adhesive; providing a conductive layer, wherein an aperture extends through the conductive layer; mounting the adhesive on the base, including inserting the post into the opening, wherein the adhesive extends above the base and the post extends into the opening; mounting the conductive layer on the adhesive, including aligning the post with the aperture, wherein the conductive layer extends above the adhesive and the adhesive is sandwiched between the base and the conductive layer and is non-solidified;
thenapplying heat to melt the adhesive; moving the base and the conductive layer towards one another, thereby moving the post upward in the aperture and applying pressure to the molten adhesive between the base and the conductive layer, wherein the pressure forces the molten adhesive to flow into and upward in a gap located in the aperture between the post and the conductive layer; applying heat to solidify the molten adhesive, thereby mechanically attaching the post and the base to the conductive layer;
thenproviding a conductive trace that includes a pad, a terminal and a selected portion of the conductive layer, wherein providing the pad includes; grinding the post, the adhesive and the conductive layer such that the post, the adhesive and the conductive layer are laterally aligned with one another at a top lateral surface that faces in the upward direction; and
thenremoving selected portions of the conductive layer using an etch mask that defines the pad; providing a heat spreader that includes the post, the base, the ESD protection layer and an underlayer that includes at least a portion of the metal layer;
thenmounting a semiconductor device on the post, wherein the semiconductor device overlaps the post, the base, the ESD protection layer and the underlayer, the semiconductor device, the post and the base are electrically isolated from the underlayer and the underlayer covers the post in the downward direction; electrically connecting the semiconductor device to the pad, thereby electrically connecting the semiconductor device to the terminal; and thermally connecting the semiconductor device to the post, thereby thermally connecting the semiconductor device to the underlayer. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28)
semiconductor device and the pad, and thermally connecting the semiconductor device includes providing the die attach between the semiconductor device and the post.
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29. A method of making a semiconductor chip assembly, compromising:
providing a post, a base, an ESD protection layer, a metal layer, an adhesive and a substrate, wherein the post is adjacent to the base, extends above the base in an upward direction, extends into an opening in the adhesive and is aligned with an aperture in the substrate, the base extends below the post in a downward direction opposite the upward direction and extends laterally from the post in lateral directions orthogonal to the upward and downward directions, the ESD protection layer is a thermally conductive, electrically insulative material that contacts and is sandwiched between the base and the metal layer, extends below the base and extends laterally beyond the post, the metal layer extends below the ESD protection layer and extends laterally beyond the post, the adhesive is mounted on and extends above the base, is sandwiched between the base and the substrate and is non-solidified, and the substrate is mounted on and extends above the adhesive, wherein the substrate includes a conductive layer and a dielectric layer and the conductive layer extends above the dielectric layer;
thenflowing the adhesive into and upward in a gap located in the aperture between the post and the substrate; solidifying the adhesive;
thenproviding a plated through-hole that extends through the base, the adhesive, the dielectric layer and the ESD protection layer and is spaced from the base;
thenproviding a conductive trace that includes a pad, a terminal and the plated through-hole, wherein the pad includes a selected portion of the conductive layer, the terminal includes a selected portion of the metal layer and an electrically conductive path between the pad and the terminal includes the plated through-hole; providing a heat spreader that includes the post, the base, the ESD protection layer, a cap that includes a selected portion of the conductive layer and an underlayer that includes a selected portion of the metal layer, wherein the cap extends above and is adjacent to and covers in the upward direction and extends laterally from a top of the post and overlaps and is adjacent to the adhesive;
thenmounting a semiconductor device on the cap, wherein the semiconductor device overlaps the post, the base, the cap, the ESD protection layer and the underlayer, the semiconductor device, the post, the base and the cap are electrically isolated from the underlayer and the underlayer covers the post in the downward direction; electrically connecting the semiconductor device to the pad, thereby electrically connecting the semiconductor device to the terminal; and thermally connecting the semiconductor device to the cap, thereby thermally connecting the semiconductor device to the underlayer. - View Dependent Claims (30, 31, 32, 33, 34, 35, 36, 37, 38)
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39. A method of making a semiconductor chip assembly, comprising:
