Triaxial acceleration sensor
First Claim
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1. An acceleration sensor comprising:
- a substrate;
a first mass element structured as an external frame enclosing at least three area sections, the external frame connected to the substrate in a centrally located first of the at least three area sections in such a way that the external frame is rotatable about an axis;
a second mass element situated in a second of the at least three area sections and connected to the second area section of the external frame in such a way that the second mass element is movable along a first direction parallel to the axis; and
a third mass element situated in a third of the at least tree area sections and connected to the third area section of the external frame in such a way that the third mass element is movable along a second direction perpendicular to the axis.
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Abstract
An acceleration sensor includes a substrate and a first mass element, which is connected to the substrate in such a way that the first mass element is rotatable about an axis, the first mass element being connected to a second mass element in such a way that the second mass element is movable along a first direction parallel to the axis, and the first mass element being connected to a third mass element in such a way that the third mass element is movable along a second direction perpendicular to the axis.
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Citations
10 Claims
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1. An acceleration sensor comprising:
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a substrate; a first mass element structured as an external frame enclosing at least three area sections, the external frame connected to the substrate in a centrally located first of the at least three area sections in such a way that the external frame is rotatable about an axis; a second mass element situated in a second of the at least three area sections and connected to the second area section of the external frame in such a way that the second mass element is movable along a first direction parallel to the axis; and a third mass element situated in a third of the at least tree area sections and connected to the third area section of the external frame in such a way that the third mass element is movable along a second direction perpendicular to the axis. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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Specification