Optical method for precise three-dimensional position measurement

• US 8,330,963 B2
• Filed: 10/10/2011
• Issued: 12/11/2012
• Est. Priority Date: 11/04/2008
• Status: Active Grant

• Current Assignee: Dmitri Simonian, Sergiy Pryadkin
• Original Assignee: Dmitri Simonian, Sergiy Pryadkin
• Inventors: Pryadkin, Sergiy, Simonian, Dmitri
• Primary Examiner(s): Chowdhury, Tarifur
• Assistant Examiner(s): HANSEN, JONATHAN M
• Application Number:
  US13/269,698
• Publication Number:
  US 20120113433A1
• Time in Patent Office: 428 Days
• Field of Search: 356/72, 356/622, 356/482, 324/716
• US Class Current: 356/500
• CPC Class Codes: G01B 11/03 by measuring coordinates of points
• CPC Class Codes: G01B 9/02057 by using common path configuration, i.e. reference and object path almost entirely overlapping
• CPC Class Codes: H02N 2/0055 Supports for driving or driven bodies; Means for pressing driving body against driven body
• CPC Class Codes: H02N 2/025 Inertial sliding motors
• CPC Class Codes: H02N 2/028 along multiple or arbitrary translation directions, e.g. XYZ stages
• CPC Class Codes: Y10T 29/42 Piezoelectric device making

Abstract

We disclose a method for accurate three-dimensional position measurement in the field of nano-positioning using a single light beam and principles of interferometry to measure position.

Claims

1. A method of measuring three orthogonal coordinates of an object restricted in space to be movable without rotation by a single beam of light comprising:

providing an interferometer comprising a sensing arm and a probing beam;

affixing a position-sensing photodetector to said object;

using said photodetector as a sensing arm of said interferometer, wherein said probing beam is reflected by a surface of the photodetector;

measuring one of said coordinates interferometrically; and

measuring the remaining said coordinates by measuring electrical signals generated by said photodetector and converting measured signals into coordinates using calculations.

2. The method of claim 1 wherein said interferometer is a fiber interferometer, further comprising a lens for collimating light emanating from said fiber interferometer and directing said light onto said photodetector.

3. The method of claim 1 further comprising providing the accuracy of determination of coordinates of said object in plane of said photodetector between 0.1 nm and 10 nm for said coordinates disposed within 100 μ

m from the center of said photodetector.

4. The method of claim 1 further comprising providing the accuracy of determination of coordinates of said object in plane of said photodetector between 10 nm and 100 nm for said coordinates disposed within 10 mm from the center of said photodetector.

5. The method of claim 1 wherein said lens is a gradient refractive index lens.

6. The method of claim 1 wherein said position-sensing photodetector is a quadrant photodetector.

7. The method of claim 1 wherein said position-sensing photodetector is a continuous position-sensing light detector operating on the principle of current spreading.

8. The method of claim 2 wherein the lens creating a collimated light is attached to the base of a first translational positioner in a stack of positioners each having a base and a platform movable on its base without rotation, each next positioner has its base connected to or coincident with the moving platform of the previous positioner and the last moving platform having a position-sensing photodetector attached to it.

9. A method of determining the coordinates of an object in space along mutually orthogonal x, y and z axes wherein the object is restricted against rotational motion comprising the steps of:

attaching a position-sensitive photodetector to said object wherein said photodetector has a photodetecting surface parallel to the x-y plane;

aiming an interferometric source of coherent light at the photodetector along the z axis; and

measuring the coordinates of the object along three axes, wherein the measurement of the z axis is made interferometrically by reflecting a probing beam from a surface of the photodetector, while the x and y axes are determined by processing signals from the position-sensitive photodetector.