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providing a post, and a base, an ESD protection layer and a metal layer, wherein the post is adjacent to and integral with the base and extends above the base in an upward direction, and the base extends below the post in a downward direction opposite the upward direction and extends laterally from the post in lateral directions orthogonal to the upward and downward directions, the ESD protection layer is a thermally conductive, electrically insulative material that contacts and is sandwiched between the base and the metal layer, extends below the base and extends laterally beyond the post and the metal layer extends below the ESD protection layer and extends laterally beyond the post; providing an adhesive, wherein an opening extends through the adhesive; providing a substrate that includes a conductive layer and a dielectric layer, wherein an aperture extends through the substrate; mounting the adhesive on the base, including inserting the post through the opening, wherein the adhesive extends above the base and the post extends through the opening; mounting the substrate on the adhesive, including inserting the post into the aperture, wherein the substrate extends above the adhesive, the conductive layer extends above the dielectric layer, the post extends through the opening into the aperture and the adhesive is sandwiched between the base and the substrate and is non-solidified;
thenapplying heat to melt the adhesive; moving the base and the substrate towards one another, thereby moving the post upward in the aperture and applying pressure to the molten adhesive between the base and the substrate, wherein the pressure forces the molten adhesive to flow into and upward in a gap located in the aperture between the post and the substrate; applying heat to solidify the molten adhesive, thereby mechanically attaching the post and the base to the substrate;
thenproviding a plated through-hole that extends through the base, the adhesive, the dielectric layer and the ESD protection layer and is spaced from the base;
thenproviding a conductive trace that includes a pad, a terminal and the plated through-hole, wherein the pad includes a selected portion of the conductive layer, the terminal includes a selected portion of the metal layer and an electrically conductive path between the pad and the terminal includes the plated through-hole; providing a heat spreader that includes the post, the base, the ESD protection layer, a cap and an underlayer, wherein the cap extends above and is adjacent to and covers in the upward direction and extends laterally from a top of the post and overlaps and is adjacent to the adhesive and includes a selected portion of the conductive layer and the underlayer includes a selected portion of the metal layer;
thenmounting a semiconductor device on the cap, wherein the semiconductor device overlaps the post, the base, the cap, the ESD protection layer and the underlayer, the semiconductor device, the post, the base and the cap are electrically isolated from the underlayer and the underlayer covers the post in the downward direction; electrically connecting the semiconductor device to the pad, thereby electrically connecting the semiconductor device to the terminal; and thermally connecting the semiconductor device to the cap, thereby thermally connecting the semiconductor device to the underlayer. - View Dependent Claims (40, 41, 42, 43)
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44. A method of making a semiconductor chip assembly, comprising:
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providing a post, a base, an ESD protection layer, a metal layer, an adhesive and a conductive layer, wherein the post is adjacent to the base, extends above the base in an upward direction, extends into an opening in the adhesive and is aligned with an aperture in the conductive layer, the base extends below the post in a downward direction opposite the upward direction and extends laterally from the post in lateral directions orthogonal to the upward and downward directions, the ESD protection layer is a thermally conductive, electrically insulative material that contacts and is sandwiched between the base and the metal layer, extends below the base and extends laterally beyond the post, the metal layer extends below the ESD protection layer and extends laterally beyond the post, the adhesive is mounted on and extends above the base, is sandwiched between the base and the conductive layer and is non-solidified, and the conductive layer is mounted on and extends above the adhesive;
thenflowing the adhesive into and upward in a gap located in the aperture between the post and the conductive layer; solidifying the adhesive;
thenproviding a conductive trace that includes a pad, a terminal and a selected portion of the conductive layer, wherein providing the terminal includes removing selected portions of the metal layer after solidifying the adhesive; providing a heat spreader that includes the post, the base, the ESD protection layer and an underlayer that includes at least a portion of the metal layer;
thenmounting a semiconductor device on the post, wherein the semiconductor device overlaps the post, the base, the ESD protection layer and the underlayer, the semiconductor device, the post and the base are electrically isolated from the underlayer and the underlayer covers the post in the downward direction; electrically connecting the semiconductor device to the pad, thereby electrically connecting the semiconductor device to the terminal; and thermally connecting the semiconductor device to the post, thereby thermally connecting the semiconductor device to the underlayer.
