Power semiconductor devices, methods, and structures with embedded dielectric layers containing permanent charges
First Claim
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1. A semiconductor device, comprising:
- a current-controlling structure at a first surface of a semiconductor mass;
a semiconductive drift region extending down into said semiconductor mass;
said current-controlling structure and said drift region being jointly connected in series between a first source/drain region at said first surface, and a second source/drain region which is not connected to said first source/drain region; and
trenches extending down into said semiconductor mass, at least some of said trenches being at least partially filled with a trench-filling material which is not an insulator, and which is electrically separated from said drift region and electrically connected to said second source/drain region.
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Abstract
Power devices using refilled trenches with permanent charge at or near their sidewalls. These trenches extend vertically into a drift region.
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Citations
41 Claims
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1. A semiconductor device, comprising:
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a current-controlling structure at a first surface of a semiconductor mass; a semiconductive drift region extending down into said semiconductor mass;
said current-controlling structure and said drift region being jointly connected in series between a first source/drain region at said first surface, and a second source/drain region which is not connected to said first source/drain region; andtrenches extending down into said semiconductor mass, at least some of said trenches being at least partially filled with a trench-filling material which is not an insulator, and which is electrically separated from said drift region and electrically connected to said second source/drain region. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A semiconductor power device, comprising:
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a layered semiconductor structure which includes at least an upper semiconductor portion and a lower semiconductor portion; said upper portion including a current-controlling structure, and said lower portion including a drift region;
said current-controlling structure and said drift region being jointly connected in series between a first source/drain region at said first surface, and a second source/drain region; andtrenches extending down into said semiconductor structure, at least some ones of said trenches being at least partially filled with a trench-filling material which is not an insulator, and which is electrically separated from said drift region and electrically connected to said second source/drain region. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26)
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27. A semiconductor power device, comprising:
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a current-controlling structure at a first surface of a semiconductor mass; a semiconductive drift region extending down into said semiconductor mass; said current-controlling structure and said drift region being jointly connected in series between a first source/drain region at said first surface, and a second source/drain region at a second surface of said semiconductor mass; and trenches extending down through said drift region into said semiconductor mass, at least some ones of said trenches being at least partially filled with a trench-filling material which is not an insulator, and which is electrically connected to said second source/drain region; said trenches and said current-controlling structure having completely independent lateral alignment. - View Dependent Claims (28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41)
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Specification