Thermal-mechanical signal processing

• US 8,330,323 B2
• Filed: 11/09/2011
• Issued: 12/11/2012
• Est. Priority Date: 08/20/2003
• Status: Active Grant

• Current Assignee: Cornell Research Foundation Incorporated (Cornell University), Naval Research Laboratory (U.S. Department Of Defense)
• Original Assignee: Cornell Research Foundation Incorporated (Cornell University), Naval Research Laboratory (U.S. Department Of Defense)
• Inventors: Zalalutdinov, Maxim, Reichenbach, Robert B., Aubin, Keith, Houston, Brian H., Parpia, Jeevak M., Craighead, Harold G.
• Primary Examiner(s): Trinh, Sonny
• Application Number:
  US13/292,658
• Publication Number:
  US 20120058741A1
• Time in Patent Office: 398 Days
• Field of Search: 310/306, 310/324, 310/371, 310/367, 310/369, 735/79, 735/70, 324/95, 324/96
• US Class Current: 310/306
• CPC Class Codes: G02B 26/0858 the reflecting means being moved or deformed by piezoelectric means
• CPC Class Codes: H03B 5/30 with frequency-determining element being electromechanical resonator
• CPC Class Codes: H03C 1/46 Modulators with mechanically-driven or acoustically-driven parts
• CPC Class Codes: H03D 1/00 Demodulation of amplitude-modulated oscillations H03D5/00, H03D9/00, H03D11/00 take precedence
• CPC Class Codes: H03D 1/02 Details
• CPC Class Codes: H03D 3/34 by means of electromechanical devices H03D3/16 takes precedence
• CPC Class Codes: H03H 2009/02488 Vibration modes
• CPC Class Codes: H03H 2009/02511 Vertical, i.e. perpendicular to the substrate plane
• CPC Class Codes: H03H 3/0072 of microelectro-mechanical resonators or networks micromembranes or microbeams B81B2203/01; manufacture of microstructural devices in general B81C
• CPC Class Codes: H03H 9/02259 Driving or detection means
• CPC Class Codes: H03H 9/2405 of microelectro-mechanical resonators
• CPC Class Codes: H03H 9/2436 Disk resonators

Abstract

A source signal is converted into a time-variant temperature field with transduction into mechanical motion. In one embodiment, the conversion of a source signal into the time-variant temperature field is provided by utilizing a micro-fabricated fast response, bolometer-type radio frequency power meter. A resonant-type micromechanical thermal actuator may be utilized for temperature read-out and demodulation.

Claims

1. A method of signal processing for extracting base-band information from a broadcast signal, the method comprising:

converting a radio frequency signal into heat; and

measuring temperature changes representative of the radio frequency signal including converting the temperature changes into mechanical motion.

2. The method of claim 1 wherein a micro-fabricated thermo-mechanical actuator is to convert the temperature changed into mechanical motion.

3. The method of claim 2 wherein the actuator has a resonant frequency that matches the frequency of the temperature changes.

4. The method of claim 1 wherein the broadcast signal is in the radio frequency range.

5. A method of signal processing for extracting base-band information from an amplitude modulated broadcast signal, the method comprising:

converting the amplitude modulated broadcast signal into heat using a micro-fabricated resistive heater having a thermal inertia small enough to follow the modulation; and

measuring temperature changes in the micro-fabricated resistive heater.

6. The method of claim 5 wherein oscillations in the heat are converted into mechanical motion.

7. The method of claim 6 wherein a micro-fabricated thermo-mechanical actuator is used for converting heat into mechanical motion.

8. The method of claim 7 wherein the micro-fabricated thermo-mechanical actuator has a resonant frequency that matches the frequency of the temperature changes.

9. The method of claim 5 wherein the broadcast signal is in the radio frequency range.

10. A method comprising:

converting a broadcast signal into temperature oscillations; and

converting the temperature oscillations into mechanical motion representative of the broadcast signal.

11. The method of claim 10 wherein converting the temperature oscillations into mechanical motion is performed by an actuator having a resonant frequency that approximately matches the frequency of temperature oscillations.

12. The method of claim 11 and further comprising filtering unwanted frequency components as a function of the resonant frequency approximately matching the frequency of temperature oscillations.

13. The method of claim 10 wherein the broadcast signal is converted into temperature oscillations by a micro-fabricated resistive heating element.

14. The method of claim 13 wherein the heating element is a bolometer.

15. The method of claim 10 wherein converting the temperature oscillations into mechanical motion is performed by a dome type micro-fabricated oscillator.

16. The method of claim 10 and further comprising separating a carrier from a broadcast signal represented by the mechanical motion.

17. The method of claim 16 and further comprising extracting base-band information from the broadcast signal represented by the mechanical motion.

18. The method of claim 10 wherein the method is implemented on a single semiconductor chip.

19. The method of claim 10 wherein the broadcast signal is in the FM band, and wherein an FM carrier is demodulated using slope detection.