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45. A method of making a semiconductor chip assembly, comprising:
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providing a post, a base, an ESD protection layer, a metal layer, an adhesive and a conductive layer, wherein the post is adjacent to the base, extends above the base in an upward direction, extends into an opening in the adhesive and is aligned with an aperture in the conductive layer, the base extends below the post in a downward direction opposite the upward direction and extends laterally from the post in lateral directions orthogonal to the upward and downward directions, the ESD protection layer is a thermally conductive, electrically insulative material that contacts and is sandwiched between the base and the metal layer, extends below the base and extends laterally beyond the post, the metal layer extends below the ESD protection layer and extends laterally beyond the post, the adhesive is mounted on and extends above the base, is sandwiched between the base and the conductive layer and is non-solidified, and the conductive layer is mounted on and extends above the adhesive;
thenflowing the adhesive into and upward in a gap located in the aperture between the post and the conductive layer; solidifying the adhesive;
thenproviding a conductive trace that includes a pad, a terminal and a selected portion of the conductive layer, wherein providing the conductive trace includes providing a plated through-hole after solidifying the adhesive; providing a heat spreader that includes the post, the base, the ESD protection layer and an underlayer that includes at least a portion of the metal layer;
thenmounting a semiconductor device on the post, wherein the semiconductor device overlaps the post, the base, the ESD protection layer and the underlayer, the semiconductor device, the post and the base are electrically isolated from the underlayer and the underlayer covers the post in the downward direction; electrically connecting the semiconductor device to the pad, thereby electrically connecting the semiconductor device to the terminal; and thermally connecting the semiconductor device to the post, thereby thermally connecting the semiconductor device to the underlayer.
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46. A method of making a semiconductor chip assembly, comprising:
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providing a post, a base, an ESD protection layer, a metal layer, an adhesive and a conductive layer, wherein the post is adjacent to the base, extends above the base in an upward direction, extends into an opening in the adhesive and is aligned with an aperture in the conductive layer, the base extends below the post in a downward direction opposite the upward direction and extends laterally from the post in lateral directions orthogonal to the upward and downward directions, the ESD protection layer is a thermally conductive, electrically insulative material that contacts and is sandwiched between the base and the metal layer, extends below the base and extends laterally beyond the post, the metal layer extends below the ESD protection layer and extends laterally beyond the post, the adhesive is mounted on and extends above the base, is sandwiched between the base and the conductive layer and is non-solidified, and the conductive layer is mounted on and extends above the adhesive;
thenflowing the adhesive into and upward in a gap located in the aperture between the post and the conductive layer; solidifying the adhesive;
thenproviding a conductive trace that includes a pad, a terminal and a selected portion of the conductive layer; providing a heat spreader that includes the post, the base, the ESD protection layer and an underlayer that includes at least a portion of the metal layer, wherein providing the underlayer includes removing selected portions of the metal layer after solidifying the adhesive;
thenmounting a semiconductor device on the post, wherein the semiconductor device overlaps the post, the base, the ESD protection layer and the underlayer, the semiconductor device, the post and the base are electrically isolated from the underlayer and the underlayer covers the post in the downward direction; electrically connecting the semiconductor device to the pad, thereby electrically connecting the semiconductor device to the terminal; and thermally connecting the semiconductor device to the post, thereby thermally connecting the semiconductor device to the underlayer.
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47. A method of making a semiconductor chip assembly, comprising:
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providing a post, a base, an ESD protection layer, a metal layer, an adhesive and a conductive layer, wherein the post is adjacent to the base, extends above the base in an upward direction, extends into an opening in the adhesive and is aligned with an aperture in the conductive layer, the base extends below the post in a downward direction opposite the upward direction and extends laterally from the post in lateral directions orthogonal to the upward and downward directions, the ESD protection layer is a thermally conductive, electrically insulative material that contacts and is sandwiched between the base and the metal layer, extends below the base and extends laterally beyond the post, the metal layer extends below the ESD protection layer and extends laterally beyond the post, the adhesive is mounted on and extends above the base, is sandwiched between the base and the conductive layer and is non-solidified, and the conductive layer is mounted on and extends above the adhesive;
thenflowing the adhesive into and upward in a gap located in the aperture between the post and the conductive layer; solidifying the adhesive;
thenproviding a conductive trace that includes a pad, a terminal and a selected portion of the conductive layer; providing a heat spreader that includes the post, the base, the ESD protection layer and an underlayer that includes at least a portion of the metal layer, wherein providing the conductive trace and the heat spreader includes; removing selected portions of the conductive layer using an etch mask that defines the pad after solidifying the adhesive; and removing selected portions of the metal layer using an etch mask that defines the terminal and the underlayer after solidifying the adhesive;
thenmounting a semiconductor device on the post, wherein the semiconductor device overlaps the post, the base, the ESD protection layer and the underlayer, the semiconductor device, the post and the base are electrically isolated from the underlayer and the underlayer covers the post in the downward direction; electrically connecting the semiconductor device to the pad, thereby electrically connecting the semiconductor device to the terminal; and thermally connecting the semiconductor device to the post, thereby thermally connecting the semiconductor device to the underlayer.
