Vertical-cavity surface-emitting semiconductor laser diode and method for the manufacture thereof
First Claim
1. A vertical-cavity surface-emitting semiconductor laser diode having a resonator with a first distributed Bragg reflector, an active zone which has a p-n junction and is embedded into a sequence of semiconductor layers, and a second distributed Bragg reflector, the semiconductor laser diode having an emission wavelength λ
- , characterized bya periodic structure arranged within the resonator as an optical grating made of a semiconductive material and a dielectric material;
a main plane of extension of the periodic structure being arranged substantially perpendicularly to a direction of emission of the semiconductor laser diode; and
the periodic structure being in direct contact with at least one of the semiconductor layers and with at least one of the distributed Bragg reflectors, and whereinthe periodic structure is made of at least one material of the semiconductor layers and at least one material of the two distributed Bragg reflectors,the period of the periodic structure is at most λ
/n, n being a function of the index of refraction of the semiconductive material and/or the index of refraction of the dielectric material, andn is the higher of the two indices of refraction.
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Abstract
The present invention includes a vertical-cavity surface-emitting semiconductor laser diode having a resonator with a first distributed Bragg reflector, an active zone which has a p-n junction and is embedded into a semiconductor layer sequence, and a second distributed Bragg reflector. The semiconductor laser diode has an emission wavelength λ, wherein a periodic structure is arranged within the resonator as an optical grating made of semiconductive material and dielectric material, the main plane of extension of which is arranged substantially perpendicularly to the direction of emission of the semiconductor laser diode. The periodic structure is in direct contact with at least one of the semiconductor layers embedding the active zone and with at least one of the two distributed Bragg reflectors.
7 Citations
25 Claims
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1. A vertical-cavity surface-emitting semiconductor laser diode having a resonator with a first distributed Bragg reflector, an active zone which has a p-n junction and is embedded into a sequence of semiconductor layers, and a second distributed Bragg reflector, the semiconductor laser diode having an emission wavelength λ
- , characterized by
a periodic structure arranged within the resonator as an optical grating made of a semiconductive material and a dielectric material; a main plane of extension of the periodic structure being arranged substantially perpendicularly to a direction of emission of the semiconductor laser diode; and the periodic structure being in direct contact with at least one of the semiconductor layers and with at least one of the distributed Bragg reflectors, and wherein the periodic structure is made of at least one material of the semiconductor layers and at least one material of the two distributed Bragg reflectors, the period of the periodic structure is at most λ
/n, n being a function of the index of refraction of the semiconductive material and/or the index of refraction of the dielectric material, andn is the higher of the two indices of refraction. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
- , characterized by
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12. A vertical-cavity surface-emitting semiconductor laser diode having a resonator with a first distributed Bragg reflector, an active zone which has a p-n junction and is embedded into a sequence of semiconductor layers, and a second distributed Bragg reflector, the semiconductor laser diode having an emission wavelength λ
- , characterized by
a periodic structure arranged within the resonator as an optical grating made of a semiconductive material and a dielectric material; a main plane of extension of the periodic structure being arranged substantially perpendicularly to a direction of emission of the semiconductor laser diode; and the periodic structure being in direct contact with at least one of the semiconductor layers and with at least one of the distributed Bragg reflectors, and wherein the resonator further comprises a tunnel contact layer on a p side of the active zone, a dimension of a projection of the periodic structure onto the tunnel contact layer corresponds at least to a dimension of an aperture of the tunnel contact layer, the tunnel contact layer adjoins an n-doped semiconductor layer, and the periodic structure directly adjoins the n-doped semiconductor layer. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
- , characterized by
Specification