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Energy modulator for modulating an energy of a particle beam

  • US 8,330,132 B2
  • Filed: 08/27/2008
  • Issued: 12/11/2012
  • Est. Priority Date: 08/27/2008
  • Status: Active Grant
First Claim
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1. A method for modulating an energy of a particle beam, comprising:

  • providing a first modulator that is located closer to a particle source than a nozzle;

    providing a second modulator that is located closer to the nozzle than the particle source;

    operating the first modulator when an energy of the beam is desired to be decreased; and

    operating the second modulator when the energy of the beam is desired to be increased.

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