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48. A method of making a semiconductor chip assembly, comprising:
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providing a post, a base, an ESD protection layer and a metal layer, wherein the post is adjacent to and integral with the base and extends above the base in an upward direction, the base extends below the post in a downward direction opposite the upward direction and extends laterally from the post in lateral directions orthogonal to the upward and downward directions, the ESD protection layer is a thermally conductive, electrically insulative material that contacts and is sandwiched between the base and the metal layer, extends below the base and extends laterally beyond the post and the metal layer extends below the ESD protection layer and extends laterally beyond the post; providing an adhesive, wherein an opening extends through the adhesive; providing a conductive layer, wherein an aperture extends through the conductive layer; mounting the adhesive on the base, including inserting the post into the opening, wherein the adhesive extends above the base and the post extends into the opening; mounting the conductive layer on the adhesive, including aligning the post with the aperture, wherein the conductive layer extends above the adhesive and the adhesive is sandwiched between the base and the conductive layer and is non-solidified;
thenapplying heat to melt the adhesive; moving the base and the conductive layer towards one another, thereby moving the post upward in the aperture and applying pressure to the molten adhesive between the base and the conductive layer, wherein the pressure forces the molten adhesive to flow into and upward in a gap located in the aperture between the post and the conductive layer; applying heat to solidify the molten adhesive, thereby mechanically attaching the post and the base to the conductive layer;
thenproviding a conductive trace that includes a pad, a terminal and a selected portion of the conductive layer, wherein providing the terminal includes removing selected portions of the metal layer after solidifying the adhesive; providing a heat spreader that includes the post, the base, the ESD protection layer and an underlayer that includes at least a portion of the metal layer;
thenmounting a semiconductor device on the post, wherein the semiconductor device overlaps the post, the base, the ESD protection layer and the underlayer, the semiconductor device, the post and the base are electrically isolated from the underlayer and the underlayer covers the post in the downward direction; electrically connecting the semiconductor device to the pad, thereby electrically connecting the semiconductor device to the terminal; and thermally connecting the semiconductor device to the post, thereby thermally connecting the semiconductor device to the underlayer.
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49. A method of making a semiconductor chip assembly, comprising:
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providing a post, a base, an ESD protection layer and a metal layer, wherein the post is adjacent to and integral with the base and extends above the base in an upward direction, the base extends below the post in a downward direction opposite the upward direction and extends laterally from the post in lateral directions orthogonal to the upward and downward directions, the ESD protection layer is a thermally conductive, electrically insulative material that contacts and is sandwiched between the base and the metal layer, extends below the base and extends laterally beyond the post and the metal layer extends below the ESD protection layer and extends laterally beyond the post; providing an adhesive, wherein an opening extends through the adhesive; providing a conductive layer, wherein an aperture extends through the conductive layer; mounting the adhesive on the base, including inserting the post into the opening, wherein the adhesive extends above the base and the post extends into the opening; mounting the conductive layer on the adhesive, including aligning the post with the aperture, wherein the conductive layer extends above the adhesive and the adhesive is sandwiched between the base and the conductive layer and is non-solidified;
thenapplying heat to melt the adhesive; moving the base and the conductive layer towards one another, thereby moving the post upward in the aperture and applying pressure to the molten adhesive between the base and the conductive layer, wherein the pressure forces the molten adhesive to flow into and upward in a gap located in the aperture between the post and the conductive layer; applying heat to solidify the molten adhesive, thereby mechanically attaching the post and the base to the conductive layer;
thenproviding a conductive trace that includes a pad, a terminal and a selected portion of the conductive layer, wherein providing the conductive trace includes providing a plated through-hole after solidifying the adhesive; providing a heat spreader that includes the post, the base, the ESD protection layer and an underlayer that includes at least a portion of the metal layer;
thenmounting a semiconductor device on the post, wherein the semiconductor device overlaps the post, the base, the ESD protection layer and the underlayer, the semiconductor device, the post and the base are electrically isolated from the underlayer and the underlayer covers the post in the downward direction; electrically connecting the semiconductor device to the pad, thereby electrically connecting the semiconductor device to the terminal; and thermally connecting the semiconductor device to the post, thereby thermally connecting the semiconductor device to the underlayer.
