Electromagnetic radiation generating semiconductor chip and method for making same
First Claim
1. An electromagnetic radiation generating semiconductor chip comprising:
- a first set of layers including a radioparent, electrically conductive growth substrate and a semiconductor layer sequence for generating electromagnetic radiation grown on a first main face of the growth substrate;
a radiation-diffusing structure provided on a main face of the first set of layers, wherein the electromagnetic radiation emitted to the radiation-diffusing structure from said semiconductor layer sequence is scattered by said radiation-diffusing structure; and
a layer or layer sequence reflective to the electromagnetic radiation applied to said radiation-diffusing structure.
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Abstract
An electromagnetic radiation generating semiconductor chip is disclosed. A semiconductor layer sequence suitable for generating electromagnetic radiation is grown on a first main face of a radioparent, electrically conductive growth substrate, for example, a SiC growth substrate. Provided on a second main face of said growth substrate that faces away from said semiconductor layer sequence is a roughening that acts as a diffuser for an electromagnetic radiation emitted into said growth substrate by said semiconductor layer sequence and that in particular has a scattering factor higher than 0.25. A layer or layer sequence reflective of the electromagnetic radiation is applied to said roughening. A method for making the semiconductor chip is also disclosed.
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Citations
34 Claims
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1. An electromagnetic radiation generating semiconductor chip comprising:
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a first set of layers including a radioparent, electrically conductive growth substrate and a semiconductor layer sequence for generating electromagnetic radiation grown on a first main face of the growth substrate; a radiation-diffusing structure provided on a main face of the first set of layers, wherein the electromagnetic radiation emitted to the radiation-diffusing structure from said semiconductor layer sequence is scattered by said radiation-diffusing structure; and a layer or layer sequence reflective to the electromagnetic radiation applied to said radiation-diffusing structure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34)
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Specification