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50. A method of making a semiconductor chip assembly, comprising:
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providing a post, a base, an ESD protection layer and a metal layer, wherein the post is adjacent to and integral with the base and extends above the base in an upward direction, the base extends below the post in a downward direction opposite the upward direction and extends laterally from the post in lateral directions orthogonal to the upward and downward directions, the ESD protection layer is a thermally conductive, electrically insulative material that contacts and is sandwiched between the base and the metal layer, extends below the base and extends laterally beyond the post and the metal layer extends below the ESD protection layer and extends laterally beyond the post; providing an adhesive, wherein an opening extends through the adhesive; providing a conductive layer, wherein an aperture extends through the conductive layer; mounting the adhesive on the base, including inserting the post into the opening, wherein the adhesive extends above the base and the post extends into the opening; mounting the conductive layer on the adhesive, including aligning the post with the aperture, wherein the conductive layer extends above the adhesive and the adhesive is sandwiched between the base and the conductive layer and is non-solidified;
thenapplying heat to melt the adhesive; moving the base and the conductive layer towards one another, thereby moving the post upward in the aperture and applying pressure to the molten adhesive between the base and the conductive layer, wherein the pressure forces the molten adhesive to flow into and upward in a gap located in the aperture between the post and the conductive layer; applying heat to solidify the molten adhesive, thereby mechanically attaching the post and the base to the conductive layer;
thenproviding a conductive trace that includes a pad, a terminal and a selected portion of the conductive layer; providing a heat spreader that includes the post, the base, the ESD protection layer and an underlayer that includes at least a portion of the metal layer, wherein providing the underlayer includes removing selected portions of the metal layer after solidifying the adhesive;
thenmounting a semiconductor device on the post, wherein the semiconductor device overlaps the post, the base, the ESD protection layer and the underlayer, the semiconductor device, the post and the base are electrically isolated from the underlayer and the underlayer covers the post in the downward direction; electrically connecting the semiconductor device to the pad, thereby electrically connecting the semiconductor device to the terminal; and thermally connecting the semiconductor device to the post, thereby thermally connecting the semiconductor device to the underlayer.
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51. A method of making a semiconductor chip assembly, comprising:
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providing a post, a base, an ESD protection layer and a metal layer, wherein the post is adjacent to and integral with the base and extends above the base in an upward direction, the base extends below the post in a downward direction opposite the upward direction and extends laterally from the post in lateral directions orthogonal to the upward and downward directions, the ESD protection layer is a thermally conductive, electrically insulative material that contacts and is sandwiched between the base and the metal layer, extends below the base and extends laterally beyond the post and the metal layer extends below the ESD protection layer and extends laterally beyond the post; providing an adhesive, wherein an opening extends through the adhesive; providing a conductive layer, wherein an aperture extends through the conductive layer; mounting the adhesive on the base, including inserting the post into the opening, wherein the adhesive extends above the base and the post extends into the opening; mounting the conductive layer on the adhesive, including aligning the post with the aperture, wherein the conductive layer extends above the adhesive and the adhesive is sandwiched between the base and the conductive layer and is non-solidified;
thenapplying heat to melt the adhesive; moving the base and the conductive layer towards one another, thereby moving the post upward in the aperture and applying pressure to the molten adhesive between the base and the conductive layer, wherein the pressure forces the molten adhesive to flow into and upward in a gap located in the aperture between the post and the conductive layer; applying heat to solidify the molten adhesive, thereby mechanically attaching the post and the base to the conductive layer;
thenproviding a conductive trace that includes a pad, a terminal and a selected portion of the conductive layer; providing a heat spreader that includes the post, the base, the ESD protection layer and an underlayer that includes at least a portion of the metal layer, wherein providing the conductive trace and the heat spreader includes; removing selected portions of the conductive layer using an etch mask that defines the pad after solidifying the adhesive; and removing selected portions of the metal layer using an etch mask that defines the terminal and the underlayer after solidifying the adhesive;
thenmounting a semiconductor device on the post, wherein the semiconductor device overlaps the post, the base, the ESD protection layer and the underlayer, the semiconductor device, the post and the base are electrically isolated from the underlayer and the underlayer covers the post in the downward direction; electrically connecting the semiconductor device to the pad, thereby electrically connecting the semiconductor device to the terminal; and thermally connecting the semiconductor device to the post, thereby thermally connecting the semiconductor device to the underlayer.
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Specification